LU52106A1 - - Google Patents

Info

Publication number
LU52106A1
LU52106A1 LU52106A LU52106A LU52106A1 LU 52106 A1 LU52106 A1 LU 52106A1 LU 52106 A LU52106 A LU 52106A LU 52106 A LU52106 A LU 52106A LU 52106 A1 LU52106 A1 LU 52106A1
Authority
LU
Luxembourg
Application number
LU52106A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to LU52106A priority Critical patent/LU52106A1/xx
Priority to GB38382/67A priority patent/GB1194428A/en
Priority to ES345149A priority patent/ES345149A1/es
Priority to BE704031A priority patent/BE704031A/xx
Priority to BE704032A priority patent/BE704032A/xx
Priority to CH1308567A priority patent/CH501063A/fr
Priority to CH1308667A priority patent/CH488634A/fr
Priority to FR121838A priority patent/FR1556227A/fr
Priority to FR121839A priority patent/FR1556228A/fr
Priority to DE19671615287 priority patent/DE1615287A1/de
Priority to DE1967G0051136 priority patent/DE1615288A1/de
Priority to AT874467A priority patent/AT280514B/de
Priority to NL6713182A priority patent/NL6713182A/xx
Priority to US670853A priority patent/US3616451A/en
Priority to NL6713181A priority patent/NL6713181A/xx
Priority to AT877167A priority patent/AT284365B/de
Priority to SE1361367A priority patent/SE324436B/xx
Priority to FI672690A priority patent/FI46636C/fi
Publication of LU52106A1 publication Critical patent/LU52106A1/xx

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/568—Transferring the substrates through a series of coating stations
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3464—Sputtering using more than one target
LU52106A 1966-10-05 1966-10-05 LU52106A1 (de)

Priority Applications (18)

Application Number Priority Date Filing Date Title
LU52106A LU52106A1 (de) 1966-10-05 1966-10-05
GB38382/67A GB1194428A (en) 1966-10-05 1967-08-21 Process and Apparatus for Surface Coating Glass and Other Materials
ES345149A ES345149A1 (es) 1966-10-05 1967-09-18 Aparato para utilizar en el recubrimiento superficial de articulos.
BE704031A BE704031A (de) 1966-10-05 1967-09-19
BE704032A BE704032A (de) 1966-10-05 1967-09-19
CH1308567A CH501063A (fr) 1966-10-05 1967-09-19 Appareil destiné à déposer des couches sur des objets par dépôt sous vide de matières de revêtement
CH1308667A CH488634A (fr) 1966-10-05 1967-09-19 Procédé de dépôt sous vide d'au moins deux couches superposées sur la surface d'un objet
FR121838A FR1556227A (de) 1966-10-05 1967-09-21
FR121839A FR1556228A (de) 1966-10-05 1967-09-21
DE19671615287 DE1615287A1 (de) 1966-10-05 1967-09-21 Vorrichtung zur Aufbringung duenner Schichten auf Glas oder andere Materialien unter Vakuum
DE1967G0051136 DE1615288A1 (de) 1966-10-05 1967-09-21 Verfahren und Vorrichtung zur im Vakuum erfolgenden Ablagerung duenner Schichten auf Glas und anderen Materialien
AT874467A AT280514B (de) 1966-10-05 1967-09-26 Vorrichtung zur Bildung wenigstens zweier verschiedener, übereinander angeordneter dünner Überzugsschichten
NL6713182A NL6713182A (de) 1966-10-05 1967-09-27
US670853A US3616451A (en) 1966-10-05 1967-09-27 Multiple-layer coating
NL6713181A NL6713181A (de) 1966-10-05 1967-09-27
AT877167A AT284365B (de) 1966-10-05 1967-09-27 Vorrichtung zum Beschichten von Gegenständen
SE1361367A SE324436B (de) 1966-10-05 1967-10-04
FI672690A FI46636C (fi) 1966-10-05 1967-10-05 Kappaleiden päällystämisessä käytettävä laite, jossa laitteessa päälly sainekerros levitetään kappaleen pinnalle alennetussa paineessa.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
LU52106A LU52106A1 (de) 1966-10-05 1966-10-05

Publications (1)

Publication Number Publication Date
LU52106A1 true LU52106A1 (de) 1968-05-07

Family

ID=19724990

Family Applications (1)

Application Number Title Priority Date Filing Date
LU52106A LU52106A1 (de) 1966-10-05 1966-10-05

Country Status (11)

Country Link
US (1) US3616451A (de)
AT (2) AT280514B (de)
BE (1) BE704031A (de)
CH (1) CH501063A (de)
DE (1) DE1615287A1 (de)
ES (1) ES345149A1 (de)
FI (1) FI46636C (de)
FR (1) FR1556228A (de)
GB (1) GB1194428A (de)
LU (1) LU52106A1 (de)
NL (1) NL6713182A (de)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3767559A (en) * 1970-06-24 1973-10-23 Eastman Kodak Co Sputtering apparatus with accordion pleated anode means
FR2098563A5 (de) * 1970-07-10 1972-03-10 Progil
JPH0733576B2 (ja) * 1989-11-29 1995-04-12 株式会社日立製作所 スパツタ装置、及びターゲツト交換装置、並びにその交換方法
JPH05804A (ja) * 1990-08-01 1993-01-08 Sumitomo Electric Ind Ltd 大面積複合酸化物超電導薄膜の成膜装置
US5292419A (en) * 1990-12-20 1994-03-08 Leybold Aktiengesellschaft Sputtering unit
DE4040856A1 (de) 1990-12-20 1992-06-25 Leybold Ag Zerstaeubungsanlage
US5322606A (en) * 1991-12-26 1994-06-21 Xerox Corporation Use of rotary solenoid as a shutter actuator on a rotating arm
US5279724A (en) * 1991-12-26 1994-01-18 Xerox Corporation Dual sputtering source
GB9405442D0 (en) * 1994-03-19 1994-05-04 Applied Vision Ltd Apparatus for coating substrates
US6045671A (en) * 1994-10-18 2000-04-04 Symyx Technologies, Inc. Systems and methods for the combinatorial synthesis of novel materials
DE19830223C1 (de) * 1998-07-07 1999-11-04 Techno Coat Oberflaechentechni Vorrichtung und Verfahren zum mehrlagigen PVD - Beschichten von Substraten
US6833031B2 (en) * 2000-03-21 2004-12-21 Wavezero, Inc. Method and device for coating a substrate
JP2003141719A (ja) * 2001-10-30 2003-05-16 Anelva Corp スパッタリング装置及び薄膜形成方法
JP4066044B2 (ja) * 2002-11-08 2008-03-26 信行 高橋 成膜方法及びスパッタ装置
CA2564539C (en) * 2005-11-14 2014-05-06 Sulzer Metco Coatings B.V. A method for coating of a base body with a platinum modified aluminide ptmal by means of a physical deposition out of the gas phase
US8287647B2 (en) * 2007-04-17 2012-10-16 Lam Research Corporation Apparatus and method for atomic layer deposition
KR100865475B1 (ko) * 2007-08-30 2008-10-27 세메스 주식회사 노즐 어셈블리, 이를 갖는 처리액 공급 장치 및 이를이용하는 처리액 공급 방법
US10586689B2 (en) 2009-07-31 2020-03-10 Guardian Europe S.A.R.L. Sputtering apparatus including cathode with rotatable targets, and related methods
KR20130079489A (ko) * 2010-07-28 2013-07-10 시너스 테크놀리지, 인코포레이티드 기판상에 막을 증착하기 위한 회전 반응기 조립체
US20130014700A1 (en) * 2011-07-11 2013-01-17 Hariharakeshava Sarpangala Hegde Target shield designs in multi-target deposition system.
JP2017501306A (ja) * 2013-10-24 2017-01-12 マイヤー・ブルガー・（ジャーマニー）・アクチエンゲゼルシャフト 磁電管構造体
AU2018297172B2 (en) * 2017-07-07 2021-07-01 Nextracker Llc Systems for and methods of positioning solar panels in an array of solar panels to efficiently capture sunlight

Also Published As

Publication number Publication date
AT280514B (de) 1970-04-10
US3616451A (en) 1971-10-26
FI46636C (fi) 1973-05-08
DE1615287A1 (de) 1970-06-11
GB1194428A (en) 1970-06-10
ES345149A1 (es) 1968-11-16
NL6713182A (de) 1968-04-08
CH501063A (fr) 1970-12-31
FI46636B (de) 1973-01-31
FR1556228A (de) 1969-02-07
BE704031A (de) 1968-03-19
AT284365B (de) 1970-09-10

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