KR980005911A - How to make scribe line - Google Patents
How to make scribe line Download PDFInfo
- Publication number
- KR980005911A KR980005911A KR1019960022865A KR19960022865A KR980005911A KR 980005911 A KR980005911 A KR 980005911A KR 1019960022865 A KR1019960022865 A KR 1019960022865A KR 19960022865 A KR19960022865 A KR 19960022865A KR 980005911 A KR980005911 A KR 980005911A
- Authority
- KR
- South Korea
- Prior art keywords
- scribe line
- layer
- manufacturing
- interface
- stacked
- Prior art date
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- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
본 발명은 반도체 소자의 재조공정에서 웨이퍼의 패턴 정렬을 검사하는 정렬 마크가 형성되는 스크라이브 라인의 제작방법을 개시한다. 이방법은 스크라이브 라인과 다이의 계면에 임의 반도체 소자의 제조순서에 따라서 순차적으로 적층되는 층을 스크라이브 라인과 생산품 다이와의 경게층으로 사용하는 스크라이브 라인의 제작방법에 있어서, 적층되는 각 층의 프레임 사이즈를 상부층으로 갈수록 소정크기만큼 크게 형성하여, 마지막으로 적층된층이 스크라이브 라인과의 계면이 되는 것을 특징으로 한다.The present invention discloses a method for manufacturing a scribe line in which alignment marks for inspecting pattern alignment of a wafer are formed in a manufacturing process of a semiconductor device. This method is a method for manufacturing a scribe line using a layer sequentially stacked on the interface between a scribe line and a die according to the manufacturing order of an arbitrary semiconductor element as a hardening layer between the scribe line and the product die. Is formed as large as a predetermined size toward the upper layer, the last stacked layer is characterized in that the interface with the scribe line.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.
제 2 도는 본 발명의 실시예에 따른 스크라이브 라인 제작방법을 보여주는 공정 단면도.2 is a cross-sectional view showing a method for manufacturing a scribe line according to an embodiment of the present invention.
Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019960022865A KR980005911A (en) | 1996-06-21 | 1996-06-21 | How to make scribe line |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019960022865A KR980005911A (en) | 1996-06-21 | 1996-06-21 | How to make scribe line |
Publications (1)
Publication Number | Publication Date |
---|---|
KR980005911A true KR980005911A (en) | 1998-03-30 |
Family
ID=66287480
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019960022865A KR980005911A (en) | 1996-06-21 | 1996-06-21 | How to make scribe line |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR980005911A (en) |
-
1996
- 1996-06-21 KR KR1019960022865A patent/KR980005911A/en not_active Application Discontinuation
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Legal Events
Date | Code | Title | Description |
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WITN | Withdrawal due to no request for examination |