KR980005373U - 진공 라인내 이물질 제거장치 - Google Patents

진공 라인내 이물질 제거장치

Info

Publication number
KR980005373U
KR980005373U KR2019960019287U KR19960019287U KR980005373U KR 980005373 U KR980005373 U KR 980005373U KR 2019960019287 U KR2019960019287 U KR 2019960019287U KR 19960019287 U KR19960019287 U KR 19960019287U KR 980005373 U KR980005373 U KR 980005373U
Authority
KR
South Korea
Prior art keywords
removal device
foreign material
material removal
vacuum line
vacuum
Prior art date
Application number
KR2019960019287U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019960019287U priority Critical patent/KR980005373U/ko
Publication of KR980005373U publication Critical patent/KR980005373U/ko

Links

KR2019960019287U 1996-06-29 1996-06-29 진공 라인내 이물질 제거장치 KR980005373U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019960019287U KR980005373U (ko) 1996-06-29 1996-06-29 진공 라인내 이물질 제거장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019960019287U KR980005373U (ko) 1996-06-29 1996-06-29 진공 라인내 이물질 제거장치

Publications (1)

Publication Number Publication Date
KR980005373U true KR980005373U (ko) 1998-03-30

Family

ID=60874160

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019960019287U KR980005373U (ko) 1996-06-29 1996-06-29 진공 라인내 이물질 제거장치

Country Status (1)

Country Link
KR (1) KR980005373U (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190140334A (ko) * 2018-06-11 2019-12-19 주식회사 에이씨엔 캠 타입의 게이트 밸브 시스템 및 반도체 기판 처리 장비

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190140334A (ko) * 2018-06-11 2019-12-19 주식회사 에이씨엔 캠 타입의 게이트 밸브 시스템 및 반도체 기판 처리 장비

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Legal Events

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WITN Withdrawal due to no request for examination