KR970062444A - 초고순도 가스 분배 시스템을 위한 밸브 커플링 - Google Patents

초고순도 가스 분배 시스템을 위한 밸브 커플링 Download PDF

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Publication number
KR970062444A
KR970062444A KR1019970005270A KR19970005270A KR970062444A KR 970062444 A KR970062444 A KR 970062444A KR 1019970005270 A KR1019970005270 A KR 1019970005270A KR 19970005270 A KR19970005270 A KR 19970005270A KR 970062444 A KR970062444 A KR 970062444A
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South Korea
Prior art keywords
housing
valve stem
valve
coupler
hole
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KR1019970005270A
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English (en)
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브리스 에반스
헬런 레벤너
조슈아 콜린스
러쎌 로거스
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제임스 엠. 오쓰아웃
에어로퀴프 코포레이션
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Publication of KR970062444A publication Critical patent/KR970062444A/ko

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
    • C23C16/4409—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber characterised by sealing means
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/32—Details
    • F16K1/34—Cutting-off parts, e.g. valve members, seats
    • F16K1/44—Details of seats or valve members of double-seat valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/32—Details
    • F16K1/34—Cutting-off parts, e.g. valve members, seats
    • F16K1/44—Details of seats or valve members of double-seat valves
    • F16K1/443—Details of seats or valve members of double-seat valves the seats being in series
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/003—Housing formed from a plurality of the same valve elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
    • F16K31/1221—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston one side of the piston being spring-loaded
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L29/00—Joints with fluid cut-off means
    • F16L29/04—Joints with fluid cut-off means with a cut-off device in each of the two pipe ends, the cut-off devices being automatically opened when the coupling is applied
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C13/00—Details of vessels or of the filling or discharging of vessels
    • F17C13/04—Arrangement or mounting of valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/01—Mounting arrangements
    • F17C2205/0123—Mounting arrangements characterised by number of vessels
    • F17C2205/013—Two or more vessels
    • F17C2205/0134—Two or more vessels characterised by the presence of fluid connection between vessels
    • F17C2205/0146—Two or more vessels characterised by the presence of fluid connection between vessels with details of the manifold
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0323—Valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0338—Pressure regulators
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0341—Filters
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00—Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/03—Fluid connections, filters, valves, closure means or other attachments
    • F17C2205/0302—Fittings, valves, filters, or components in connection with the gas storage device
    • F17C2205/0382—Constructional details of valves, regulators
    • F17C2205/0385—Constructional details of valves, regulators in blocks or units
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2221/00—Handled fluid, in particular type of fluid
    • F17C2221/01—Pure fluids
    • F17C2221/014—Nitrogen
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2221/00—Handled fluid, in particular type of fluid
    • F17C2221/05—Ultrapure fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/01—Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the phase
    • F17C2223/0107—Single phase
    • F17C2223/0123—Single phase gaseous, e.g. CNG, GNC
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
    • F17C2227/03—Heat exchange with the fluid
    • F17C2227/0337—Heat exchange with the fluid by cooling
    • F17C2227/0358—Heat exchange with the fluid by cooling by expansion
    • F17C2227/036—"Joule-Thompson" effect
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2227/00—Transfer of fluids, i.e. method or means for transferring the fluid; Heat exchange with the fluid
    • F17C2227/04—Methods for emptying or filling
    • F17C2227/044—Methods for emptying or filling by purging
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/04—Indicating or measuring of parameters as input values
    • F17C2250/0404—Parameters indicated or measured
    • F17C2250/043—Pressure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/04—Indicating or measuring of parameters as input values
    • F17C2250/0404—Parameters indicated or measured
    • F17C2250/0439—Temperature
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00—Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/06—Controlling or regulating of parameters as output values
    • F17C2250/0605—Parameters
    • F17C2250/0636—Flow or movement of content
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2260/00—Purposes of gas storage and gas handling
    • F17C2260/03—Dealing with losses
    • F17C2260/035—Dealing with losses of fluid
    • F17C2260/036—Avoiding leaks
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2265/00—Effects achieved by gas storage or gas handling
    • F17C2265/01—Purifying the fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17C—VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2270/00—Applications
    • F17C2270/05—Applications for industrial use
    • F17C2270/0518—Semiconductors
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/87917—Flow path with serial valves and/or closures
    • Y10T137/88062—Coaxial oppositely directed seats

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
  • Quick-Acting Or Multi-Walled Pipe Joints (AREA)
  • Valve Housings (AREA)
  • Pipeline Systems (AREA)
  • Lift Valve (AREA)

Abstract

본 발명은 반도체 제조에 이용되는 초고순도 가스 분배를 위한 밸브 커플러(20)와 가스 처리 구성품에 관한 것이다. 상기 커플러에서, 밸브 스템(stem)/불노즈(bullnose)(34)는 상기 커플러의 외부에 바로 인접한 커플러(56)의 구멍을 밀봉하여 상기 커플러의 최소한의 침수 표면만 외부에 노출시킨다. 가스 처리 구성품(예를 들면, 필터(120)), 또는 전체가 일체인 가스 스틱 조립체(12)는 상기 밸브 커플러에 의해 입구 및 출구에서 외부로부터 밀봉될 수 있다. 결국, 상기 전체 장치는 제조된 후 정화되고, 선적 및 설치하는 동안 제어된 환경에서 유지되어 설치된 후 정화할 필요성이 줄어든다.

Description

초고순도 가스 분배 시스템을 위한 밸브 커플링
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명의 원리에 따른 통합 가스 스틱/밸브 커플러 조립체 형태의 가스 박스의 개략적인 사시도.
제2도는 제1도에 도시된 나사 커플러의 대안을 예증하기 위하여, 밸브 커플러에 대한 튜브 스트브에 결합된 공기 제어 선을 나타내는, 선 2-2를 따라 절취된 제1도의 가스 스틱의 부분 단면도.
제3도는 제2도의 가스스틱의 두 밸브 커플러의 부분적인 단면상세도.
제4도는 제3도의 두 밸브 커플러 사이의 이음매의 확대 단면도.
제5도는 본 발명의 제2실시예에 따른 통합(integrated) 밸브 커플러를 가진 필터의 상기 커플러가 결합되지 않은 상태를 도시한 부분적인 단면도.
제6 및 제7도는 본 발명의 원리에 따른 밸브 커플러의 다른 실시예의 부분적인 단면도.
제8도는 제6도 및 제7도의 다른 밸브 커플러의 결합되지 않은 상태를 도시한 도면.
제9도는 본 발명의 원리에 따른 밸브 커플러를 이용하는 완전한 가스 분배 시스템의 개략적인 다이어그램.

Claims (10)

  1. 초고순도 가스 분배를 위한 밸브 커플러에 있어서, 외부 표면과, 가스 운반 챔버를 한정하는 내부 표면과, 상기 내부 표면으로부터 상기 외부 표면으로 연장되는 제1및 제2구멍 한정 표면을 구비하고, 상기 가스 운반 챔버와 하우징의 외부 표면이 노출되는 외부 환경 사이에서 가스의 흐름을 한정하는 밸브 하우징과, 상기 제1구멍을 통하여 연장되는 축을 따라서, 제1위치와 제2위치 사이에서 선형 운동할 수 있도록 상기 하우징내에 미끄럼가능하게 설치된 기부측 단부 및 말단측 단부를 구비하며, 상기 말단측 단부에서 밀봉 표면을 구비한 밸브 스템과, 외부 원주와 내부 원주를 가지는 거의 평면의 유연한 격판을 포함하고, 상기 내부 원주는 상기 밸브 스템에 밀봉 결합되고, 상기 외부 원주는 상기 하우징의 내부 표면에 밀봉결합되어, 상기 하우징의 내부 표면을 두 부분으로 분리하고, 상기 구멍 한정 표면이 상기 외부 표면과 상기 하우징의 상기 내부 표면의 공통 부분 사이에서 교통하며, 상기 제1위치에서, 상기 밸브 스템의 상기 밀봉 표면은 상기 하우징의 상기 제1구멍을 둘러싸는 표면과 결합하고, 상기 밸브 스템의 말단측 단부는 상기 제1구멍 한정 표면에 인접하는 영역에서 상기 하우징의 상기 외부 표면과 거의 공통면이므로, 상기 제1구멍이 상기 불노즈에 의해 밀봉될 때 상기 하우징의 상기 내부 표면의 최소부분만이 외부 환경에 노출되는 것을 특징으로 하는 초고순도 가스 분배를 위한 밸브 커플러.
  2. 제1항에 있어서, 상기 밀봉 표면은 상기 하우징의 상기 내부 표면에 인접한 상기 구멍을 둘러싸는 표면과 결합하고, 상기 제2위치에서, 상기 밸브 스템의 상기 밀봉 표면은 상기 하우징으로 후퇴하여 상기 하우징의 상기 외부 표면으로부터 멀어지는 것을 특징으로 하는 초고순도 가스 분배를 위한 밸브 커플러.
  3. 제1항에 있어서, 상기 밀봉 표면은 상기 하우징의 상기 외부 표면에 인접한 상기 구멍을 둘러싸는 표면과 결합하고, 상기 밸브 스템을 상기 제1위치로부터 상기 제2위치로 이동시키는 일은 상기 밀봉 표면을 상기 하우징으로부터 외부로 이동시켜서 상기 밸브 스템의 상기 말단측 단부가 상기 하우징의 상기 외부 표면을 지나서 연장되도록 하는 것을 특징으로 하는 초고순도 가스 분배를 위한 밸브 커플러.
  4. 제1항에 있어서, 공기 작동 실린더를 한정하는 구동 하우징을 부가로 포함하고, 압축 가스가 상기 작동 실린더 내로 인가되도록 상기 작동 실린더와 교통하는 제3구멍을 부가로 한정하고, 여기서, 상기 밸브 스템은 기부측 단부에서 상기 작동 실린더 내에 미끄럼가능하게 설치된 피스톤을 부가로 포함하고, 또한, 상기 밸브 스템을 상기 제1위치를 향해 이동시키도록 상기 구동 하우징과 상기 밸브 스템 사이에 힘을 가하는 스프링을부가로 포함하므로써, 상기 밸브 스템은 압축 가스를 상기 제3구멍을 통하여 상기 작동 실린더로 주입함으로써 상기 제1위치로부터 상기 제2위치로 작동될 수 있는 것을 특징으로 하는 초고순도 가스 분배를 위한 밸브 커플러.
  5. 제4항에 있어서, 상기 밀봉 표면은 상기 하우징의 상기 내부 표면에 인접한 상기 구멍을 둘러싸는 표면과 결합하고, 상기 제2위치에서, 상기 밸브 스템의 상기 빌봉 표면은 상기 하우징으로 후퇴하여 상기 하우징의 상기 외부 표면으로부터 멀어지고, 상기 스프링은 상기 밸브 스템을 상기 제1구멍으로 추진하여 상기 표면을 상기 구멍을 둘렀싸는 표면과 결합시키는 것을 특징으로 하는 초고순도 가스 분배를 위한 밸브 커플러.
  6. 제4항에 있어서, 상기 밀봉 표면은 상기 하우징의 외부 표면에 인접한 상기 구멍을 둘러싸는 표면과 결합하고, 상기 제2위치에서, 상기 밀봉 표면은 상기 하우징으로부터 외부로 연장되어 상기 밸브 스템의 상기 말단측 단부를 상기 하우징의 상기 외부 표면의 외부로 연장시키고, 상기 스프링은 상기 밸브 스템을 상기 하우징 내부로 추진하여 상기 표면을 상기 구멍을 둘러싸는 표면과 결합시키는 것을 특징으로 하는 초고순도 가스 분배를 위한 밸브 커플러.
  7. 제1항에 있어서, 상기 하우징에서 회전하도록 저널된(journalled) 피니언을 부가로 포함하고, 상기 밸브 스템은 상기 피니언과 결합하는 기부측 단부에 톱니표면을 구비하므로써, 따라서 상기 피니언의 회전으로 상기 제1 및 제2위치 사이에서 상기 스템의 운동을 실행하는 것을 특징으로 하는 초고순도 가스 분배를 위한 밸브 커플러.
  8. 제7항에 있어서, 공기 작동 실린더를 한정하고, 압축공기를 상기 실린더로 인가하기 위한 상기 작동 실린더와 교통하는 제3구멍을 한정하는 구동 하우징과, 제2축선을 따라서 이동하도록 상기 작동 실린더 내에 미끄럼 가능하게 설치되어 그 단부에서 피스톤을 운반하고, 상기 피니언과 결합하는 톱니 표면을 가진 액츄에이터를 부가로 포함하므로써, 상기 제2스템은 상기 제3구멍을 통하여 압축 가스를 상기 작동 실린더로 주입하여 상기 제2축선을 따라서 작동되며, 상기 제1 및 제2위치 사이에서 상기 밸브 스템의 운동과 상기 피니언의 회전을 실행하는 것을 특징으로 하는 초고순도 가스 분배를 위한 밸브 커플러.
  9. 제8항에 있어서, 상기 액츄에이터가 초기 위치를 향하여 운동하도록 상기 하우징과 상기 액츄에이터 사이에 힘을 가하는 스프링을 부가로 포함하는 것을 특징으로 하는 초고순도 가스 분배를 위한 밸브 커플러.
  10. 제8항에 있어서, 상기 제2축선과 상기 제1구멍을 통하여 연장되는 상기 축선은 서로 직교하는 것을 특징으로 하는 초고순도 가스 분배를 위한 밸브 커플러.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019970005270A 1996-02-21 1997-02-21 초고순도 가스 분배 시스템을 위한 밸브 커플링 KR970062444A (ko)

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US08/604,727 US5664759A (en) 1996-02-21 1996-02-21 Valved coupling for ultra high purity gas distribution systems

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001055897A1 (en) * 2000-01-27 2001-08-02 Link Plus, Inc. Method and apparatus for processing web documents

Families Citing this family (66)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6227223B1 (en) * 1995-03-13 2001-05-08 Provacon, Inc. Valve and actuator in combination
US5810031A (en) * 1996-02-21 1998-09-22 Aeroquip Corporation Ultra high purity gas distribution component with integral valved coupling and methods for its use
US5664759A (en) * 1996-02-21 1997-09-09 Aeroquip Corporation Valved coupling for ultra high purity gas distribution systems
US6062246A (en) * 1997-04-08 2000-05-16 Hitachi Metals Ltd. Mass flow controller and operating method thereof
US6158454A (en) * 1998-04-14 2000-12-12 Insync Systems, Inc. Sieve like structure for fluid flow through structural arrangement
LU90367B1 (en) * 1999-03-05 2000-09-06 Ceodeux Ultra Pure Equipment T Gas cylinder valve
US6186177B1 (en) 1999-06-23 2001-02-13 Mks Instruments, Inc. Integrated gas delivery system
JP3751505B2 (ja) * 2000-06-07 2006-03-01 株式会社テージーケー 可変容量圧縮機用制御弁の真空室形成方法
FR2811735B1 (fr) * 2000-07-11 2002-09-20 Asco Joucomatic Vanne commande pneumatique
US6349744B1 (en) 2000-10-13 2002-02-26 Mks Instruments, Inc. Manifold for modular gas box system
DE10060726A1 (de) 2000-12-07 2002-06-27 Messer Griesheim Gmbh Kompaktgasentnahmesystem
US6857447B2 (en) * 2002-06-10 2005-02-22 Advanced Technology Materials, Inc. Pressure-based gas delivery system and method for reducing risks associated with storage and delivery of high pressure gases
US6991671B2 (en) 2002-12-09 2006-01-31 Advanced Technology Materials, Inc. Rectangular parallelepiped fluid storage and dispensing vessel
US8002880B2 (en) 2002-12-10 2011-08-23 Advanced Technology Materials, Inc. Gas storage and dispensing system with monolithic carbon adsorbent
TWI386578B (zh) * 2003-01-17 2013-02-21 Applied Materials Inc 避免一質量流量控制器涉及一質量流量控制器陣列中之干擾的方法
JP4871490B2 (ja) * 2003-11-07 2012-02-08 シーケーディ株式会社 パージユニット及びその製造方法
US7051749B2 (en) 2003-11-24 2006-05-30 Advanced Technology Materials, Inc. Gas delivery system with integrated valve manifold functionality for sub-atmospheric and super-atmospheric pressure applications
DE10358085C5 (de) * 2003-12-10 2012-06-28 Danfoss A/S Kältemittel-Ventilanordnung
US20050258390A1 (en) * 2004-05-18 2005-11-24 Johnson Controls Technology Company Valve system
JP3930872B2 (ja) 2004-06-17 2007-06-13 株式会社カワサキプレシジョンマシナリ 弁装置
US8075668B2 (en) 2005-03-29 2011-12-13 Dresser-Rand Company Drainage system for compressor separators
JP5121188B2 (ja) * 2006-08-29 2013-01-16 キヤノン株式会社 圧力制御弁、圧力制御弁の製造方法、及び圧力制御弁を搭載した燃料電池システム
EP2063978B1 (en) * 2006-09-19 2014-07-09 Dresser-Rand Company Rotary separator drum seal
US8302779B2 (en) 2006-09-21 2012-11-06 Dresser-Rand Company Separator drum and compressor impeller assembly
CA2663880C (en) 2006-09-25 2015-02-10 William C. Maier Compressor mounting system
MX2009003175A (es) 2006-09-25 2009-04-03 Dresser Rand Co Cubierta de acceso para bobina conectora presurizada.
WO2008039732A2 (en) 2006-09-25 2008-04-03 Dresser-Rand Company Axially moveable spool connector
CA2661925C (en) 2006-09-25 2015-04-28 Gocha Chochua Fluid deflector for fluid separator devices
WO2008039734A2 (en) 2006-09-25 2008-04-03 Dresser-Rand Company Coupling guard system
EP2415507A1 (en) 2006-09-26 2012-02-08 Dresser-Rand Company Improved static fluid separator device
WO2009111616A2 (en) 2008-03-05 2009-09-11 Dresser-Rand Company Compressor assembly including separator and ejector pump
US8062400B2 (en) 2008-06-25 2011-11-22 Dresser-Rand Company Dual body drum for rotary separators
US8079805B2 (en) 2008-06-25 2011-12-20 Dresser-Rand Company Rotary separator and shaft coupler for compressors
US7922218B2 (en) 2008-06-25 2011-04-12 Dresser-Rand Company Shear ring casing coupler device
DE102008031024A1 (de) * 2008-06-30 2009-12-31 Wabco Gmbh Ventil
US8087901B2 (en) 2009-03-20 2012-01-03 Dresser-Rand Company Fluid channeling device for back-to-back compressors
US8210804B2 (en) 2009-03-20 2012-07-03 Dresser-Rand Company Slidable cover for casing access port
US8061972B2 (en) 2009-03-24 2011-11-22 Dresser-Rand Company High pressure casing access cover
WO2011034764A2 (en) 2009-09-15 2011-03-24 Dresser-Rand Company Improved density-based compact separator
FR2950950B1 (fr) * 2009-10-01 2012-12-07 Staubli Sa Ets Element femelle de raccord rapide et raccord rapide incorporant un tel element
US20110097216A1 (en) * 2009-10-22 2011-04-28 Dresser-Rand Company Lubrication system for subsea compressor
US9095856B2 (en) 2010-02-10 2015-08-04 Dresser-Rand Company Separator fluid collector and method
DE102010010298A1 (de) * 2010-03-04 2011-09-08 Voith Patent Gmbh Wärmekraftmaschine
US8544500B2 (en) * 2010-05-18 2013-10-01 Ckd Corporation Coupling apparatus for chemical fluid flow channel
WO2012009159A2 (en) 2010-07-15 2012-01-19 Dresser-Rand Company Radial vane pack for rotary separators
US8673159B2 (en) 2010-07-15 2014-03-18 Dresser-Rand Company Enhanced in-line rotary separator
US8657935B2 (en) 2010-07-20 2014-02-25 Dresser-Rand Company Combination of expansion and cooling to enhance separation
WO2012012143A2 (en) 2010-07-21 2012-01-26 Dresser-Rand Company Multiple modular in-line rotary separator bundle
JP5936144B2 (ja) 2010-09-09 2016-06-15 ドレッサー ランド カンパニーＤｒｅｓｓｅｒ−Ｒａｎｄ Ｃｏｍｐａｎｙ 洗浄可能に制御された排水管
US8994237B2 (en) 2010-12-30 2015-03-31 Dresser-Rand Company Method for on-line detection of liquid and potential for the occurrence of resistance to ground faults in active magnetic bearing systems
EP2659277B8 (en) 2010-12-30 2018-05-23 Dresser-Rand Company Method for on-line detection of resistance-to-ground faults in active magnetic bearing systems
US8679231B2 (en) 2011-01-19 2014-03-25 Advanced Technology Materials, Inc. PVDF pyrolyzate adsorbent and gas storage and dispensing system utilizing same
WO2012138545A2 (en) 2011-04-08 2012-10-11 Dresser-Rand Company Circulating dielectric oil cooling system for canned bearings and canned electronics
US8876389B2 (en) 2011-05-27 2014-11-04 Dresser-Rand Company Segmented coast-down bearing for magnetic bearing systems
US8851756B2 (en) 2011-06-29 2014-10-07 Dresser-Rand Company Whirl inhibiting coast-down bearing for magnetic bearing systems
US9126139B2 (en) 2012-05-29 2015-09-08 Entegris, Inc. Carbon adsorbent for hydrogen sulfide removal from gases containing same, and regeneration of adsorbent
DE102012021094A1 (de) * 2012-10-26 2014-04-30 Daimler Ag Ventileinrichtung für ein Brennstoffzellensystem
CN102927351A (zh) * 2012-11-13 2013-02-13 济南大学 水封阀开度无级调节气动控制系统
US20140137961A1 (en) * 2012-11-19 2014-05-22 Applied Materials, Inc. Modular chemical delivery system
JP6415889B2 (ja) * 2014-08-01 2018-10-31 株式会社堀場エステック 流量制御装置、流量制御装置用プログラム、及び、流量制御方法
CN107208821B (zh) * 2015-01-16 2019-07-02 株式会社开滋Sct 阻断阀和原料容器用阻断阀
JP6941507B2 (ja) * 2017-08-31 2021-09-29 株式会社キッツエスシーティー アクチュエータ用電磁弁の取付構造とアクチュエータ付きバルブ
US11590333B2 (en) * 2018-01-22 2023-02-28 Saint-Gobain Performance Plastics Corporation Tubular coupling
US10944206B1 (en) 2018-12-17 2021-03-09 OPDO Connectors, LLC Electrical connector system with a latch that permits rotation of connector housings into electrical connection
US11999225B2 (en) * 2019-02-11 2024-06-04 Eaton Intelligent Power Limited Pressure relief assembly and a valve assembly that uses the pressure relief assembly
CN110107702A (zh) * 2019-05-31 2019-08-09 浙江伯特利科技有限公司 一种带备用阀的截止阀

Family Cites Families (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1000945A (en) * 1910-03-28 1911-08-15 William T Ray Valve.
US1082512A (en) * 1910-11-08 1913-12-30 George E Llewellyn Apparatus for the manufacture of plate-ice.
US2120677A (en) * 1932-06-06 1938-06-14 Hydraulic Brake Co Valved coupling for hydraulic brakes
US2335832A (en) * 1942-03-02 1943-11-30 Bendix Westinghouse Automotive Fluid coupling
US2372820A (en) * 1943-04-29 1945-04-03 Mccord Corp Conduit connector for fluid pressure control
US2758611A (en) * 1955-03-17 1956-08-14 Ind Molasses Corp Pressure line coupling device
US2933333A (en) * 1955-09-26 1960-04-19 Crane Co Pipe coupling
US2868563A (en) * 1956-06-05 1959-01-13 Wayne L Wood Fluid line coupling device
US3134395A (en) * 1960-02-18 1964-05-26 Nat Tank Co Manifold valve
US3168906A (en) * 1963-02-04 1965-02-09 Brown Steel Tank Company Disconnectible coupling
US3245428A (en) * 1963-11-08 1966-04-12 Berg Mfg & Sales Co Flexible seal for use in a gladhand assembly
US3391951A (en) * 1966-12-07 1968-07-09 Weatherhead Co Diaphragm sealed coupling
FR2034123A1 (ko) * 1969-02-07 1970-12-11 Quercia Flaminaire
US3831984A (en) * 1971-11-08 1974-08-27 Parker Hannifin Corp Quick disconnect coupling
US3874410A (en) * 1972-08-11 1975-04-01 Parker Hannifin Corp Coupler valve assembly
US3902694A (en) * 1974-03-05 1975-09-02 Morley V Friedell Swinging spherical gate valve and double seal quick disconnect coupling
US4089341A (en) * 1975-01-08 1978-05-16 G. Kendall Parmelee Connector method and apparatus for coupling two systems together while excluding the environment from the system interiors
US4164959A (en) * 1977-04-15 1979-08-21 The Salk Institute For Biological Studies Metering valve
US4543992A (en) * 1983-12-23 1985-10-01 Trw Inc. Fluid coupling assembly
FR2581732A1 (fr) * 1985-05-10 1986-11-14 Fremy Raoul Dispositif d'arret pour fluides a double obturateur tournant
US4741354A (en) * 1987-04-06 1988-05-03 Spire Corporation Radial gas manifold
FR2630524B1 (fr) * 1988-04-20 1990-08-03 Parker Hannifin Rak Sa Coupleur a clapets a douille exterieure mobile
US4949745A (en) * 1988-12-27 1990-08-21 Air-Lock, Incorporated Clean air connector
FR2648537B1 (fr) * 1989-06-16 1991-10-18 Sames Sa Dispositif de raccordement de deux parties de conduit
US4989638A (en) * 1989-12-21 1991-02-05 Allied-Signal Substantially leak-free disconnection apparatus
US4995589A (en) * 1990-01-29 1991-02-26 Sequioa Controls Company, Ltd. Bellows valve
US5002086A (en) * 1990-05-11 1991-03-26 Fluoroware, Inc. Plastic control valve
US5139225A (en) * 1990-11-05 1992-08-18 Micron Technology, Inc. Pneumatically controlled multiple valve system for fluid transfer
US5307568A (en) * 1991-09-09 1994-05-03 Tokyo Electron Limited Gas supply system
US5215120A (en) * 1991-11-20 1993-06-01 Precision General, Inc. Apparatus and method for reducing valve emissions
US5295507A (en) * 1992-01-29 1994-03-22 Eli Lilly And Company Containment valve that allows contamination free transfer
US5368062A (en) * 1992-01-29 1994-11-29 Kabushiki Kaisha Toshiba Gas supplying system and gas supplying apparatus
US5316033A (en) * 1992-07-04 1994-05-31 Gustav Schumacher Coupling for connecting hydraulic lines
US5379793A (en) * 1993-09-07 1995-01-10 Powell; Johathan S. Ventless transfer valve and method for using same
US5638862A (en) * 1995-10-20 1997-06-17 Vemco Corporation Diaphragm valve
US5664759A (en) * 1996-02-21 1997-09-09 Aeroquip Corporation Valved coupling for ultra high purity gas distribution systems
US5810031A (en) * 1996-02-21 1998-09-22 Aeroquip Corporation Ultra high purity gas distribution component with integral valved coupling and methods for its use

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001055897A1 (en) * 2000-01-27 2001-08-02 Link Plus, Inc. Method and apparatus for processing web documents

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EP0860640A1 (en) 1998-08-26
CN1164758A (zh) 1997-11-12
ID16032A (id) 1997-08-28
JPH1047515A (ja) 1998-02-20
SG46769A1 (en) 1998-02-20
US5664759A (en) 1997-09-09
TW413293U (en) 2000-11-21
US5863023A (en) 1999-01-26
IL120237A0 (en) 1997-06-10

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