KR970054019A - Method for forming charge storage electrode of semiconductor device - Google Patents
Method for forming charge storage electrode of semiconductor device Download PDFInfo
- Publication number
- KR970054019A KR970054019A KR1019950051511A KR19950051511A KR970054019A KR 970054019 A KR970054019 A KR 970054019A KR 1019950051511 A KR1019950051511 A KR 1019950051511A KR 19950051511 A KR19950051511 A KR 19950051511A KR 970054019 A KR970054019 A KR 970054019A
- Authority
- KR
- South Korea
- Prior art keywords
- charge storage
- storage electrode
- semiconductor device
- forming
- forming charge
- Prior art date
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Abstract
본 발명은 반도체 소자의 캐피시터 형성 방법에 있어서 전하저장전극 마스크인 감광막 패턴의 표면을 울퉁불퉁하게 형성하여 식각되는 전하저장전극용 전도막의 표면을 울퉁불퉁하게 형성하는 것을 특징으로 하는 전하저장전극 형성 방법에 관한 것으로 간단한 공정으로 표면적이 극대화된 전하저장전극을 형성하므로써, 공정의 단순화 및 고집적 소자의 캐패시턴스를 확보하는 효과가 있다.The present invention relates to a method of forming a capacitor of a semiconductor device, wherein the surface of the photoresist pattern, which is a charge storage electrode mask, is unevenly formed to form an uneven surface of the conductive film for the charge storage electrode to be etched. By forming a charge storage electrode with a maximum surface area in a simple process, it is possible to simplify the process and secure the capacitance of the highly integrated device.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.
제1A도 내지 제1C도는 본 발명에 따른 스택형 전하저장전극 형성 공정도.1A to 1C are diagrams illustrating a process of forming a stacked charge storage electrode according to the present invention.
Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950051511A KR970054019A (en) | 1995-12-18 | 1995-12-18 | Method for forming charge storage electrode of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950051511A KR970054019A (en) | 1995-12-18 | 1995-12-18 | Method for forming charge storage electrode of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
KR970054019A true KR970054019A (en) | 1997-07-31 |
Family
ID=66645766
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019950051511A KR970054019A (en) | 1995-12-18 | 1995-12-18 | Method for forming charge storage electrode of semiconductor device |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR970054019A (en) |
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1995
- 1995-12-18 KR KR1019950051511A patent/KR970054019A/en not_active Application Discontinuation
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WITN | Withdrawal due to no request for examination |