KR970051969A - Semiconductor manufacturing device - Google Patents

Semiconductor manufacturing device Download PDF

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Publication number
KR970051969A
KR970051969A KR1019950067534A KR19950067534A KR970051969A KR 970051969 A KR970051969 A KR 970051969A KR 1019950067534 A KR1019950067534 A KR 1019950067534A KR 19950067534 A KR19950067534 A KR 19950067534A KR 970051969 A KR970051969 A KR 970051969A
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KR
South Korea
Prior art keywords
shutter
predetermined
sensor
terminal
unit
Prior art date
Application number
KR1019950067534A
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Korean (ko)
Other versions
KR0168521B1 (en
Inventor
박정호
이성한
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019950067534A priority Critical patent/KR0168521B1/en
Publication of KR970051969A publication Critical patent/KR970051969A/en
Application granted granted Critical
Publication of KR0168521B1 publication Critical patent/KR0168521B1/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)

Abstract

본 발명은 프로세스챔버와 프로세스챔버 내무에 가스공급용 셔터를 갖는 반도체 제조장치에 관한 것으로, 종래에는 프로세스챔버 내부에 위치한 셔터의 동작의 이상유무를 즉각적으로 알 수 없었으나, 셔터의 동작 상태를 외부에서 확인 할 수 있도록 셔터플렌지에 소정이 센서를 장착하여 셔터의 동작을 감지하고, 셔터의 동작에 따라 발생되는 신호를 감지하여 셔터의 동작에 에러가 발생되면 에러가 발생된 셔터의 번호를 외부에 표시하고, 알람 스피커에 알람이 발생되므로, 셔터의 동작의 이상유무를 외부에서 즉각적으로 알 수 있다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor manufacturing apparatus having a process chamber and a gas supply shutter in a process chamber. In the related art, the operation state of the shutter is not immediately known. The sensor is mounted on the shutter flange so that the sensor can detect the shutter operation, and detects the signal generated by the shutter operation. If an error occurs in the shutter operation, the number of the shutter that caused the error The alarm is generated in the alarm speaker, so that an abnormality in the shutter operation can be immediately known from the outside.

Description

반도체 제조장치Semiconductor manufacturing device

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.

제2도는 본 발명에 따른 셔터를 보이는 개략도.2 is a schematic view showing a shutter according to the present invention.

Claims (3)

프로세스챔버 내부에 위치한 웨이퍼 상에 도포되는 소정의 가스를 공급 및 차단하는 다수개의 셔터를 구비한 반도체 제조장치에 있어서: 셔터(1)가 차단상태(7a)일 때에 셔터플렌지(2)의 소정의 부분에 장착되는 제1센서(5a)와; 셔터(1)가 오픈상태(7b)일 때에 셔터플렌지(2)의 소정의 부분에 장착되는 제2센서(5b)와; 상기 제1센서(5a)의 소정의 차단신호(Sc)와 상기 제2센서(5b)의 소정의 오픈신호(So)를 입력받는 입력부(11)와, 상기 셔터(1)가 상기 차단상태(7a)일 때와 상기 오픈상태(7a)일때 공급전원이 차단되고 상기 셔터(1)가 동작중일 때 공급전원이 인가되는 지연부(31)와, 상기 셔터(1)가 소정의 동작시간 내에 동작이 완료되지 않으면 상기 지연부(31)의 소정의 제어신호를 받아 에러가 발생된 상기 셔터(1)의 번호를 표시하는 표시부(51)와, 상기 셔터(1)가 소정의 동작시간 내에 동작이 완료되지 않으면 상기 지연부(31)의 소정의 제어신호를 받아 상기 셔터(1)에 에러가 발생되었음을 알리는 알람부(80)를 구비하는 셔터감지회로(100)를 포함하는 것을 특징으로 하는 반도체 제조장치.A semiconductor manufacturing apparatus having a plurality of shutters for supplying and blocking a predetermined gas applied on a wafer located inside a process chamber, the method comprising: setting a predetermined range of a shutter flange 2 when the shutter 1 is in a blocking state 7a. A first sensor 5a mounted to the portion; A second sensor 5b mounted to a predetermined portion of the shutter flange 2 when the shutter 1 is in the open state 7b; An input unit 11 for receiving a predetermined cutoff signal Sc of the first sensor 5a and a predetermined open signal So of the second sensor 5b, and the shutter 1 receives the cutoff state ( In the open state 7a and in the open state 7a, the delay unit 31 to which the supply power is applied when the power supply is cut off and the shutter 1 is operating, and the shutter 1 operate within a predetermined operation time. Is not completed, the display unit 51 which displays the number of the shutter 1 in which an error occurs by receiving a predetermined control signal of the delay unit 31, and the shutter 1 is operated within a predetermined operation time. And a shutter detecting circuit 100 including an alarm unit 80 which indicates that an error has occurred in the shutter 1 in response to a predetermined control signal of the delay unit 31 if not completed. Device. 제1항에 있어서, 상기 입력부(11)는, 상기 셔터플렌지(2)의 소정의 부분에 장착되는 제1근접센서(5a)와 제2근접센서(5b)로부터 상기 셔터(1)의 동작에 따라 출력되는 소정의 신호(Sc, So)를 입력받는 오아게이트(OR1)와; 상기 오아게이트(OR1)의 출력단에 한 단자가 연결되는 제1저항(R1)과; 전원전압단자(Vss)에 에미터단자가 연결되고 상기 오아게이트(OR1)의 출력단에 연결된 상기 저항(R1)의 다른 한 단자에 베이스단자가 연결되는 트랜지스터(Q1); 상기 트랜지스터(Q1)의 컬렉터단자에 연결되는 릴레이(21)를 포함하는 것을 특징으로 하는 반도체 제조장치.The method according to claim 1, wherein the input unit (11) is adapted to the operation of the shutter (1) from the first proximity sensor (5a) and the second proximity sensor (5b) mounted on a predetermined portion of the shutter flange (2). An oragate OR 1 that receives the predetermined signals Sc and So output along; A first resistor (R 1 ) having one terminal connected to an output terminal of the ora gate (OR 1 ); A power supply voltage terminal (V ss) the emitter terminal is connected and the gate Iowa (OR 1) the resistance transistor (Q 1) is a base terminal connected to the other terminal of the (R 1) connected to the output end of the; And a relay (21) connected to the collector terminal of the transistor (Q 1 ). 제1항에 있어서, 상기 지연부(31)는, 상기 셔터(1)가 상기 차단상태(7a)에서 소정의 시간내에 상기 오픈상태(7b)로 동작되지 않으면 상기 표시부(51)와 상기 알람부(51)에 구동전압을 인가하고, 상기 셔터(1)가 상기 차단상태(7a)에서 소정의 시간 내에 상기 오픈상태(7b)로 동작되면 상기 표시부(51)와 상기 알람부(50)에 공급되는 구동전압을 차단하는 것을 특징으로 하는 반도체 제조장치.The display unit 51 and the alarm unit according to claim 1, wherein the delay unit 31 is operated when the shutter 1 is not operated in the open state 7b within a predetermined time in the shut-off state 7a. When a driving voltage is applied to the 51 and the shutter 1 is operated in the open state 7b within a predetermined time in the cutoff state 7a, it is supplied to the display unit 51 and the alarm unit 50. A semiconductor manufacturing apparatus, characterized in that to cut off the driving voltage. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019950067534A 1995-12-29 1995-12-29 Semiconductor fabrication equipment KR0168521B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019950067534A KR0168521B1 (en) 1995-12-29 1995-12-29 Semiconductor fabrication equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019950067534A KR0168521B1 (en) 1995-12-29 1995-12-29 Semiconductor fabrication equipment

Publications (2)

Publication Number Publication Date
KR970051969A true KR970051969A (en) 1997-07-29
KR0168521B1 KR0168521B1 (en) 1999-02-01

Family

ID=19447774

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019950067534A KR0168521B1 (en) 1995-12-29 1995-12-29 Semiconductor fabrication equipment

Country Status (1)

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KR (1) KR0168521B1 (en)

Also Published As

Publication number Publication date
KR0168521B1 (en) 1999-02-01

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