KR970051926A - - Google Patents

Info

Publication number
KR970051926A
KR970051926A KR19950066154A KR19950066154A KR970051926A KR 970051926 A KR970051926 A KR 970051926A KR 19950066154 A KR19950066154 A KR 19950066154A KR 19950066154 A KR19950066154 A KR 19950066154A KR 970051926 A KR970051926 A KR 970051926A
Authority
KR
South Korea
Application number
KR19950066154A
Other languages
Korean (ko)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of KR970051926A publication Critical patent/KR970051926A/ko

Links

KR19950066154A 1995-12-29 1995-12-29 KR970051926A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR19950066134 1995-12-29

Publications (1)

Publication Number Publication Date
KR970051926A true KR970051926A (ja) 1997-07-29

Family

ID=85705047

Family Applications (1)

Application Number Title Priority Date Filing Date
KR19950066154A KR970051926A (ja) 1995-12-29 1995-12-29

Country Status (1)

Country Link
KR (1) KR970051926A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19990054914A (ko) * 1997-12-26 1999-07-15 김영환 방사성 동위원소를 이용한 초미세 정렬방법

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4374915A (en) * 1981-07-30 1983-02-22 Intel Corporation High contrast alignment marker for integrated circuit fabrication
JPS62296435A (ja) * 1986-06-16 1987-12-23 Nec Corp アライメントマ−クの形状
JPH01140624A (ja) * 1987-11-27 1989-06-01 Hitachi Ltd 半導体装置の製造方法
JPH021901A (ja) * 1988-06-09 1990-01-08 Fujitsu Ltd 位置合わせマークの形成方法
JPH02266512A (ja) * 1989-04-07 1990-10-31 Oki Electric Ind Co Ltd 半導体素子の製造方法
KR900019132A (ko) * 1989-05-16 1990-12-24 오끼뎅끼 고오교오 가부시끼가이샤 웨이퍼 얼라인먼트 마크 및 그 제조방법
JPH03138920A (ja) * 1989-10-24 1991-06-13 Sony Corp 半導体装置

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4374915A (en) * 1981-07-30 1983-02-22 Intel Corporation High contrast alignment marker for integrated circuit fabrication
JPS62296435A (ja) * 1986-06-16 1987-12-23 Nec Corp アライメントマ−クの形状
JPH01140624A (ja) * 1987-11-27 1989-06-01 Hitachi Ltd 半導体装置の製造方法
JPH021901A (ja) * 1988-06-09 1990-01-08 Fujitsu Ltd 位置合わせマークの形成方法
JPH02266512A (ja) * 1989-04-07 1990-10-31 Oki Electric Ind Co Ltd 半導体素子の製造方法
KR900019132A (ko) * 1989-05-16 1990-12-24 오끼뎅끼 고오교오 가부시끼가이샤 웨이퍼 얼라인먼트 마크 및 그 제조방법
JPH03138920A (ja) * 1989-10-24 1991-06-13 Sony Corp 半導体装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR19990054914A (ko) * 1997-12-26 1999-07-15 김영환 방사성 동위원소를 이용한 초미세 정렬방법

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application