KR970046617U - 반도체 제조공정용 에이치 엠 디 에스 분사장치 - Google Patents

반도체 제조공정용 에이치 엠 디 에스 분사장치

Info

Publication number
KR970046617U
KR970046617U KR2019950037907U KR19950037907U KR970046617U KR 970046617 U KR970046617 U KR 970046617U KR 2019950037907 U KR2019950037907 U KR 2019950037907U KR 19950037907 U KR19950037907 U KR 19950037907U KR 970046617 U KR970046617 U KR 970046617U
Authority
KR
South Korea
Prior art keywords
manufacturing process
injection device
semiconductor manufacturing
semiconductor
injection
Prior art date
Application number
KR2019950037907U
Other languages
English (en)
Other versions
KR200148612Y1 (ko
Inventor
전용만
Original Assignee
엘지반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지반도체주식회사 filed Critical 엘지반도체주식회사
Priority to KR2019950037907U priority Critical patent/KR200148612Y1/ko
Publication of KR970046617U publication Critical patent/KR970046617U/ko
Application granted granted Critical
Publication of KR200148612Y1 publication Critical patent/KR200148612Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
KR2019950037907U 1995-12-02 1995-12-02 반도체 제조공정용 에이치 엠 디 에스 분사장치 KR200148612Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950037907U KR200148612Y1 (ko) 1995-12-02 1995-12-02 반도체 제조공정용 에이치 엠 디 에스 분사장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950037907U KR200148612Y1 (ko) 1995-12-02 1995-12-02 반도체 제조공정용 에이치 엠 디 에스 분사장치

Publications (2)

Publication Number Publication Date
KR970046617U true KR970046617U (ko) 1997-07-31
KR200148612Y1 KR200148612Y1 (ko) 1999-06-15

Family

ID=19431804

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950037907U KR200148612Y1 (ko) 1995-12-02 1995-12-02 반도체 제조공정용 에이치 엠 디 에스 분사장치

Country Status (1)

Country Link
KR (1) KR200148612Y1 (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100389508B1 (ko) * 2000-07-05 2003-06-25 주식회사 실리콘 테크 에이치엠디에스 공급 장치

Also Published As

Publication number Publication date
KR200148612Y1 (ko) 1999-06-15

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