KR970023943A - Method of forming alignment key pattern of bipolar device - Google Patents
Method of forming alignment key pattern of bipolar device Download PDFInfo
- Publication number
- KR970023943A KR970023943A KR1019950037048A KR19950037048A KR970023943A KR 970023943 A KR970023943 A KR 970023943A KR 1019950037048 A KR1019950037048 A KR 1019950037048A KR 19950037048 A KR19950037048 A KR 19950037048A KR 970023943 A KR970023943 A KR 970023943A
- Authority
- KR
- South Korea
- Prior art keywords
- alignment key
- key pattern
- forming
- pattern
- silicon substrate
- Prior art date
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- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
본 발명에 의한 바이폴라 소자의 정렬키 형성방법에서는 실리콘기판 상에 매몰층과, 제 1정렬키 패턴을 형성시키되, 제 1정렬키 패턴을 실리콘기판 상에 형성됨 에피층의 상면에서 에피층에 투과되어 관찰되는 제 1정렬키 패턴의 쉬프트 된 값만큼 역 쉬프트 하여 형성시키는 단계와, 매몰층과 제 1정렬키 패턴을 형성시킨 실리콘기판 상에 에피층을 형성시키는 단계와, 에피층에 제 1정렬키 패턴과 정 정렬된 제 2정렬키 패턴을 형성시키면서, 격리층 패턴을 형성시키는 단계를 포함하여 이루어진다.In the method of forming an alignment key of a bipolar device according to the present invention, a buried layer and a first alignment key pattern are formed on a silicon substrate, and the first alignment key pattern is formed on the silicon substrate. Forming an epitaxial layer on the silicon substrate on which the buried layer and the first alignment key pattern are formed, by forming a reverse shift by the shifted value of the first alignment key pattern observed; And forming an isolation layer pattern while forming a second alignment key pattern aligned with the pattern.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.
제 2 도는 본 발명에 의한 바이폴라 소자의 정렬키 패턴 형성방법의 단계를 도시한 단면도.2 is a cross-sectional view showing the steps of a method for forming an alignment key pattern of a bipolar device according to the present invention.
Claims (1)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019950037048A KR970023943A (en) | 1995-10-25 | 1995-10-25 | Method of forming alignment key pattern of bipolar device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1019950037048A KR970023943A (en) | 1995-10-25 | 1995-10-25 | Method of forming alignment key pattern of bipolar device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR970023943A true KR970023943A (en) | 1997-05-30 |
Family
ID=66584240
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1019950037048A KR970023943A (en) | 1995-10-25 | 1995-10-25 | Method of forming alignment key pattern of bipolar device |
Country Status (1)
| Country | Link |
|---|---|
| KR (1) | KR970023943A (en) |
-
1995
- 1995-10-25 KR KR1019950037048A patent/KR970023943A/en not_active Application Discontinuation
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| WITN | Withdrawal due to no request for examination |