KR970022324A - Probing measurement method and measuring pad - Google Patents

Probing measurement method and measuring pad Download PDF

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Publication number
KR970022324A
KR970022324A KR1019950035203A KR19950035203A KR970022324A KR 970022324 A KR970022324 A KR 970022324A KR 1019950035203 A KR1019950035203 A KR 1019950035203A KR 19950035203 A KR19950035203 A KR 19950035203A KR 970022324 A KR970022324 A KR 970022324A
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KR
South Korea
Prior art keywords
pad
pins
wire
measuring
resistance value
Prior art date
Application number
KR1019950035203A
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Korean (ko)
Other versions
KR100218499B1 (en
Inventor
배병성
Original Assignee
김광호
삼성전자 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김광호, 삼성전자 주식회사 filed Critical 김광호
Priority to KR1019950035203A priority Critical patent/KR100218499B1/en
Publication of KR970022324A publication Critical patent/KR970022324A/en
Application granted granted Critical
Publication of KR100218499B1 publication Critical patent/KR100218499B1/en

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Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02General constructional details
    • G01R1/06Measuring leads; Measuring probes
    • G01R1/067Measuring probes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant

Abstract

본 발명은 측정용 패드 및 프로빙 측정 방법에 관한 것으로서, 더욱 상세하게는, 소자와 연결되어 있는 패드에 프로브 핀을 접지하는 데 있어서 패드 및 프로브 핀의 구조를 개선하여 소자의 특성을 측정하는 측정용 패드 및 프로빙 측정 방법에 관한 것이다. 하나의 배선과 연결되어 있는 하나의 패드에 두 개의 프로브 핀을 접속하여 두 핀 사이에 저항 값을 측정하고 두 프로브 핀 사이의 저항 값이 일정 밧 이하일 경우, 소자의 특성을 측정한다. 또는 하나의 배선에 연결되어 있으며 서로 연결되어 있는 두 개의 패드에 각각 하나의 프로브 핀을 접속하여 두 핀 사이에 저항 값을 측정하고 두 프로브 핀 사이의 저항 값이 일정 값 이하일 경우, 소자의 특성을 측정한다. 따라서, 본 발명에 따른 프로빙 측정 방법에서는 프로브 핀의 간격이 틀어지는 불량, 핀의 높이 차이에 의한 불량 또는 잔여 절연막에 의한 비 접촉 불량을 소자의 특성을 측정하기 전에 개선하여 정확한 소자의 특성을 측정할 수 있다.The present invention relates to a measuring pad and a probing measuring method, and more particularly, to measure the characteristics of the device by improving the structure of the pad and the probe pin in grounding the probe pin to the pad connected to the device. It relates to a pad and a probing measurement method. Two probe pins are connected to one pad connected to one wire to measure the resistance value between the two pins. If the resistance value between the two probe pins is less than or equal to a certain bar, the characteristic of the device is measured. Alternatively, if one probe pin is connected to two pads connected to one wire and are connected to each other, the resistance value is measured between the two pins, and if the resistance value between the two probe pins is less than or equal to a predetermined value, Measure Therefore, in the probing measuring method according to the present invention, the defects of the gap between the probe pins, the defects caused by the height difference of the pins, or the non-contact defects due to the residual insulating film are improved before measuring the characteristics of the device to measure the accurate characteristics of the device. Can be.

Description

프로빙 측정 방법 및 측정용 패드Probing measurement method and measuring pad

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.

제1도는 종래 기술에 따른 프로빙 측정 방법의 프로브 핀 및 패드의 구조를 나타낸 평면도이고,1 is a plan view showing the structure of the probe pin and pad of the probing measuring method according to the prior art,

제2도는 본 발명의 실시예에 따른 프로빙 측정 방법의 프로브 핀 및 패드의 구조를 나타낸 평면도이고,2 is a plan view showing the structure of the probe pin and pad of the probing measuring method according to an embodiment of the present invention,

제3도는 제2도에서 하나의 배선과 이어진 측정용 패드의 구조를 나타낸 평면도이다.FIG. 3 is a plan view showing the structure of a measurement pad connected to one wire in FIG. 2.

Claims (5)

하나의 배선과 연결되어 있는 하나의 패드에 두 개의 프로브 핀을 접속하여 상기 두 핀 사이에 저항 값을 측정하는 단계, 상기 두 프로브 핀 사이의 저항 값이 일정 값 이하일 경우, 소자의 특성을 측정하는 단계를 포함하고 있는 프로빙 측정 방법.Connecting two probe pins to one pad connected to one wire to measure resistance values between the two pins, and when the resistance value between the two probe pins is less than or equal to a predetermined value, Probing measurement method comprising the step. 측정용 소자에서 이어진 하나의 배선과 연결되어 있으며 서로 연결되어 있는 두개의 패드를 포함하고 있는 측정용 패드.Measuring pads comprising two pads connected to one wire connected to the measuring element and connected to each other. 제2항에서, 상기 두 개의 패드는 상기 하나의 배선이 두 배선으로 분리되어 각각 연결되어 있으며 다시 상기 두 패드가 하나의 배선으로 연결되어 있는 측정용 패드.The measuring pad of claim 2, wherein the two pads are connected to each other by separating the one wire into two wires, and the two pads are connected by one wire. 제2항에서, 상기 두 개의 패드는 상기 하나의 배선에 1차 패드와 2차 패드가 직열 구조로 연결되어 있는 측정용 패드.3. The measurement pad of claim 2, wherein the two pads are connected to the one wire by a primary pad and a secondary pad in a direct thermal structure. 하나의 배선에 연결되어 있으며 서로 연결되어 있는 두개의 패드에 각각 하나의 프로브 핀을 접속하여 상기 두 핀 사이에 저항 값을 측정하는 단계, 상기 두 프로브 핀 사이의 저항 값이 일정값 이하일 경우, 소자의 특성을 측정하는 단계를 포함하고 있는 프로빙 측정 방법.Measuring a resistance value between the two pins by connecting one probe pin to each of two pads connected to one wire and connected to each other, and when the resistance value between the two probe pins is equal to or less than a predetermined value, Probing measurement method comprising the step of measuring the characteristics of. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019950035203A 1995-10-12 1995-10-12 Probing measurement method and pad KR100218499B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019950035203A KR100218499B1 (en) 1995-10-12 1995-10-12 Probing measurement method and pad

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019950035203A KR100218499B1 (en) 1995-10-12 1995-10-12 Probing measurement method and pad

Publications (2)

Publication Number Publication Date
KR970022324A true KR970022324A (en) 1997-05-28
KR100218499B1 KR100218499B1 (en) 1999-09-01

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Application Number Title Priority Date Filing Date
KR1019950035203A KR100218499B1 (en) 1995-10-12 1995-10-12 Probing measurement method and pad

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100666176B1 (en) * 2005-08-04 2007-01-09 삼성전자주식회사 Detecting needle alignment proving circuit and proving method in semiconductor device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101681681B1 (en) * 2016-01-05 2016-12-02 (주)갑진 Circuit for chargeing and dischargeing a battery

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100666176B1 (en) * 2005-08-04 2007-01-09 삼성전자주식회사 Detecting needle alignment proving circuit and proving method in semiconductor device

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Publication number Publication date
KR100218499B1 (en) 1999-09-01

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