KR970020446A - 칩 내에서 열 장벽 역할을 하는 피일드 산화막을 갖고 있는 프린트 헤드 - Google Patents

칩 내에서 열 장벽 역할을 하는 피일드 산화막을 갖고 있는 프린트 헤드 Download PDF

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KR970020446A
KR970020446A KR1019960047389A KR19960047389A KR970020446A KR 970020446 A KR970020446 A KR 970020446A KR 1019960047389 A KR1019960047389 A KR 1019960047389A KR 19960047389 A KR19960047389 A KR 19960047389A KR 970020446 A KR970020446 A KR 970020446A
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South Korea
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film
semiconductor chip
thermal
bpsg
ink jet
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KR1019960047389A
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KR100403227B1 (ko
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윌슨 코넬 로버트
러셀 스튜와드 로렌스
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존 제이. 맥아들
렉스마크 인터내셔널 인코포레이티드
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Publication of KR970020446A publication Critical patent/KR970020446A/ko
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Publication of KR100403227B1 publication Critical patent/KR100403227B1/ko

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/22—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of impact or pressure on a printing material or impression-transfer material
    • B41J2/23—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of impact or pressure on a printing material or impression-transfer material using print wires
    • B41J2/235—Print head assemblies
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
    • B41J2/04543—Block driving
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
    • B41J2/0455—Details of switching sections of circuit, e.g. transistors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
    • B41J2/0458—Control methods or devices therefor, e.g. driver circuits, control circuits controlling heads based on heating elements forming bubbles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14072—Electrical connections, e.g. details on electrodes, connecting the chip to the outside...
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/14129—Layer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/13—Heads having an integrated circuit

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Ink Jet (AREA)

Abstract

실제적인 잉크 젯 프린트 헤드 칩(13)에서는 붕소-인으로 도프된 규산염 유리(BPSG)막은 히터 밑에 있으며 그 다음에는 실리콘 이산화막이 있다. 이것은 히터의 점화 펄스 동안에 기판을 절연시키며, 점화 펄스 간의 시간 동안에 열 에너지가 실리콘으로 확산되도록 한다.

Description

칩 내에서 열 장벽 역할을 하는 피일드 산화막을 갖고 있는 피린트 헤드
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제2도는 많은 전기적 접촉이 없이 많은 히터들을 갖고 있는 프린트 헤드를 만들기 위한 종래의 멀티플렉싱을 도시한 도면,
제3도는 본 발명에 따르는 프린트 헤드의 칩을 도시한 평면도,
제6도는 칩을 이용한 잉크 젯 프린트 헤드를 도시한 도면.

Claims (10)

  1. 실리콘 반도체 칩의 히터 소자로 부터 발생한 열에 의해 생기는 뉴클리에이션(nucleation)에 의해 잉크 젯 인쇄를 하기 위해서 필요한 잉크를 갖고 있는 열 잉크 젯 카트리지에 있어서, 상기 칩은 뉴클리에이션을 야기시키는 상기 열을 발생시키기 위해 전류를 운반하는 다수의 저항기들과, 다수의 전계 효과 트랜지스터들(FET)과, 상기 다수의 저항기들의 바로 아래에 있는 붕소-인으로 도프된 규산염 유리(BPSG) 막과, 상기 BPSG 막 바로 아래에 있는 열 절연체를 갖고 있는 실리콘 막으로 구성되어 있으며, 상기 FET중 다른 하나는 상기 FET가 연결되어 있는 상기 저항기에 흐르는 상기 전류를 제어하기 위해 상기 저항기들 중 하나에 연결되어 있는 열 잉크 젯 카트리지.
  2. 제1항에 있어서, 상기 BPSG 막은 약 0.825 미크론 두께가 되는 열 잉크 젯 카트리지(cartridge).
  3. 제2항에 있어서, 열 절연체를 포함하고 있는 상기 실리콘 막은 약 0.825미크론 두께로된 SiO2인 열 잉크 젯 카트리지.
  4. 제1항에 있어서, 절연체를 포함하고 있는 상기 실리콘 막은 SiO2인 열 잉크 젯 카트리지.
  5. 열 반도체 칩에 있어서, P 형태의 실리론 기판과, 채널 금속 산화 반도체 전계 효과 트랜지스터들(MOSFET)과 저항성 하프늄 디보라이드 또는 탄탈륨 알루미늄의 저항 막과, 전도성 막에서 나온 전류가 상기 저항 막을 주로 통과하여 상기 히터위치들의 다른 하나에 대한 상기 MOSFET의 다른 하나에 제어 상태에서 가열을 야기시키는 히터 위치들이 제어되어 있는 상기 저항 막과 접촉하는 전도성 막과 상기 히터 위치들의 각각의 바로 아래 있는 BPSG의 열 장벽 막으로 구성되어 있으며, 상기 MOSFET의 피일드 산화막은 붕소-인으로 도프된 균산염 유리로 되어있는 열 반도체 칩.
  6. 제5항에 있어서, 상기 BPSG막의 바로 아래와 상기 기판 바로 위에 있는 열 절연체 막을 포함하고 있는 실리콘으로 구성된 반도체 칩.
  7. 제6항에 있어서, 상기 BPSG막은 약 0.825 미크론 두께인 반도체 칩.
  8. 제5항에 있어서, 상기 BPSG막은 약 0.8255 미크론 두께인 반도체 칩.
  9. 제6항에 있어서, 열 절연체를 포함하고 있는 상기 실리콘 막은 SiO2로 되어 있는 반도체 칩.
  10. 제7항에 있어서, 상기 SiO2막은 두께가 약 0.825 미크론인 반도체 칩.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019960047389A 1995-10-19 1996-10-18 열잉크젯카트리지및열반도체칩 KR100403227B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/545,126 US5774148A (en) 1995-10-19 1995-10-19 Printhead with field oxide as thermal barrier in chip
US545,126 1995-10-19

Publications (2)

Publication Number Publication Date
KR970020446A true KR970020446A (ko) 1997-05-28
KR100403227B1 KR100403227B1 (ko) 2004-03-20

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Country Link
US (1) US5774148A (ko)
EP (1) EP0769379B1 (ko)
JP (1) JPH09174851A (ko)
KR (1) KR100403227B1 (ko)
DE (1) DE69601487T2 (ko)

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Also Published As

Publication number Publication date
EP0769379A1 (en) 1997-04-23
KR100403227B1 (ko) 2004-03-20
JPH09174851A (ja) 1997-07-08
DE69601487T2 (de) 1999-07-08
US5774148A (en) 1998-06-30
EP0769379B1 (en) 1999-02-03
DE69601487D1 (de) 1999-03-18

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