KR970007823B1 - Forming method of tungsten plug - Google Patents

Forming method of tungsten plug Download PDF

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Publication number
KR970007823B1
KR970007823B1 KR93024236A KR930024236A KR970007823B1 KR 970007823 B1 KR970007823 B1 KR 970007823B1 KR 93024236 A KR93024236 A KR 93024236A KR 930024236 A KR930024236 A KR 930024236A KR 970007823 B1 KR970007823 B1 KR 970007823B1
Authority
KR
South Korea
Prior art keywords
contact hole
layer
depositing
filled
forming method
Prior art date
Application number
KR93024236A
Other languages
Korean (ko)
Other versions
KR950015592A (en
Inventor
Sung-Bo Hwang
Original Assignee
Hyundai Electronics Ind
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hyundai Electronics Ind filed Critical Hyundai Electronics Ind
Priority to KR93024236A priority Critical patent/KR970007823B1/en
Publication of KR950015592A publication Critical patent/KR950015592A/en
Application granted granted Critical
Publication of KR970007823B1 publication Critical patent/KR970007823B1/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Abstract

A forming method of W-plug is provided to prevent plug loss using etching barrier layer having different etching selectivity. The method comprises the steps of: forming a first contact hole(4) and a second contact hole(5) on a interlayer insulator(3) being the width of the first contact hole(4) is smaller than that of the second contact hole(5); depositing a first W(7) having the thickness being filled the narrow first contact hole(4); depositing etching barrier layer(8) on the first W layer(7); depositing a second W layer(9) having thickness being filled the wider second contact hole(5); performing an etch-back using the etching barrier layer(8) as stopper; and removing the remained W layer(7) to W plugs filled the first and second contact holes(4, 5). Thereby, it is possible to prevent the loss of contact plugs having different width.
KR93024236A 1993-11-15 1993-11-15 Forming method of tungsten plug KR970007823B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR93024236A KR970007823B1 (en) 1993-11-15 1993-11-15 Forming method of tungsten plug

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR93024236A KR970007823B1 (en) 1993-11-15 1993-11-15 Forming method of tungsten plug

Publications (2)

Publication Number Publication Date
KR950015592A KR950015592A (en) 1995-06-17
KR970007823B1 true KR970007823B1 (en) 1997-05-17

Family

ID=19368082

Family Applications (1)

Application Number Title Priority Date Filing Date
KR93024236A KR970007823B1 (en) 1993-11-15 1993-11-15 Forming method of tungsten plug

Country Status (1)

Country Link
KR (1) KR970007823B1 (en)

Also Published As

Publication number Publication date
KR950015592A (en) 1995-06-17

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