KR970003561A - Fine pattern formation method - Google Patents
Fine pattern formation method Download PDFInfo
- Publication number
- KR970003561A KR970003561A KR1019950019098A KR19950019098A KR970003561A KR 970003561 A KR970003561 A KR 970003561A KR 1019950019098 A KR1019950019098 A KR 1019950019098A KR 19950019098 A KR19950019098 A KR 19950019098A KR 970003561 A KR970003561 A KR 970003561A
- Authority
- KR
- South Korea
- Prior art keywords
- forming
- pattern
- patterned
- layer
- fine pattern
- Prior art date
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- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Abstract
본 발명은 노광장비의 렌즈 해상력과는 무관하게 패턴을 형성할 수 있는 미세 패턴 형성방법에 관한 것으로, 반도체 소자 제조공정 중 게이트 패턴을 형성하기 위한 방법에 있어서, 패턴형성하고자 하는 층을 증착하는 단계; 상기 패턴형성하고자 하는 층 상부에 감광막 패턴을 형성하는 단계; 상기 감광막 패턴을 식각마스크로 사용하여 하부의 상기 패턴형성하고자 하는 층을 식각하여 1차 패턴을 형성하는 단계; 및 상기 1차패턴의 크기를 감소시키기 위해 가장자리 소정영역을 산화시키는 제2단계를 포함하여 이루어지는 것을 특징으로 한다.The present invention relates to a method of forming a fine pattern that can form a pattern irrespective of the lens resolution of an exposure apparatus. ; Forming a photoresist pattern on the layer to be patterned; Forming a primary pattern by etching the lower layer to be patterned using the photoresist pattern as an etching mask; And a second step of oxidizing an edge predetermined area to reduce the size of the primary pattern.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.
제1D도는 본 발명의 일실시예에 따른 미세 패턴 형성방법이 적용된 트랜지스터 형성과정을 나타내는 도면도.1D is a view showing a transistor forming process to which a fine pattern forming method according to an embodiment of the present invention is applied.
Claims (3)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950019098A KR970003561A (en) | 1995-06-30 | 1995-06-30 | Fine pattern formation method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950019098A KR970003561A (en) | 1995-06-30 | 1995-06-30 | Fine pattern formation method |
Publications (1)
Publication Number | Publication Date |
---|---|
KR970003561A true KR970003561A (en) | 1997-01-28 |
Family
ID=66526377
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019950019098A KR970003561A (en) | 1995-06-30 | 1995-06-30 | Fine pattern formation method |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR970003561A (en) |
-
1995
- 1995-06-30 KR KR1019950019098A patent/KR970003561A/en not_active Application Discontinuation
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