KR960042812A - Method of manufacturing field emitter of display device for field emission by isotropic dry etching method - Google Patents
Method of manufacturing field emitter of display device for field emission by isotropic dry etching method Download PDFInfo
- Publication number
- KR960042812A KR960042812A KR1019950012730A KR19950012730A KR960042812A KR 960042812 A KR960042812 A KR 960042812A KR 1019950012730 A KR1019950012730 A KR 1019950012730A KR 19950012730 A KR19950012730 A KR 19950012730A KR 960042812 A KR960042812 A KR 960042812A
- Authority
- KR
- South Korea
- Prior art keywords
- display device
- etching
- emitter
- field
- dry etching
- Prior art date
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Abstract
등방성 건식식각법을 이용하여 전계방출용 표시소자의 필드에미터를 제조하는 방법에 있어서, 방법을 단순화시키며 소자 제작방법 시간을 단축시키기 위해, 실리콘층을 식각하는데 있어, 등방성식각법만을 사용하여 식각공정을 실시하고, 열처리에 의한 실리콘 산화막과 샤프닝 산화막을 형성하지 않음으로써 전계방출용 표시소자의 필드에미터를 제조하는데 소요되는 시간을 단축시킬 수 있고, 열처리에 의한 팁 에미터의 손상을 방지할 수 있다.In the method of manufacturing a field emitter of a field emission display device using an isotropic dry etching method, in order to simplify the method and shorten the time required to fabricate the device, in etching the silicon layer, only the isotropic etching method is used for etching. By performing the process and not forming the silicon oxide film and the sharpening oxide film by the heat treatment, it is possible to shorten the time required to manufacture the field emitter of the field emission display device, and to prevent the damage of the tip emitter by the heat treatment. Can be.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.
제3A도 내지 3E도는 본 발명에 따른 산화막을 형성하지 않고 등방성 건식식각법만을 사용한 필드 에미터의 제작공정을 순차적으로 나타낸 정단면도.3A to 3E are sectional views sequentially showing a manufacturing process of a field emitter using only an isotropic dry etching method without forming an oxide film according to the present invention.
Claims (2)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950012730A KR960042812A (en) | 1995-05-22 | 1995-05-22 | Method of manufacturing field emitter of display device for field emission by isotropic dry etching method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019950012730A KR960042812A (en) | 1995-05-22 | 1995-05-22 | Method of manufacturing field emitter of display device for field emission by isotropic dry etching method |
Publications (1)
Publication Number | Publication Date |
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KR960042812A true KR960042812A (en) | 1996-12-21 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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KR1019950012730A KR960042812A (en) | 1995-05-22 | 1995-05-22 | Method of manufacturing field emitter of display device for field emission by isotropic dry etching method |
Country Status (1)
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KR (1) | KR960042812A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20000045293A (en) * | 1998-12-30 | 2000-07-15 | 김영환 | Method for manufacturing field emission display device |
-
1995
- 1995-05-22 KR KR1019950012730A patent/KR960042812A/en not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20000045293A (en) * | 1998-12-30 | 2000-07-15 | 김영환 | Method for manufacturing field emission display device |
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