KR960032727U - 반도체 제조용 챔버의 압력감지장치 - Google Patents

반도체 제조용 챔버의 압력감지장치

Info

Publication number
KR960032727U
KR960032727U KR2019950003749U KR19950003749U KR960032727U KR 960032727 U KR960032727 U KR 960032727U KR 2019950003749 U KR2019950003749 U KR 2019950003749U KR 19950003749 U KR19950003749 U KR 19950003749U KR 960032727 U KR960032727 U KR 960032727U
Authority
KR
South Korea
Prior art keywords
sensing device
semiconductor manufacturing
pressure sensing
manufacturing chamber
chamber
Prior art date
Application number
KR2019950003749U
Other languages
English (en)
Other versions
KR0122311Y1 (ko
Inventor
조병길
Original Assignee
엘지반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지반도체주식회사 filed Critical 엘지반도체주식회사
Priority to KR2019950003749U priority Critical patent/KR0122311Y1/ko
Publication of KR960032727U publication Critical patent/KR960032727U/ko
Application granted granted Critical
Publication of KR0122311Y1 publication Critical patent/KR0122311Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR2019950003749U 1995-03-04 1995-03-04 반도체 제조용 챔버의 압력감지장치 KR0122311Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019950003749U KR0122311Y1 (ko) 1995-03-04 1995-03-04 반도체 제조용 챔버의 압력감지장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019950003749U KR0122311Y1 (ko) 1995-03-04 1995-03-04 반도체 제조용 챔버의 압력감지장치

Publications (2)

Publication Number Publication Date
KR960032727U true KR960032727U (ko) 1996-10-24
KR0122311Y1 KR0122311Y1 (ko) 1998-08-17

Family

ID=19408791

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019950003749U KR0122311Y1 (ko) 1995-03-04 1995-03-04 반도체 제조용 챔버의 압력감지장치

Country Status (1)

Country Link
KR (1) KR0122311Y1 (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100514256B1 (ko) * 1999-11-30 2005-09-15 엘지.필립스 엘시디 주식회사 챔버의 파티클 방지방법

Also Published As

Publication number Publication date
KR0122311Y1 (ko) 1998-08-17

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Legal Events

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A201 Request for examination
E701 Decision to grant or registration of patent right
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Payment date: 20090427

Year of fee payment: 12

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