KR960029717U - 반도체 장치의 웨이퍼 뒷면 냉각가스 공급장치 - Google Patents
반도체 장치의 웨이퍼 뒷면 냉각가스 공급장치Info
- Publication number
- KR960029717U KR960029717U KR2019950002670U KR19950002670U KR960029717U KR 960029717 U KR960029717 U KR 960029717U KR 2019950002670 U KR2019950002670 U KR 2019950002670U KR 19950002670 U KR19950002670 U KR 19950002670U KR 960029717 U KR960029717 U KR 960029717U
- Authority
- KR
- South Korea
- Prior art keywords
- wafer
- gas supply
- cooling gas
- semiconductor device
- supply device
- Prior art date
Links
- 239000000112 cooling gas Substances 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR2019950002670U KR0127586Y1 (ko) | 1995-02-18 | 1995-02-18 | 반도체 장치의 웨이퍼 뒷면 냉각가스 공급장치 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR2019950002670U KR0127586Y1 (ko) | 1995-02-18 | 1995-02-18 | 반도체 장치의 웨이퍼 뒷면 냉각가스 공급장치 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR960029717U true KR960029717U (ko) | 1996-09-17 |
| KR0127586Y1 KR0127586Y1 (ko) | 1998-12-01 |
Family
ID=19408083
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR2019950002670U KR0127586Y1 (ko) | 1995-02-18 | 1995-02-18 | 반도체 장치의 웨이퍼 뒷면 냉각가스 공급장치 |
Country Status (1)
| Country | Link |
|---|---|
| KR (1) | KR0127586Y1 (ko) |
-
1995
- 1995-02-18 KR KR2019950002670U patent/KR0127586Y1/ko not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| KR0127586Y1 (ko) | 1998-12-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A201 | Request for examination | ||
| E902 | Notification of reason for refusal | ||
| E701 | Decision to grant or registration of patent right | ||
| REGI | Registration of establishment | ||
| O032 | Opposition [utility model]: request for opposition | ||
| O072 | Maintenance of registration after opposition [utility model]: final registration of opposition | ||
| O131 | Decision on opposition [utility model] | ||
| FPAY | Annual fee payment |
Payment date: 20090624 Year of fee payment: 12 |
|
| EXPY | Expiration of term |