KR960003088U - 웨이퍼의 습식세정용 배쓰 - Google Patents
웨이퍼의 습식세정용 배쓰Info
- Publication number
- KR960003088U KR960003088U KR2019940014090U KR19940014090U KR960003088U KR 960003088 U KR960003088 U KR 960003088U KR 2019940014090 U KR2019940014090 U KR 2019940014090U KR 19940014090 U KR19940014090 U KR 19940014090U KR 960003088 U KR960003088 U KR 960003088U
- Authority
- KR
- South Korea
- Prior art keywords
- wafers
- wet cleaning
- cleaning baths
- baths
- wet
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019940014090U KR960003088U (ko) | 1994-06-16 | 1994-06-16 | 웨이퍼의 습식세정용 배쓰 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019940014090U KR960003088U (ko) | 1994-06-16 | 1994-06-16 | 웨이퍼의 습식세정용 배쓰 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR960003088U true KR960003088U (ko) | 1996-01-22 |
Family
ID=60668171
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019940014090U KR960003088U (ko) | 1994-06-16 | 1994-06-16 | 웨이퍼의 습식세정용 배쓰 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR960003088U (ko) |
-
1994
- 1994-06-16 KR KR2019940014090U patent/KR960003088U/ko not_active Application Discontinuation
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E601 | Decision to refuse application |