KR960003088U - 웨이퍼의 습식세정용 배쓰 - Google Patents

웨이퍼의 습식세정용 배쓰

Info

Publication number
KR960003088U
KR960003088U KR2019940014090U KR19940014090U KR960003088U KR 960003088 U KR960003088 U KR 960003088U KR 2019940014090 U KR2019940014090 U KR 2019940014090U KR 19940014090 U KR19940014090 U KR 19940014090U KR 960003088 U KR960003088 U KR 960003088U
Authority
KR
South Korea
Prior art keywords
wafers
wet cleaning
cleaning baths
baths
wet
Prior art date
Application number
KR2019940014090U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019940014090U priority Critical patent/KR960003088U/ko
Publication of KR960003088U publication Critical patent/KR960003088U/ko

Links

KR2019940014090U 1994-06-16 1994-06-16 웨이퍼의 습식세정용 배쓰 KR960003088U (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940014090U KR960003088U (ko) 1994-06-16 1994-06-16 웨이퍼의 습식세정용 배쓰

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940014090U KR960003088U (ko) 1994-06-16 1994-06-16 웨이퍼의 습식세정용 배쓰

Publications (1)

Publication Number Publication Date
KR960003088U true KR960003088U (ko) 1996-01-22

Family

ID=60668171

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940014090U KR960003088U (ko) 1994-06-16 1994-06-16 웨이퍼의 습식세정용 배쓰

Country Status (1)

Country Link
KR (1) KR960003088U (ko)

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Legal Events

Date Code Title Description
A201 Request for examination
E902 Notification of reason for refusal
E601 Decision to refuse application