KR960002551A - How to prevent metal wiring corrosion - Google Patents
How to prevent metal wiring corrosion Download PDFInfo
- Publication number
- KR960002551A KR960002551A KR1019940012588A KR19940012588A KR960002551A KR 960002551 A KR960002551 A KR 960002551A KR 1019940012588 A KR1019940012588 A KR 1019940012588A KR 19940012588 A KR19940012588 A KR 19940012588A KR 960002551 A KR960002551 A KR 960002551A
- Authority
- KR
- South Korea
- Prior art keywords
- metal wiring
- metal
- film
- cleaning
- corrosion
- Prior art date
Links
Abstract
본 발명은 세정공정시 금속배선(3')의 부식을 방지하는 금속배선 부식 방지 방법에 있어서, 기판 상에 형성된 금속합금막(3)의 예정된 부위를 식각하여 금속배선(3')을 패터닝 하는 단계, 패터닝 된 금속배선(3')막 표면에 금속배선 부식 방지막 역할을 하는 보호막(7)을 형성하는 단계; 세정용액에서 기판을 세정하는 단계를 포함하여 이루어지는 것을 특징으로 하는 금속배선 부식 방지 방법에 관한 것으로 금속배선 형성후 순수세정 단계에서 국부전지 형성에 의한 금속배선의 부식을 방지하여 반도체 소자의 특성 및 수율을 향상시키는 효과가 있다.The present invention provides a method for preventing corrosion of the metal wiring 3 'during the cleaning process, wherein the predetermined portion of the metal alloy film 3 formed on the substrate is etched to pattern the metal wiring 3'. Forming a protective film 7 serving as a metal corrosion protection film on the surface of the patterned metal wire 3 '; A method for preventing corrosion of metal wiring, comprising the step of cleaning a substrate in a cleaning solution. Has the effect of improving.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.
제2A도 내지 제2D도는 본 발명의 금속배선 부식 방지 방법에 따른 금속배선 형성 공정 단면도.2A to 2D are cross-sectional views of a metal wiring forming process according to the metal wiring corrosion prevention method of the present invention.
Claims (3)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019940012588A KR960002551A (en) | 1994-06-03 | 1994-06-03 | How to prevent metal wiring corrosion |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019940012588A KR960002551A (en) | 1994-06-03 | 1994-06-03 | How to prevent metal wiring corrosion |
Publications (1)
Publication Number | Publication Date |
---|---|
KR960002551A true KR960002551A (en) | 1996-01-26 |
Family
ID=66685731
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019940012588A KR960002551A (en) | 1994-06-03 | 1994-06-03 | How to prevent metal wiring corrosion |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR960002551A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100452070B1 (en) * | 1998-12-03 | 2004-12-08 | 프로모스 테크놀로지스 인코퍼레이티드 | Method of forming interconnection |
-
1994
- 1994-06-03 KR KR1019940012588A patent/KR960002551A/en not_active Application Discontinuation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100452070B1 (en) * | 1998-12-03 | 2004-12-08 | 프로모스 테크놀로지스 인코퍼레이티드 | Method of forming interconnection |
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Legal Events
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WITN | Withdrawal due to no request for examination |