KR960002551A - How to prevent metal wiring corrosion - Google Patents

How to prevent metal wiring corrosion Download PDF

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Publication number
KR960002551A
KR960002551A KR1019940012588A KR19940012588A KR960002551A KR 960002551 A KR960002551 A KR 960002551A KR 1019940012588 A KR1019940012588 A KR 1019940012588A KR 19940012588 A KR19940012588 A KR 19940012588A KR 960002551 A KR960002551 A KR 960002551A
Authority
KR
South Korea
Prior art keywords
metal wiring
metal
film
cleaning
corrosion
Prior art date
Application number
KR1019940012588A
Other languages
Korean (ko)
Inventor
이병석
윤종원
이해정
Original Assignee
김주용
현대전자산업 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 김주용, 현대전자산업 주식회사 filed Critical 김주용
Priority to KR1019940012588A priority Critical patent/KR960002551A/en
Publication of KR960002551A publication Critical patent/KR960002551A/en

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Abstract

본 발명은 세정공정시 금속배선(3')의 부식을 방지하는 금속배선 부식 방지 방법에 있어서, 기판 상에 형성된 금속합금막(3)의 예정된 부위를 식각하여 금속배선(3')을 패터닝 하는 단계, 패터닝 된 금속배선(3')막 표면에 금속배선 부식 방지막 역할을 하는 보호막(7)을 형성하는 단계; 세정용액에서 기판을 세정하는 단계를 포함하여 이루어지는 것을 특징으로 하는 금속배선 부식 방지 방법에 관한 것으로 금속배선 형성후 순수세정 단계에서 국부전지 형성에 의한 금속배선의 부식을 방지하여 반도체 소자의 특성 및 수율을 향상시키는 효과가 있다.The present invention provides a method for preventing corrosion of the metal wiring 3 'during the cleaning process, wherein the predetermined portion of the metal alloy film 3 formed on the substrate is etched to pattern the metal wiring 3'. Forming a protective film 7 serving as a metal corrosion protection film on the surface of the patterned metal wire 3 '; A method for preventing corrosion of metal wiring, comprising the step of cleaning a substrate in a cleaning solution. Has the effect of improving.

Description

금속배선 부식 방지 방법How to prevent metal wiring corrosion

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.

제2A도 내지 제2D도는 본 발명의 금속배선 부식 방지 방법에 따른 금속배선 형성 공정 단면도.2A to 2D are cross-sectional views of a metal wiring forming process according to the metal wiring corrosion prevention method of the present invention.

Claims (3)

세정공정시 금속배선(3')의 부식을 방지하는 금속배선 부식 방지 방법에 있어서, 기판 상에 형성된 금속합금막(3)의 예정된 부위를 식각하여 금속배선(3')을 패터닝 하는 단계, 패터닝된 금속배선(3')막 표면에 금속배선 부식 방지막 역할을 하는 보호막(7)을 형성하는 단계; 세정용액에서 기판을 세정하는 단계를 포함하며 이루어지는 것을 특징으로 하는 금속배선 부식 방지 방법.In the metal wiring corrosion prevention method for preventing corrosion of the metal wiring (3 ') during the cleaning process, patterning the metal wiring (3') by etching a predetermined portion of the metal alloy film (3) formed on the substrate, patterning Forming a protective film 7 serving as a metal wiring corrosion protection film on the surface of the metal wiring 3 'film; A method for preventing corrosion of metal wiring, comprising the step of cleaning a substrate in a cleaning solution. 제1항에 있어서, 상기 보호막(7)형성 단계 이후에 금속 식각공정시 발생한 불순물을 제거하는 단계를 더 포함하여 이루어지는 것을 특징으로 하는 금속배선 부식 방지 방법.The method of claim 1, further comprising removing impurities generated during the metal etching process after forming the passivation layer. 7. 제1항 또는 제2항에 있어서, 상기 보호막(7)은 HNO3, CH3COOH 및 H2O 혼합용액에서 생성되는 금속 산화막인 것을 특징으로 하는 금속배선 부식 방지 방법.The method of claim 1 or 2, wherein the protective film (7) is a metal oxide film formed from a HNO 3 , CH 3 COOH and H 2 O mixed solution. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019940012588A 1994-06-03 1994-06-03 How to prevent metal wiring corrosion KR960002551A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019940012588A KR960002551A (en) 1994-06-03 1994-06-03 How to prevent metal wiring corrosion

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019940012588A KR960002551A (en) 1994-06-03 1994-06-03 How to prevent metal wiring corrosion

Publications (1)

Publication Number Publication Date
KR960002551A true KR960002551A (en) 1996-01-26

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Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019940012588A KR960002551A (en) 1994-06-03 1994-06-03 How to prevent metal wiring corrosion

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KR (1) KR960002551A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100452070B1 (en) * 1998-12-03 2004-12-08 프로모스 테크놀로지스 인코퍼레이티드 Method of forming interconnection

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100452070B1 (en) * 1998-12-03 2004-12-08 프로모스 테크놀로지스 인코퍼레이티드 Method of forming interconnection

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