KR950028691U - 반도체 튜브 이송 시스템 - Google Patents

반도체 튜브 이송 시스템

Info

Publication number
KR950028691U
KR950028691U KR2019940005129U KR19940005129U KR950028691U KR 950028691 U KR950028691 U KR 950028691U KR 2019940005129 U KR2019940005129 U KR 2019940005129U KR 19940005129 U KR19940005129 U KR 19940005129U KR 950028691 U KR950028691 U KR 950028691U
Authority
KR
South Korea
Prior art keywords
transfer system
tube transfer
semiconductor tube
semiconductor
tube
Prior art date
Application number
KR2019940005129U
Other languages
English (en)
Other versions
KR0114437Y1 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR94005129U priority Critical patent/KR0114437Y1/ko
Publication of KR950028691U publication Critical patent/KR950028691U/ko
Application granted granted Critical
Publication of KR0114437Y1 publication Critical patent/KR0114437Y1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
KR94005129U 1994-03-15 1994-03-15 Semiconductor tube transfer system KR0114437Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR94005129U KR0114437Y1 (en) 1994-03-15 1994-03-15 Semiconductor tube transfer system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR94005129U KR0114437Y1 (en) 1994-03-15 1994-03-15 Semiconductor tube transfer system

Publications (2)

Publication Number Publication Date
KR950028691U true KR950028691U (ko) 1995-10-20
KR0114437Y1 KR0114437Y1 (en) 1998-04-15

Family

ID=19378934

Family Applications (1)

Application Number Title Priority Date Filing Date
KR94005129U KR0114437Y1 (en) 1994-03-15 1994-03-15 Semiconductor tube transfer system

Country Status (1)

Country Link
KR (1) KR0114437Y1 (ko)

Also Published As

Publication number Publication date
KR0114437Y1 (en) 1998-04-15

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Legal Events

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