KR950025911U - Vacuum device for fixing wafers in semiconductor manufacturing equipment - Google Patents

Vacuum device for fixing wafers in semiconductor manufacturing equipment

Info

Publication number
KR950025911U
KR950025911U KR2019940002509U KR19940002509U KR950025911U KR 950025911 U KR950025911 U KR 950025911U KR 2019940002509 U KR2019940002509 U KR 2019940002509U KR 19940002509 U KR19940002509 U KR 19940002509U KR 950025911 U KR950025911 U KR 950025911U
Authority
KR
South Korea
Prior art keywords
semiconductor manufacturing
manufacturing equipment
vacuum device
fixing wafers
wafers
Prior art date
Application number
KR2019940002509U
Other languages
Korean (ko)
Other versions
KR970005335Y1 (en
Inventor
정태성
고석윤
Original Assignee
금성일렉트론 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 금성일렉트론 주식회사 filed Critical 금성일렉트론 주식회사
Priority to KR2019940002509U priority Critical patent/KR970005335Y1/en
Publication of KR950025911U publication Critical patent/KR950025911U/en
Application granted granted Critical
Publication of KR970005335Y1 publication Critical patent/KR970005335Y1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR2019940002509U 1994-02-08 1994-02-08 Wafer chuck KR970005335Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940002509U KR970005335Y1 (en) 1994-02-08 1994-02-08 Wafer chuck

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940002509U KR970005335Y1 (en) 1994-02-08 1994-02-08 Wafer chuck

Publications (2)

Publication Number Publication Date
KR950025911U true KR950025911U (en) 1995-09-18
KR970005335Y1 KR970005335Y1 (en) 1997-05-29

Family

ID=19377106

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940002509U KR970005335Y1 (en) 1994-02-08 1994-02-08 Wafer chuck

Country Status (1)

Country Link
KR (1) KR970005335Y1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100375744B1 (en) * 2000-11-10 2003-03-10 (주)케이.씨.텍 Device for supporting substrate having purge function in a substrate processing apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100375744B1 (en) * 2000-11-10 2003-03-10 (주)케이.씨.텍 Device for supporting substrate having purge function in a substrate processing apparatus

Also Published As

Publication number Publication date
KR970005335Y1 (en) 1997-05-29

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Legal Events

Date Code Title Description
A201 Request for examination
E701 Decision to grant or registration of patent right
REGI Registration of establishment
FPAY Annual fee payment

Payment date: 20081006

Year of fee payment: 12

EXPY Expiration of term