KR960025487U - Semiconductor wafer cooling device - Google Patents

Semiconductor wafer cooling device

Info

Publication number
KR960025487U
KR960025487U KR2019940037517U KR19940037517U KR960025487U KR 960025487 U KR960025487 U KR 960025487U KR 2019940037517 U KR2019940037517 U KR 2019940037517U KR 19940037517 U KR19940037517 U KR 19940037517U KR 960025487 U KR960025487 U KR 960025487U
Authority
KR
South Korea
Prior art keywords
semiconductor wafer
cooling device
wafer cooling
semiconductor
wafer
Prior art date
Application number
KR2019940037517U
Other languages
Korean (ko)
Other versions
KR200170478Y1 (en
Inventor
정만영
Original Assignee
현대반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 현대반도체주식회사 filed Critical 현대반도체주식회사
Priority to KR2019940037517U priority Critical patent/KR200170478Y1/en
Publication of KR960025487U publication Critical patent/KR960025487U/en
Application granted granted Critical
Publication of KR200170478Y1 publication Critical patent/KR200170478Y1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67253—Process monitoring, e.g. flow or thickness monitoring

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
KR2019940037517U 1994-12-29 1994-12-29 Cooling apparatus of semiconductor wafer KR200170478Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940037517U KR200170478Y1 (en) 1994-12-29 1994-12-29 Cooling apparatus of semiconductor wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940037517U KR200170478Y1 (en) 1994-12-29 1994-12-29 Cooling apparatus of semiconductor wafer

Publications (2)

Publication Number Publication Date
KR960025487U true KR960025487U (en) 1996-07-22
KR200170478Y1 KR200170478Y1 (en) 2000-02-01

Family

ID=19404008

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940037517U KR200170478Y1 (en) 1994-12-29 1994-12-29 Cooling apparatus of semiconductor wafer

Country Status (1)

Country Link
KR (1) KR200170478Y1 (en)

Also Published As

Publication number Publication date
KR200170478Y1 (en) 2000-02-01

Similar Documents

Publication Publication Date Title
DE69937255D1 (en) QUICK-HEATING AND COOLING DEVICE FOR SEMICONDUCTOR WAFER
DE69323724D1 (en) Heat sink for semiconductor device
DE59508581D1 (en) Semiconductor device
DE69522789T2 (en) Semiconductor device
DE69501381T2 (en) SEMICONDUCTOR DEVICE
DE69513207T2 (en) Semiconductor device
DE69531121D1 (en) Integrated semiconductor device
KR960009084A (en) Semiconductor device
KR960025487U (en) Semiconductor wafer cooling device
KR960015586U (en) Degassing device for semiconductor wafers
DE69524419D1 (en) POWER SEMICONDUCTOR DEVICE
KR960009225A (en) Semiconductor device
KR940021334U (en) Wafer cooling device
KR950031473U (en) Semiconductor wafer drying equipment
DE69530871D1 (en) Semiconductor device MOS type
KR970052862U (en) Wafer transfer device for semiconductor device manufacturing facilities
KR970048631U (en) Cooling device for power semiconductor device
KR970054696U (en) Semiconductor Wafer Transfer Device
KR950002235U (en) Wafer transfer device for both wafer cooling
KR950034370U (en) Semiconductor wafer pick-up device
KR960019158U (en) Multichip Semiconductor Device
KR960006349U (en) Semiconductor wafer transport device
KR960025321U (en) Semiconductor wafer cleaning device
KR960024300U (en) Semiconductor device tray positioning device
KR960015587U (en) Semiconductor device manufacturing equipment

Legal Events

Date Code Title Description
A201 Request for examination
E701 Decision to grant or registration of patent right
REGI Registration of establishment
FPAY Annual fee payment

Payment date: 20051021

Year of fee payment: 7

LAPS Lapse due to unpaid annual fee