KR950021400A - Field oxide film manufacturing method - Google Patents
Field oxide film manufacturing method Download PDFInfo
- Publication number
- KR950021400A KR950021400A KR1019930031880A KR930031880A KR950021400A KR 950021400 A KR950021400 A KR 950021400A KR 1019930031880 A KR1019930031880 A KR 1019930031880A KR 930031880 A KR930031880 A KR 930031880A KR 950021400 A KR950021400 A KR 950021400A
- Authority
- KR
- South Korea
- Prior art keywords
- oxide film
- film
- field oxide
- nitride film
- pattern
- Prior art date
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- Element Separation (AREA)
- Local Oxidation Of Silicon (AREA)
Abstract
본 발명은 반도체소자의 필드산화막 제조방법에 관한 것으로, 산화막이 필드산화막을 형성할 때 질화막 패턴을 2중층으로 형성함으로써 측면확산되는 것을 방지하여 버즈빅 형상을 줄일 수 있다. 그로인하여 활성영역을 더 확보하고, 소자의 집적도를 향상시킬 수 있는 필드산화막 제조방법이다.The present invention relates to a method for manufacturing a field oxide film of a semiconductor device, and when forming the field oxide film, it is possible to prevent the side diffusion by forming a nitride layer pattern in a double layer, thereby reducing the Buzzvik shape. As a result, it is a method of manufacturing a field oxide film which can further secure an active region and improve the degree of integration of devices.
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.
제2A도 내지 제2E도는 본 발명에 의해 필드산화막을 형성하는 공정단계를 도시한 단면도이다.2A to 2E are sectional views showing the process steps for forming a field oxide film according to the present invention.
Claims (4)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019930031880A KR950021400A (en) | 1993-12-31 | 1993-12-31 | Field oxide film manufacturing method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019930031880A KR950021400A (en) | 1993-12-31 | 1993-12-31 | Field oxide film manufacturing method |
Publications (1)
Publication Number | Publication Date |
---|---|
KR950021400A true KR950021400A (en) | 1995-07-26 |
Family
ID=66853214
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019930031880A KR950021400A (en) | 1993-12-31 | 1993-12-31 | Field oxide film manufacturing method |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR950021400A (en) |
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1993
- 1993-12-31 KR KR1019930031880A patent/KR950021400A/en not_active Application Discontinuation
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