KR940002517B1 - 가스 수소화물용의 고형 검출제 및 가스 수소화물을 검출하는 방법 - Google Patents
가스 수소화물용의 고형 검출제 및 가스 수소화물을 검출하는 방법 Download PDFInfo
- Publication number
- KR940002517B1 KR940002517B1 KR1019860005049A KR860005049A KR940002517B1 KR 940002517 B1 KR940002517 B1 KR 940002517B1 KR 1019860005049 A KR1019860005049 A KR 1019860005049A KR 860005049 A KR860005049 A KR 860005049A KR 940002517 B1 KR940002517 B1 KR 940002517B1
- Authority
- KR
- South Korea
- Prior art keywords
- gas
- detection agent
- hydride
- porous carrier
- basic copper
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 150000004678 hydrides Chemical class 0.000 title claims description 41
- 239000003153 chemical reaction reagent Substances 0.000 title description 2
- 229910017053 inorganic salt Inorganic materials 0.000 title 1
- 239000007789 gas Substances 0.000 claims description 69
- 238000001514 detection method Methods 0.000 claims description 56
- 239000003795 chemical substances by application Substances 0.000 claims description 46
- 229940116318 copper carbonate Drugs 0.000 claims description 17
- GEZOTWYUIKXWOA-UHFFFAOYSA-L copper;carbonate Chemical compound [Cu+2].[O-]C([O-])=O GEZOTWYUIKXWOA-UHFFFAOYSA-L 0.000 claims description 17
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical group O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 16
- 238000000034 method Methods 0.000 claims description 16
- 239000007787 solid Substances 0.000 claims description 14
- 239000002912 waste gas Substances 0.000 claims description 13
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 claims description 12
- RBFQJDQYXXHULB-UHFFFAOYSA-N arsane Chemical compound [AsH3] RBFQJDQYXXHULB-UHFFFAOYSA-N 0.000 claims description 12
- 239000004065 semiconductor Substances 0.000 claims description 11
- 238000004519 manufacturing process Methods 0.000 claims description 9
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 8
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims description 6
- 229910000073 phosphorus hydride Inorganic materials 0.000 claims description 6
- 239000000377 silicon dioxide Substances 0.000 claims description 6
- MROCJMGDEKINLD-UHFFFAOYSA-N dichlorosilane Chemical compound Cl[SiH2]Cl MROCJMGDEKINLD-UHFFFAOYSA-N 0.000 claims description 5
- PZPGRFITIJYNEJ-UHFFFAOYSA-N disilane Chemical compound [SiH3][SiH3] PZPGRFITIJYNEJ-UHFFFAOYSA-N 0.000 claims description 5
- 229910000078 germane Inorganic materials 0.000 claims description 5
- SPVXKVOXSXTJOY-UHFFFAOYSA-N selane Chemical compound [SeH2] SPVXKVOXSXTJOY-UHFFFAOYSA-N 0.000 claims description 5
- 229910000058 selane Inorganic materials 0.000 claims description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 4
- -1 diborane Chemical compound 0.000 claims description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Substances N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 4
- 239000001257 hydrogen Substances 0.000 claims description 3
- 229910052739 hydrogen Inorganic materials 0.000 claims description 3
- 239000000203 mixture Substances 0.000 claims description 3
- 229910052786 argon Inorganic materials 0.000 claims description 2
- 239000001307 helium Substances 0.000 claims description 2
- 229910052734 helium Inorganic materials 0.000 claims description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 2
- 229910052757 nitrogen Inorganic materials 0.000 claims description 2
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 claims description 2
- 239000003570 air Substances 0.000 claims 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 claims 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 6
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 4
- 239000000969 carrier Substances 0.000 description 3
- 238000011049 filling Methods 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- 238000000746 purification Methods 0.000 description 3
- 150000003839 salts Chemical class 0.000 description 3
- 229910002027 silica gel Inorganic materials 0.000 description 3
- 239000000741 silica gel Substances 0.000 description 3
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 229910000365 copper sulfate Inorganic materials 0.000 description 2
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 2
- 238000007872 degassing Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 239000008188 pellet Substances 0.000 description 2
- BWHMMNNQKKPAPP-UHFFFAOYSA-L potassium carbonate Chemical compound [K+].[K+].[O-]C([O-])=O BWHMMNNQKKPAPP-UHFFFAOYSA-L 0.000 description 2
- 239000002244 precipitate Substances 0.000 description 2
- 229910000029 sodium carbonate Inorganic materials 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 description 1
- 239000005751 Copper oxide Substances 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 241000872198 Serjania polyphylla Species 0.000 description 1
- UIIMBOGNXHQVGW-DEQYMQKBSA-M Sodium bicarbonate-14C Chemical compound [Na+].O[14C]([O-])=O UIIMBOGNXHQVGW-DEQYMQKBSA-M 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- ARKRHQVMXVUCGN-UHFFFAOYSA-N arsane phosphane Chemical compound P.[AsH3] ARKRHQVMXVUCGN-UHFFFAOYSA-N 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 150000001879 copper Chemical class 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 229910000431 copper oxide Inorganic materials 0.000 description 1
- XTVVROIMIGLXTD-UHFFFAOYSA-N copper(II) nitrate Chemical compound [Cu+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O XTVVROIMIGLXTD-UHFFFAOYSA-N 0.000 description 1
- QUQFTIVBFKLPCL-UHFFFAOYSA-L copper;2-amino-3-[(2-amino-2-carboxylatoethyl)disulfanyl]propanoate Chemical compound [Cu+2].[O-]C(=O)C(N)CSSCC(N)C([O-])=O QUQFTIVBFKLPCL-UHFFFAOYSA-L 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 238000000227 grinding Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- BQPIGGFYSBELGY-UHFFFAOYSA-N mercury(2+) Chemical compound [Hg+2] BQPIGGFYSBELGY-UHFFFAOYSA-N 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 150000007524 organic acids Chemical class 0.000 description 1
- 235000005985 organic acids Nutrition 0.000 description 1
- 150000003003 phosphines Chemical class 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 229910000028 potassium bicarbonate Inorganic materials 0.000 description 1
- 235000015497 potassium bicarbonate Nutrition 0.000 description 1
- 239000011736 potassium bicarbonate Substances 0.000 description 1
- 229910000027 potassium carbonate Inorganic materials 0.000 description 1
- 235000011181 potassium carbonates Nutrition 0.000 description 1
- TYJJADVDDVDEDZ-UHFFFAOYSA-M potassium hydrogencarbonate Chemical compound [K+].OC([O-])=O TYJJADVDDVDEDZ-UHFFFAOYSA-M 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 235000017550 sodium carbonate Nutrition 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N31/00—Investigating or analysing non-biological materials by the use of the chemical methods specified in the subgroup; Apparatus specially adapted for such methods
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N31/00—Investigating or analysing non-biological materials by the use of the chemical methods specified in the subgroup; Apparatus specially adapted for such methods
- G01N31/22—Investigating or analysing non-biological materials by the use of the chemical methods specified in the subgroup; Apparatus specially adapted for such methods using chemical indicators
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S436/00—Chemistry: analytical and immunological testing
- Y10S436/902—Dosimeter
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S436/00—Chemistry: analytical and immunological testing
- Y10S436/904—Oxidation - reduction indicators
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T436/00—Chemistry: analytical and immunological testing
- Y10T436/16—Phosphorus containing
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T436/00—Chemistry: analytical and immunological testing
- Y10T436/19—Halogen containing
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T436/00—Chemistry: analytical and immunological testing
- Y10T436/20—Oxygen containing
- Y10T436/204998—Inorganic carbon compounds
Landscapes
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- Molecular Biology (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Biophysics (AREA)
- Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP138751 | 1985-06-25 | ||
| JP60138751A JPS61296268A (ja) | 1985-06-25 | 1985-06-25 | 検知剤 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR870000591A KR870000591A (ko) | 1987-02-19 |
| KR940002517B1 true KR940002517B1 (ko) | 1994-03-25 |
Family
ID=15229329
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1019860005049A Expired - Lifetime KR940002517B1 (ko) | 1985-06-25 | 1986-06-24 | 가스 수소화물용의 고형 검출제 및 가스 수소화물을 검출하는 방법 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US4731333A (enExample) |
| EP (1) | EP0206815B1 (enExample) |
| JP (1) | JPS61296268A (enExample) |
| KR (1) | KR940002517B1 (enExample) |
| DE (1) | DE3675084D1 (enExample) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0294142B1 (en) * | 1987-06-01 | 1992-03-25 | Japan Pionics., Ltd. | Method of cleaning exhaust gases |
| US5171536A (en) * | 1989-09-22 | 1992-12-15 | Dragerwerk Aktiengesellschaft | Colorimetric testing and measuring device for gases |
| DE4121633C2 (de) * | 1991-06-29 | 1998-09-17 | Draegerwerk Ag | Kolorimetrisches Prüf- und Meßgerät für Gase |
| DE4020753A1 (de) * | 1989-09-22 | 1991-04-04 | Draegerwerk Ag | Kolorimetrisches pruef- und messgeraet fuer hydridgas |
| EP0624392B1 (en) * | 1993-05-11 | 1998-08-12 | Japan Pionics Co., Ltd. | Process for cleaning harmful gas |
| US5833882A (en) * | 1996-08-23 | 1998-11-10 | Japan Pionics Co., Ltd. | Detecting agent |
| JP7157443B2 (ja) * | 2018-10-11 | 2022-10-20 | 谷口商会株式会社 | アルカリ漏洩検知テープ及びアルカリ性流体の漏洩検知方法 |
| JP7421344B2 (ja) * | 2020-01-14 | 2024-01-24 | 矢崎総業株式会社 | ガス検知体 |
| CN114453714A (zh) * | 2022-03-01 | 2022-05-10 | 广船国际有限公司 | 一种焊接保护气检测方法、充气流量及充气时间确定方法 |
| JP7578653B2 (ja) * | 2022-08-08 | 2024-11-06 | 矢崎総業株式会社 | ホスフィン検知体 |
| JP7578652B2 (ja) * | 2022-08-08 | 2024-11-06 | 矢崎総業株式会社 | ホスフィン検知体 |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US1321062A (en) * | 1918-12-28 | 1919-11-04 | Arthur B Lamb | Gas-detector. |
| US2848307A (en) * | 1955-02-04 | 1958-08-19 | Callery Chemical Co | Process for detecting presence of boranes |
| US2805132A (en) * | 1955-02-25 | 1957-09-03 | Callery Chemical Co | Monitoring of boranes |
| US3112998A (en) * | 1960-12-27 | 1963-12-03 | Drager Otto H | Reagent for detection of arsenic hydride or phosphorous hydride |
| US4254214A (en) * | 1975-11-27 | 1981-03-03 | Fuji Photo Film Co., Ltd. | Photographic materials for non-silver images and process for forming non-silver images |
| DE2751336A1 (de) * | 1977-11-17 | 1979-05-23 | Basf Ag | Verfahren zur herstellung von carbonsaeureamiden |
| US4309385A (en) * | 1979-01-26 | 1982-01-05 | Nippon Sanso K.K. | Apparatus for measuring volatile hydrides |
| DE2926711C2 (de) * | 1979-07-03 | 1981-06-11 | Drägerwerk AG, 2400 Lübeck | Prüfröhrchen zur Messung von Arsentrioxid-Aerosolen in Luft |
| US4384146A (en) * | 1979-12-14 | 1983-05-17 | Shell Oil Company | Process for butanediols |
| SU963949A1 (ru) * | 1981-02-17 | 1982-10-07 | Тартусский Ордена Трудового Красного Знамени Государственный Университет | Способ приготовлени индикаторного состава дл определени фосфина в воздухе |
| US4420567A (en) * | 1981-10-22 | 1983-12-13 | Mda Scientific, Inc. | Hydride gas detecting tape |
| US4419273A (en) * | 1981-11-04 | 1983-12-06 | Chevron Research Company | Clay-based sulfur sorbent |
| US4532120A (en) * | 1983-12-28 | 1985-07-30 | Ethyl Corporation | Silane purification process |
-
1985
- 1985-06-25 JP JP60138751A patent/JPS61296268A/ja active Granted
-
1986
- 1986-06-24 KR KR1019860005049A patent/KR940002517B1/ko not_active Expired - Lifetime
- 1986-06-25 EP EP86304899A patent/EP0206815B1/en not_active Expired - Lifetime
- 1986-06-25 US US06/878,537 patent/US4731333A/en not_active Expired - Lifetime
- 1986-06-25 DE DE8686304899T patent/DE3675084D1/de not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61296268A (ja) | 1986-12-27 |
| EP0206815A1 (en) | 1986-12-30 |
| US4731333A (en) | 1988-03-15 |
| JPH0479576B2 (enExample) | 1992-12-16 |
| DE3675084D1 (de) | 1990-11-29 |
| KR870000591A (ko) | 1987-02-19 |
| EP0206815B1 (en) | 1990-10-24 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR940002517B1 (ko) | 가스 수소화물용의 고형 검출제 및 가스 수소화물을 검출하는 방법 | |
| US5531971A (en) | Process for purifying semiconductor process gases to remove lewis acid and oxidant impurities therefrom | |
| US5512262A (en) | Process for cleaning harmful gas | |
| US6773925B2 (en) | Detector agent for halogen compounds and method for detecting halogen compounds | |
| US3112998A (en) | Reagent for detection of arsenic hydride or phosphorous hydride | |
| JPH0654309B2 (ja) | 検知剤 | |
| JP3567058B2 (ja) | 検知剤 | |
| EP0699903B1 (en) | Reagent for detecting gaseous hydrides | |
| KR100473178B1 (ko) | 검지제 | |
| JPS6221061A (ja) | 検知剤 | |
| JP2596815B2 (ja) | 検知剤 | |
| JPH0679138A (ja) | Ｎｆ▲３▼ガスの前処理方法 | |
| JPS6222062A (ja) | 検知剤 | |
| JPH0829411A (ja) | 検知剤 | |
| US3388075A (en) | Indicator for nitrogen oxide | |
| JPS6219763A (ja) | 選択検知剤 | |
| JP2665529B2 (ja) | 検知剤 | |
| JP3294372B2 (ja) | 検知剤 | |
| JP2665528B2 (ja) | 検知剤 | |
| JP3532316B2 (ja) | 検知剤 | |
| JP2000214156A (ja) | 検知剤及び検知方法 | |
| JPH1019872A (ja) | 検知剤 | |
| WO2003060510A1 (fr) | Agent et procédé de détection de germane | |
| JPH08233800A (ja) | 有害成分の固体検知剤 | |
| JPH0768128A (ja) | 有害ガスの浄化方法 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PA0109 | Patent application |
Patent event code: PA01091R01D Comment text: Patent Application Patent event date: 19860624 |
|
| PG1501 | Laying open of application | ||
| A201 | Request for examination | ||
| PA0201 | Request for examination |
Patent event code: PA02012R01D Patent event date: 19901120 Comment text: Request for Examination of Application Patent event code: PA02011R01I Patent event date: 19860624 Comment text: Patent Application |
|
| G160 | Decision to publish patent application | ||
| PG1605 | Publication of application before grant of patent |
Comment text: Decision on Publication of Application Patent event code: PG16051S01I Patent event date: 19940228 |
|
| E701 | Decision to grant or registration of patent right | ||
| PE0701 | Decision of registration |
Patent event code: PE07011S01D Comment text: Decision to Grant Registration Patent event date: 19940622 |
|
| GRNT | Written decision to grant | ||
| PR0701 | Registration of establishment |
Comment text: Registration of Establishment Patent event date: 19940707 Patent event code: PR07011E01D |
|
| PR1002 | Payment of registration fee |
Payment date: 19940707 End annual number: 3 Start annual number: 1 |
|
| PR1001 | Payment of annual fee |
Payment date: 19970220 Start annual number: 4 End annual number: 4 |
|
| PR1001 | Payment of annual fee |
Payment date: 19980227 Start annual number: 5 End annual number: 5 |
|
| PR1001 | Payment of annual fee |
Payment date: 19990203 Start annual number: 6 End annual number: 6 |
|
| PR1001 | Payment of annual fee |
Payment date: 20000217 Start annual number: 7 End annual number: 7 |
|
| PR1001 | Payment of annual fee |
Payment date: 20010209 Start annual number: 8 End annual number: 8 |
|
| PR1001 | Payment of annual fee |
Payment date: 20020219 Start annual number: 9 End annual number: 9 |
|
| PR1001 | Payment of annual fee |
Payment date: 20030307 Start annual number: 10 End annual number: 10 |
|
| PR1001 | Payment of annual fee |
Payment date: 20040309 Start annual number: 11 End annual number: 11 |
|
| PR1001 | Payment of annual fee |
Payment date: 20050309 Start annual number: 12 End annual number: 12 |
|
| FPAY | Annual fee payment |
Payment date: 20060313 Year of fee payment: 13 |
|
| PR1001 | Payment of annual fee |
Payment date: 20060313 Start annual number: 13 End annual number: 13 |
|
| EXPY | Expiration of term | ||
| PC1801 | Expiration of term |