KR870000591A - 가스 수소화물의 고형 검출제 - Google Patents

가스 수소화물의 고형 검출제 Download PDF

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Publication number
KR870000591A
KR870000591A KR1019860005049A KR860005049A KR870000591A KR 870000591 A KR870000591 A KR 870000591A KR 1019860005049 A KR1019860005049 A KR 1019860005049A KR 860005049 A KR860005049 A KR 860005049A KR 870000591 A KR870000591 A KR 870000591A
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South Korea
Prior art keywords
gas
hydride
porous carrier
detection agent
solid
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KR1019860005049A
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English (en)
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KR940002517B1 (ko
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고이찌 기다하라
다까시 시마다
Original Assignee
니혼 파이오닉스 가부시끼가이샤
다까사끼 후미오
니혼 파이오닉스 가부시끼 가이샤
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Publication of KR870000591A publication Critical patent/KR870000591A/ko
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Publication of KR940002517B1 publication Critical patent/KR940002517B1/ko

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N31/00—Investigating or analysing non-biological materials by the use of the chemical methods specified in the subgroup; Apparatus specially adapted for such methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N31/00—Investigating or analysing non-biological materials by the use of the chemical methods specified in the subgroup; Apparatus specially adapted for such methods
    • G01N31/22—Investigating or analysing non-biological materials by the use of the chemical methods specified in the subgroup; Apparatus specially adapted for such methods using chemical indicators
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S436/00—Chemistry: analytical and immunological testing
    • Y10S436/902—Dosimeter
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S436/00—Chemistry: analytical and immunological testing
    • Y10S436/904—Oxidation - reduction indicators
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T436/00—Chemistry: analytical and immunological testing
    • Y10T436/16—Phosphorus containing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T436/00—Chemistry: analytical and immunological testing
    • Y10T436/19—Halogen containing
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T436/00—Chemistry: analytical and immunological testing
    • Y10T436/20—Oxygen containing
    • Y10T436/204998—Inorganic carbon compounds

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  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Molecular Biology (AREA)
  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Biophysics (AREA)
  • Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)

Abstract

내용 없음.

Description

가스 수소화물의 고형 검출제
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음

Claims (13)

  1. 색깔변화 성분으로서 연기성 탄산동을 포함하며, 이를 아르신, 포스핀, 디보란, 셀렌화수소, 게르만, 모노실란, 디실란 및, 디클로로 실란으로 이루어진 그룹중에서 선택된 적어도 하나의 가스 수소화물과 접촉시 색깥변화가 일어나는 가스 수소화물의 고형 검출제.
  2. 제1항에 있어서, 상기 염기성 탄산등이 다공성 담체상에 지지된 고형 검출제.
  3. 제2항에 있어서, 상기 다공성 담체가 실리카, 실리카알루미나 또는 알루미나인 고형 검출제.
  4. 제2항에 있어서, 상기 다공성 담체가 50㎡/g이하의 비표면적을 갖는 고형 검출제.
  5. 색깥변화 성분으로서 연기성 탄산등을 포함하는 고형 검출제를 아르신, 포스핀, 디보란, 셀렌화수소, 게르만, 모노실란, 디실란 및 디클로로 실란으로 이루어진 그룹중에서 선택된 가스 수소화물을 적어도 하나 함유하는 가스와 접촉시킨 다음 검출제의 색깔변화를 관찰하여 가스 수소화물을 검출하는 방법.
  6. 제5항에 있어서, 상기 염기성 탄산등이 다공성 담체상에 지지된 방법.
  7. 제6항에 있어서, 상기 다공성 담체가 실리카, 실리카 알루미나 또는 알루미나인 방법.
  8. 제6항에 있어서, 상기 다공성 담체가 50㎡/g이하의 비표면적을 갖는 방법.
  9. 제5항에 있어서, 상기 검출제가 실린더 또는 관속에 충진되고, 이들을 통하여 상기 가스 수소화물함유 가스가 통과하는 방법.
  10. 제9항에 있어서, 상기 실린더 또는 관이 투명한 방법.
  11. 제5항에 있어서, 가스 수소화물-함유 가스가 질소, 수소, 아르곤, 칼륨 또는 공기 또는 그의 혼합물인 방법.
  12. 제5항에 있어서, 상기 가스 수소화물-함유 가스가 반도체의 제조 공정으로부터 방출된 폐기가스인 방법.
  13. 제12항에 있어서, 상기 폐기가스가 상기 고형 검출제와 접촉하기전 가스 수소화물이 감소된 농도를 가지도록 가스 수소화물을 제거하는 층을 통하여 통과하는 방법.
    ※ 참고사항 ： 최초출원 내용에 의하여 공개하는 것임.
KR1019860005049A 1985-06-25 1986-06-24 가스 수소화물용의 고형 검출제 및 가스 수소화물을 검출하는 방법 KR940002517B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP60138751A JPS61296268A (ja) 1985-06-25 1985-06-25 検知剤
JP138751 1985-06-25

Publications (2)

Publication Number Publication Date
KR870000591A true KR870000591A (ko) 1987-02-19
KR940002517B1 KR940002517B1 (ko) 1994-03-25

Family

ID=15229329

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019860005049A KR940002517B1 (ko) 1985-06-25 1986-06-24 가스 수소화물용의 고형 검출제 및 가스 수소화물을 검출하는 방법

Country Status (5)

Country Link
US (1) US4731333A (ko)
EP (1) EP0206815B1 (ko)
JP (1) JPS61296268A (ko)
KR (1) KR940002517B1 (ko)
DE (1) DE3675084D1 (ko)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0294142B1 (en) * 1987-06-01 1992-03-25 Japan Pionics., Ltd. Method of cleaning exhaust gases
US5171536A (en) * 1989-09-22 1992-12-15 Dragerwerk Aktiengesellschaft Colorimetric testing and measuring device for gases
DE4020753A1 (de) * 1989-09-22 1991-04-04 Draegerwerk Ag Kolorimetrisches pruef- und messgeraet fuer hydridgas
DE4121633C2 (de) * 1991-06-29 1998-09-17 Draegerwerk Ag Kolorimetrisches Prüf- und Meßgerät für Gase
DE69412341T2 (de) * 1993-05-11 1999-02-18 Japan Pionics Co. Ltd., Tokio/Tokyo Verfahren zur Reinigung von Schadgas
US5833882A (en) * 1996-08-23 1998-11-10 Japan Pionics Co., Ltd. Detecting agent
JP7157443B2 (ja) * 2018-10-11 2022-10-20 谷口商会株式会社 アルカリ漏洩検知テープ及びアルカリ性流体の漏洩検知方法
JP7421344B2 (ja) * 2020-01-14 2024-01-24 矢崎総業株式会社 ガス検知体
CN114453714A (zh) * 2022-03-01 2022-05-10 广船国际有限公司 一种焊接保护气检测方法、充气流量及充气时间确定方法

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US1321062A (en) * 1918-12-28 1919-11-04 Arthur B Lamb Gas-detector.
US2848307A (en) * 1955-02-04 1958-08-19 Callery Chemical Co Process for detecting presence of boranes
US2805132A (en) * 1955-02-25 1957-09-03 Callery Chemical Co Monitoring of boranes
US3112998A (en) * 1960-12-27 1963-12-03 Drager Otto H Reagent for detection of arsenic hydride or phosphorous hydride
US4254214A (en) * 1975-11-27 1981-03-03 Fuji Photo Film Co., Ltd. Photographic materials for non-silver images and process for forming non-silver images
DE2751336A1 (de) * 1977-11-17 1979-05-23 Basf Ag Verfahren zur herstellung von carbonsaeureamiden
US4309385A (en) * 1979-01-26 1982-01-05 Nippon Sanso K.K. Apparatus for measuring volatile hydrides
DE2926711C2 (de) * 1979-07-03 1981-06-11 Drägerwerk AG, 2400 Lübeck Prüfröhrchen zur Messung von Arsentrioxid-Aerosolen in Luft
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Also Published As

Publication number Publication date
EP0206815A1 (en) 1986-12-30
DE3675084D1 (de) 1990-11-29
JPS61296268A (ja) 1986-12-27
KR940002517B1 (ko) 1994-03-25
EP0206815B1 (en) 1990-10-24
JPH0479576B2 (ko) 1992-12-16
US4731333A (en) 1988-03-15

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