KR930016777A - 임계초과 유체 오염물 모니터 - Google Patents

임계초과 유체 오염물 모니터 Download PDF

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Publication number
KR930016777A
KR930016777A KR1019930000664A KR930000664A KR930016777A KR 930016777 A KR930016777 A KR 930016777A KR 1019930000664 A KR1019930000664 A KR 1019930000664A KR 930000664 A KR930000664 A KR 930000664A KR 930016777 A KR930016777 A KR 930016777A
Authority
KR
South Korea
Prior art keywords
contaminants
quartz crystal
measurement zone
sampling
stream
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
KR1019930000664A
Other languages
English (en)
Korean (ko)
Inventor
에스. 디 밀리아 에드워드
에이. 글라이하우프 다렐
이. 휘팅 토마스
Original Assignee
완다 케이. 덴슨-로우
휴우즈 에어크라프트 캄파니
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 완다 케이. 덴슨-로우, 휴우즈 에어크라프트 캄파니 filed Critical 완다 케이. 덴슨-로우
Publication of KR930016777A publication Critical patent/KR930016777A/ko
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N5/00—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid
    • G01N5/04—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid by removing a component, e.g. by evaporation, and weighing the remainder
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/10—Devices for withdrawing samples in the liquid or fluent state
    • G01N1/20—Devices for withdrawing samples in the liquid or fluent state for flowing or falling materials
    • G01N1/2035—Devices for withdrawing samples in the liquid or fluent state for flowing or falling materials by deviating part of a fluid stream, e.g. by drawing-off or tapping

Landscapes

  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Extraction Or Liquid Replacement (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Treatment Of Water By Oxidation Or Reduction (AREA)
KR1019930000664A 1992-01-24 1993-01-20 임계초과 유체 오염물 모니터 Ceased KR930016777A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US828,533 1992-01-24
US07/828,533 US5369033A (en) 1992-01-24 1992-01-24 Supercritical fluid contamination monitor

Publications (1)

Publication Number Publication Date
KR930016777A true KR930016777A (ko) 1993-08-30

Family

ID=25252088

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019930000664A Ceased KR930016777A (ko) 1992-01-24 1993-01-20 임계초과 유체 오염물 모니터

Country Status (9)

Country Link
US (1) US5369033A (https=)
EP (1) EP0555638B1 (https=)
JP (1) JP2661854B2 (https=)
KR (1) KR930016777A (https=)
AT (1) ATE126352T1 (https=)
CA (1) CA2086709A1 (https=)
DE (1) DE69300334T2 (https=)
MX (1) MX9300350A (https=)
TW (1) TW236002B (https=)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4404309A1 (de) * 1994-02-11 1995-08-17 Polster Schlageter Klaus Verfahren und Einrichtung zur Untersuchung und Messung von Wässern und Flüssigkeiten auf Abscheidung und/oder Auflösung von Stoffen bei Temperatur- und/oder Druckänderung
US5700695A (en) * 1994-06-30 1997-12-23 Zia Yassinzadeh Sample collection and manipulation method
US5706840A (en) * 1995-03-03 1998-01-13 Sandia Corporation Precision cleaning apparatus and method
US6053032A (en) * 1995-04-13 2000-04-25 Nalco Chemical Company System and method for determining a deposition rate in a process stream indicative of a mass build-up and for controlling feed of a product in the process stream to combat same
US5734098A (en) * 1996-03-25 1998-03-31 Nalco/Exxon Energy Chemicals, L.P. Method to monitor and control chemical treatment of petroleum, petrochemical and processes with on-line quartz crystal microbalance sensors
US6037182A (en) * 1997-12-29 2000-03-14 Vlsi Technology, Inc. Method for detecting a location of contaminant entry in a processing fluid production and distribution system
US6360585B1 (en) 2000-03-06 2002-03-26 General Electric Company Method and apparatus for determining chemical properties
DE10061248B4 (de) * 2000-12-09 2004-02-26 Carl Zeiss Verfahren und Vorrichtung zur In-situ-Dekontamination eines EUV-Lithographiegerätes
TWI312067B (en) * 2002-01-22 2009-07-11 Praxair Technology Inc Method for analyzing impurities in carbon dioxide
US6875285B2 (en) * 2003-04-24 2005-04-05 Taiwan Semiconductor Manufacturing Company, Ltd. System and method for dampening high pressure impact on porous materials
US7588995B2 (en) * 2005-11-14 2009-09-15 Taiwan Semiconductor Manufacturing Company, Ltd. Method to create damage-free porous low-k dielectric films and structures resulting therefrom
US7951723B2 (en) * 2006-10-24 2011-05-31 Taiwan Semiconductor Manufacturing Company, Ltd. Integrated etch and supercritical CO2 process and chamber design
US20110306152A1 (en) * 2010-06-09 2011-12-15 I Shou University System and Method for Determining Concentration of a Predetermined Osteoarthritis Biomarker in a Urine Sample
CN103712877A (zh) * 2013-12-25 2014-04-09 浙江工业大学 用于大物料量试样超临界水气化的热重特性分析系统
US10054357B2 (en) * 2016-10-12 2018-08-21 Raytheon Company Purity monitor
FR3085482B1 (fr) * 2018-08-30 2020-11-27 Esiee Paris Chambre De Commerce Et Dindustrie De Region Paris Ile De France Capteur de particules fines avec microbalances en cascade
KR102779813B1 (ko) 2021-09-13 2025-03-12 세메스 주식회사 기판 처리 방법 및 기판 처리 장치

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3863495A (en) * 1973-04-16 1975-02-04 Exxon Research Engineering Co Quartz crystal solute mass detector
US4124528A (en) * 1974-10-04 1978-11-07 Arthur D. Little, Inc. Process for regenerating adsorbents with supercritical fluids
US4434028A (en) * 1981-04-17 1984-02-28 Critical Fluid Systems, Inc. Apparatus for removing organic contaminants from inorganic-rich mineral solids
US4597943A (en) * 1984-11-29 1986-07-01 Morinaga & Co., Ltd. Apparatus for analyzing solid sample with supercritical fluid
CA1227357A (en) * 1985-02-12 1987-09-29 Minister Of National Defence Method and apparatus for detecting presence and concentration of vapours in gaseous fluids
US4917499A (en) * 1986-10-03 1990-04-17 Hughes Aircraft Company Apparatus for analyzing contamination
US4872316A (en) * 1988-02-01 1989-10-10 The Charles Stark Draper Laboratory, Inc. System for monitoring a liquid entrained in a fluid
GB8828277D0 (en) * 1988-12-03 1989-01-05 Glasgow College Enterprises Lt Dust monitors & dust monitoring
MY105421A (en) * 1990-03-02 1994-10-31 Exxon Research Engineering Co A method for quantitatively measuring saturates, olefins and aromatics in a composition.
US5009746A (en) * 1990-10-12 1991-04-23 Kimberly-Clark Corporation Method for removing stickies from secondary fibers using supercritical CO2 solvent extraction

Also Published As

Publication number Publication date
TW236002B (https=) 1994-12-11
US5369033A (en) 1994-11-29
JP2661854B2 (ja) 1997-10-08
EP0555638A1 (en) 1993-08-18
ATE126352T1 (de) 1995-08-15
DE69300334D1 (de) 1995-09-14
JPH05264430A (ja) 1993-10-12
CA2086709A1 (en) 1993-07-25
DE69300334T2 (de) 1996-04-18
EP0555638B1 (en) 1995-08-09
MX9300350A (es) 1993-07-01

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Legal Events

Date Code Title Description
A201 Request for examination
PA0109 Patent application

Patent event code: PA01091R01D

Comment text: Patent Application

Patent event date: 19930120

PA0201 Request for examination

Patent event code: PA02012R01D

Patent event date: 19930120

Comment text: Request for Examination of Application

PG1501 Laying open of application
E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event date: 19960826

Patent event code: PE09021S01D

E601 Decision to refuse application
PE0601 Decision on rejection of patent

Patent event date: 19970107

Comment text: Decision to Refuse Application

Patent event code: PE06012S01D

Patent event date: 19960826

Comment text: Notification of reason for refusal

Patent event code: PE06011S01I