CA2086709A1 - Supercritical fluid contamination monitor - Google Patents
Supercritical fluid contamination monitorInfo
- Publication number
- CA2086709A1 CA2086709A1 CA002086709A CA2086709A CA2086709A1 CA 2086709 A1 CA2086709 A1 CA 2086709A1 CA 002086709 A CA002086709 A CA 002086709A CA 2086709 A CA2086709 A CA 2086709A CA 2086709 A1 CA2086709 A1 CA 2086709A1
- Authority
- CA
- Canada
- Prior art keywords
- contaminants
- quartz crystal
- supercritical fluid
- measurement zone
- cleaning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 239000012530 fluid Substances 0.000 title claims abstract description 67
- 238000011109 contamination Methods 0.000 title abstract description 5
- 238000004140 cleaning Methods 0.000 claims abstract description 66
- 239000000356 contaminant Substances 0.000 claims abstract description 62
- 238000003380 quartz crystal microbalance Methods 0.000 claims abstract description 30
- 238000012544 monitoring process Methods 0.000 claims abstract description 21
- 238000005259 measurement Methods 0.000 claims description 34
- 239000010453 quartz Substances 0.000 claims description 18
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 18
- 239000013078 crystal Substances 0.000 claims description 16
- 238000005070 sampling Methods 0.000 claims description 7
- 230000035559 beat frequency Effects 0.000 claims description 3
- 238000000605 extraction Methods 0.000 abstract description 20
- 238000000034 method Methods 0.000 abstract description 19
- 230000008569 process Effects 0.000 abstract description 16
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 40
- 229910002092 carbon dioxide Inorganic materials 0.000 description 21
- 239000001569 carbon dioxide Substances 0.000 description 20
- 239000007789 gas Substances 0.000 description 16
- 239000002904 solvent Substances 0.000 description 11
- 239000000463 material Substances 0.000 description 10
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 4
- 230000008859 change Effects 0.000 description 4
- 230000003749 cleanliness Effects 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 4
- 238000000926 separation method Methods 0.000 description 4
- 238000013459 approach Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 239000000284 extract Substances 0.000 description 3
- 239000003921 oil Substances 0.000 description 3
- 239000003960 organic solvent Substances 0.000 description 3
- 230000000717 retained effect Effects 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 235000008694 Humulus lupulus Nutrition 0.000 description 2
- IMNFDUFMRHMDMM-UHFFFAOYSA-N N-Heptane Chemical compound CCCCCCC IMNFDUFMRHMDMM-UHFFFAOYSA-N 0.000 description 2
- UFWIBTONFRDIAS-UHFFFAOYSA-N Naphthalene Chemical compound C1=CC=CC2=CC=CC=C21 UFWIBTONFRDIAS-UHFFFAOYSA-N 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 238000011065 in-situ storage Methods 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 2
- 230000000737 periodic effect Effects 0.000 description 2
- 238000001556 precipitation Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 2
- 230000001172 regenerating effect Effects 0.000 description 2
- 235000010469 Glycine max Nutrition 0.000 description 1
- 244000068988 Glycine max Species 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 239000002250 absorbent Substances 0.000 description 1
- 230000002745 absorbent Effects 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 239000003463 adsorbent Substances 0.000 description 1
- 238000003915 air pollution Methods 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 238000011001 backwashing Methods 0.000 description 1
- 238000009530 blood pressure measurement Methods 0.000 description 1
- 229960001701 chloroform Drugs 0.000 description 1
- 238000004587 chromatography analysis Methods 0.000 description 1
- 239000011538 cleaning material Substances 0.000 description 1
- 239000003245 coal Substances 0.000 description 1
- 239000000796 flavoring agent Substances 0.000 description 1
- 235000019634 flavors Nutrition 0.000 description 1
- 238000001917 fluorescence detection Methods 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 150000002894 organic compounds Chemical class 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 150000002989 phenols Chemical class 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 150000003222 pyridines Chemical class 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000002195 soluble material Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000004808 supercritical fluid chromatography Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N5/00—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid
- G01N5/04—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid by removing a component, e.g. by evaporation, and weighing the remainder
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N1/10—Devices for withdrawing samples in the liquid or fluent state
- G01N1/20—Devices for withdrawing samples in the liquid or fluent state for flowing or falling materials
- G01N1/2035—Devices for withdrawing samples in the liquid or fluent state for flowing or falling materials by deviating part of a fluid stream, e.g. by drawing-off or tapping
Landscapes
- General Health & Medical Sciences (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Extraction Or Liquid Replacement (AREA)
- Sampling And Sample Adjustment (AREA)
- Treatment Of Water By Oxidation Or Reduction (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US828,533 | 1992-01-24 | ||
| US07/828,533 US5369033A (en) | 1992-01-24 | 1992-01-24 | Supercritical fluid contamination monitor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA2086709A1 true CA2086709A1 (en) | 1993-07-25 |
Family
ID=25252088
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002086709A Abandoned CA2086709A1 (en) | 1992-01-24 | 1993-01-05 | Supercritical fluid contamination monitor |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US5369033A (https=) |
| EP (1) | EP0555638B1 (https=) |
| JP (1) | JP2661854B2 (https=) |
| KR (1) | KR930016777A (https=) |
| AT (1) | ATE126352T1 (https=) |
| CA (1) | CA2086709A1 (https=) |
| DE (1) | DE69300334T2 (https=) |
| MX (1) | MX9300350A (https=) |
| TW (1) | TW236002B (https=) |
Families Citing this family (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4404309A1 (de) * | 1994-02-11 | 1995-08-17 | Polster Schlageter Klaus | Verfahren und Einrichtung zur Untersuchung und Messung von Wässern und Flüssigkeiten auf Abscheidung und/oder Auflösung von Stoffen bei Temperatur- und/oder Druckänderung |
| US5700695A (en) * | 1994-06-30 | 1997-12-23 | Zia Yassinzadeh | Sample collection and manipulation method |
| US5706840A (en) * | 1995-03-03 | 1998-01-13 | Sandia Corporation | Precision cleaning apparatus and method |
| US6053032A (en) * | 1995-04-13 | 2000-04-25 | Nalco Chemical Company | System and method for determining a deposition rate in a process stream indicative of a mass build-up and for controlling feed of a product in the process stream to combat same |
| US5734098A (en) * | 1996-03-25 | 1998-03-31 | Nalco/Exxon Energy Chemicals, L.P. | Method to monitor and control chemical treatment of petroleum, petrochemical and processes with on-line quartz crystal microbalance sensors |
| US6037182A (en) * | 1997-12-29 | 2000-03-14 | Vlsi Technology, Inc. | Method for detecting a location of contaminant entry in a processing fluid production and distribution system |
| US6360585B1 (en) | 2000-03-06 | 2002-03-26 | General Electric Company | Method and apparatus for determining chemical properties |
| DE10061248B4 (de) * | 2000-12-09 | 2004-02-26 | Carl Zeiss | Verfahren und Vorrichtung zur In-situ-Dekontamination eines EUV-Lithographiegerätes |
| TWI312067B (en) * | 2002-01-22 | 2009-07-11 | Praxair Technology Inc | Method for analyzing impurities in carbon dioxide |
| US6875285B2 (en) * | 2003-04-24 | 2005-04-05 | Taiwan Semiconductor Manufacturing Company, Ltd. | System and method for dampening high pressure impact on porous materials |
| US7588995B2 (en) * | 2005-11-14 | 2009-09-15 | Taiwan Semiconductor Manufacturing Company, Ltd. | Method to create damage-free porous low-k dielectric films and structures resulting therefrom |
| US7951723B2 (en) * | 2006-10-24 | 2011-05-31 | Taiwan Semiconductor Manufacturing Company, Ltd. | Integrated etch and supercritical CO2 process and chamber design |
| US20110306152A1 (en) * | 2010-06-09 | 2011-12-15 | I Shou University | System and Method for Determining Concentration of a Predetermined Osteoarthritis Biomarker in a Urine Sample |
| CN103712877A (zh) * | 2013-12-25 | 2014-04-09 | 浙江工业大学 | 用于大物料量试样超临界水气化的热重特性分析系统 |
| US10054357B2 (en) * | 2016-10-12 | 2018-08-21 | Raytheon Company | Purity monitor |
| FR3085482B1 (fr) * | 2018-08-30 | 2020-11-27 | Esiee Paris Chambre De Commerce Et Dindustrie De Region Paris Ile De France | Capteur de particules fines avec microbalances en cascade |
| KR102779813B1 (ko) | 2021-09-13 | 2025-03-12 | 세메스 주식회사 | 기판 처리 방법 및 기판 처리 장치 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3863495A (en) * | 1973-04-16 | 1975-02-04 | Exxon Research Engineering Co | Quartz crystal solute mass detector |
| US4124528A (en) * | 1974-10-04 | 1978-11-07 | Arthur D. Little, Inc. | Process for regenerating adsorbents with supercritical fluids |
| US4434028A (en) * | 1981-04-17 | 1984-02-28 | Critical Fluid Systems, Inc. | Apparatus for removing organic contaminants from inorganic-rich mineral solids |
| US4597943A (en) * | 1984-11-29 | 1986-07-01 | Morinaga & Co., Ltd. | Apparatus for analyzing solid sample with supercritical fluid |
| CA1227357A (en) * | 1985-02-12 | 1987-09-29 | Minister Of National Defence | Method and apparatus for detecting presence and concentration of vapours in gaseous fluids |
| US4917499A (en) * | 1986-10-03 | 1990-04-17 | Hughes Aircraft Company | Apparatus for analyzing contamination |
| US4872316A (en) * | 1988-02-01 | 1989-10-10 | The Charles Stark Draper Laboratory, Inc. | System for monitoring a liquid entrained in a fluid |
| GB8828277D0 (en) * | 1988-12-03 | 1989-01-05 | Glasgow College Enterprises Lt | Dust monitors & dust monitoring |
| MY105421A (en) * | 1990-03-02 | 1994-10-31 | Exxon Research Engineering Co | A method for quantitatively measuring saturates, olefins and aromatics in a composition. |
| US5009746A (en) * | 1990-10-12 | 1991-04-23 | Kimberly-Clark Corporation | Method for removing stickies from secondary fibers using supercritical CO2 solvent extraction |
-
1992
- 1992-01-24 US US07/828,533 patent/US5369033A/en not_active Expired - Lifetime
-
1993
- 1993-01-05 CA CA002086709A patent/CA2086709A1/en not_active Abandoned
- 1993-01-12 AT AT93100349T patent/ATE126352T1/de not_active IP Right Cessation
- 1993-01-12 EP EP93100349A patent/EP0555638B1/en not_active Expired - Lifetime
- 1993-01-12 DE DE69300334T patent/DE69300334T2/de not_active Expired - Lifetime
- 1993-01-18 TW TW082100299A patent/TW236002B/zh active
- 1993-01-20 KR KR1019930000664A patent/KR930016777A/ko not_active Ceased
- 1993-01-22 MX MX9300350A patent/MX9300350A/es unknown
- 1993-01-25 JP JP5010281A patent/JP2661854B2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| KR930016777A (ko) | 1993-08-30 |
| TW236002B (https=) | 1994-12-11 |
| US5369033A (en) | 1994-11-29 |
| JP2661854B2 (ja) | 1997-10-08 |
| EP0555638A1 (en) | 1993-08-18 |
| ATE126352T1 (de) | 1995-08-15 |
| DE69300334D1 (de) | 1995-09-14 |
| JPH05264430A (ja) | 1993-10-12 |
| DE69300334T2 (de) | 1996-04-18 |
| EP0555638B1 (en) | 1995-08-09 |
| MX9300350A (es) | 1993-07-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EEER | Examination request | ||
| FZDE | Discontinued |