KR930007903Y1 - 압력 감지기 - Google Patents

압력 감지기 Download PDF

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Publication number
KR930007903Y1
KR930007903Y1 KR2019900007438U KR900007438U KR930007903Y1 KR 930007903 Y1 KR930007903 Y1 KR 930007903Y1 KR 2019900007438 U KR2019900007438 U KR 2019900007438U KR 900007438 U KR900007438 U KR 900007438U KR 930007903 Y1 KR930007903 Y1 KR 930007903Y1
Authority
KR
South Korea
Prior art keywords
pressure
pressure chamber
pressure sensor
diaphragm
semiconductor chip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
KR2019900007438U
Other languages
English (en)
Korean (ko)
Other versions
KR910001185U (ko
Inventor
가쯔아끼 야스이
야스오 다다
아끼라 다까시마
Original Assignee
미쯔비시 덴끼 가부시끼가이샤
시끼 모리야
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 미쯔비시 덴끼 가부시끼가이샤, 시끼 모리야 filed Critical 미쯔비시 덴끼 가부시끼가이샤
Publication of KR910001185U publication Critical patent/KR910001185U/ko
Application granted granted Critical
Publication of KR930007903Y1 publication Critical patent/KR930007903Y1/ko
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/04—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of resistance-strain gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0061—Electrical connection means
    • G01L19/0084—Electrical connection means to the outside of the housing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G01L19/147—Details about the mounting of the sensor to support or covering means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49082—Resistor making
    • Y10T29/49103—Strain gauge making

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
KR2019900007438U 1989-06-02 1990-05-30 압력 감지기 Expired - Fee Related KR930007903Y1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP65133 1989-06-02
JP1989065133U JPH0744993Y2 (ja) 1989-06-02 1989-06-02 圧力センサ

Publications (2)

Publication Number Publication Date
KR910001185U KR910001185U (ko) 1991-01-24
KR930007903Y1 true KR930007903Y1 (ko) 1993-11-24

Family

ID=13278072

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019900007438U Expired - Fee Related KR930007903Y1 (ko) 1989-06-02 1990-05-30 압력 감지기

Country Status (3)

Country Link
US (1) US4984466A (enExample)
JP (1) JPH0744993Y2 (enExample)
KR (1) KR930007903Y1 (enExample)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5225373A (en) * 1990-03-07 1993-07-06 Mitsubishi Denki Kabushiki Kaisha Method of manufacturing semiconductor pressure sensor device with two semiconductor pressure sensor chips
AU5417096A (en) 1995-02-24 1996-09-11 Lucas Novasensor Pressure sensor with transducer mounted on a metal base
US5969259A (en) * 1995-04-07 1999-10-19 Sensym, Inc. Side port package for micromachined fluid sensor
US6601452B2 (en) * 2000-06-05 2003-08-05 Denso Corporation Semiconductor pressure sensor having rounded corner portion of diaphragm
JP2009098062A (ja) * 2007-10-18 2009-05-07 Denso Corp 圧力センサ
JP5853171B2 (ja) * 2010-12-13 2016-02-09 パナソニックＩｐマネジメント株式会社 半導体圧力センサおよびその製造方法
KR101740014B1 (ko) * 2015-06-15 2017-05-26 주식회사 아이티엠반도체 압력센서장치 및 그 제조방법
CN106197824A (zh) * 2016-08-26 2016-12-07 华景传感科技（无锡）有限公司 压力传感器及所适用的汽车
EP3534131B1 (de) * 2018-03-02 2021-06-02 Grundfos Holding A/S Drucksensor

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4600912A (en) * 1985-01-25 1986-07-15 Bourns Instruments, Inc. Diaphragm pressure sensor with improved tensile loading characteristics
US4790192A (en) * 1987-09-24 1988-12-13 Rosemount Inc. Silicon side by side coplanar pressure sensors
KR920005348Y1 (ko) * 1988-03-01 1992-08-03 미쓰비시전기주식회사 압력센서

Also Published As

Publication number Publication date
JPH034243U (enExample) 1991-01-17
US4984466A (en) 1991-01-15
JPH0744993Y2 (ja) 1995-10-11
KR910001185U (ko) 1991-01-24

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