KR930007902Y1 - 압력 감지기 - Google Patents
압력 감지기 Download PDFInfo
- Publication number
- KR930007902Y1 KR930007902Y1 KR2019900007437U KR900007437U KR930007902Y1 KR 930007902 Y1 KR930007902 Y1 KR 930007902Y1 KR 2019900007437 U KR2019900007437 U KR 2019900007437U KR 900007437 U KR900007437 U KR 900007437U KR 930007902 Y1 KR930007902 Y1 KR 930007902Y1
- Authority
- KR
- South Korea
- Prior art keywords
- pressure
- diaphragm
- diaphragms
- output
- case
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 claims description 17
- 239000000853 adhesive Substances 0.000 claims description 16
- 230000001070 adhesive effect Effects 0.000 claims description 14
- 239000000758 substrate Substances 0.000 claims description 10
- 238000005192 partition Methods 0.000 claims description 6
- 238000001514 detection method Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000003321 amplification Effects 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical group [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 239000010703 silicon Chemical group 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000013464 silicone adhesive Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
- G01L9/04—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of resistance-strain gauges
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP65131 | 1989-06-02 | ||
| JP1989065131U JPH034241U (https=) | 1989-06-02 | 1989-06-02 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR910001184U KR910001184U (ko) | 1991-01-24 |
| KR930007902Y1 true KR930007902Y1 (ko) | 1993-11-24 |
Family
ID=13278014
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR2019900007437U Expired - Lifetime KR930007902Y1 (ko) | 1989-06-02 | 1990-05-30 | 압력 감지기 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPH034241U (https=) |
| KR (1) | KR930007902Y1 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20070186528A1 (en) * | 2006-02-15 | 2007-08-16 | Baldwin Filters, Inc. | Fluted filter apparatus |
-
1989
- 1989-06-02 JP JP1989065131U patent/JPH034241U/ja active Pending
-
1990
- 1990-05-30 KR KR2019900007437U patent/KR930007902Y1/ko not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH034241U (https=) | 1991-01-17 |
| KR910001184U (ko) | 1991-01-24 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR920005348Y1 (ko) | 압력센서 | |
| US6272928B1 (en) | Hermetically sealed absolute and differential pressure transducer | |
| EP2189773B1 (en) | Design of wet/wet differential pressure sensor based on microelectronic packaging process | |
| US6023978A (en) | Pressure transducer with error compensation from cross-coupling outputs of two sensors | |
| KR100741520B1 (ko) | 다이어프램을 갖는 반도체 압력 센서 | |
| US8631707B2 (en) | Differential temperature and acceleration compensated pressure transducer | |
| JPH0588771B2 (https=) | ||
| JPS61502365A (ja) | 半導体トランスジユ−サ | |
| US9170167B2 (en) | Pressure sensor | |
| US6725725B1 (en) | Micromechanical differential pressure sensor device | |
| CA2173786A1 (en) | Semiconductor Differential Pressure Measuring Device | |
| JP3274034B2 (ja) | 半導体加速度検出装置 | |
| TWI833802B (zh) | 集成式光學傳感器及其製造方法 | |
| KR930007903Y1 (ko) | 압력 감지기 | |
| KR930007902Y1 (ko) | 압력 감지기 | |
| JPH0933371A (ja) | 半導体圧力計 | |
| KR920005749Y1 (ko) | 와유량계(渦流量計) | |
| CN118362226A (zh) | 分裂堆叠式全桥压力传感器 | |
| JPH0755614A (ja) | 圧力センサ用パッケージ構造 | |
| US4907459A (en) | Vortex flow meter | |
| JPH0777471A (ja) | 容量型圧力センサ | |
| US20250155307A1 (en) | Differential oil-filled pressure transducers with compensating capsule | |
| RU95106770A (ru) | Датчик давления | |
| JPH0744992Y2 (ja) | 圧力センサ | |
| JP3120388B2 (ja) | 半導体圧力変換器 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A201 | Request for examination | ||
| UA0108 | Application for utility model registration |
Comment text: Application for Utility Model Registration Patent event code: UA01011R08D Patent event date: 19900530 |
|
| UA0201 | Request for examination |
Patent event date: 19900530 Patent event code: UA02012R01D Comment text: Request for Examination of Application |
|
| UG1501 | Laying open of application | ||
| E902 | Notification of reason for refusal | ||
| UE0902 | Notice of grounds for rejection |
Comment text: Notification of reason for refusal Patent event code: UE09021S01D Patent event date: 19930524 |
|
| UG1604 | Publication of application |
Patent event code: UG16041S01I Comment text: Decision on Publication of Application Patent event date: 19931029 |
|
| E701 | Decision to grant or registration of patent right | ||
| UE0701 | Decision of registration |
Patent event date: 19940217 Comment text: Decision to Grant Registration Patent event code: UE07011S01D |
|
| REGI | Registration of establishment | ||
| UR0701 | Registration of establishment |
Patent event date: 19940304 Patent event code: UR07011E01D Comment text: Registration of Establishment |
|
| UR1002 | Payment of registration fee |
Start annual number: 1 End annual number: 3 Payment date: 19940304 |
|
| UR1001 | Payment of annual fee |
Payment date: 19961112 Start annual number: 4 End annual number: 4 |
|
| UR1001 | Payment of annual fee |
Payment date: 19971111 Start annual number: 5 End annual number: 5 |
|
| UR1001 | Payment of annual fee |
Payment date: 19981112 Start annual number: 6 End annual number: 6 |
|
| UR1001 | Payment of annual fee |
Payment date: 19991109 Start annual number: 7 End annual number: 7 |
|
| UR1001 | Payment of annual fee |
Payment date: 20001116 Start annual number: 8 End annual number: 8 |
|
| UR1001 | Payment of annual fee |
Payment date: 20011114 Start annual number: 9 End annual number: 9 |
|
| UR1001 | Payment of annual fee |
Payment date: 20021107 Start annual number: 10 End annual number: 10 |
|
| UR1001 | Payment of annual fee |
Payment date: 20031106 Start annual number: 11 End annual number: 11 |
|
| FPAY | Annual fee payment |
Payment date: 20041109 Year of fee payment: 12 |
|
| UR1001 | Payment of annual fee |
Payment date: 20041109 Start annual number: 12 End annual number: 12 |
|
| EXPY | Expiration of term | ||
| UC1801 | Expiration of term |