KR920013771A - 박막트랜지스터 제조방법 - Google Patents

박막트랜지스터 제조방법

Info

Publication number
KR920013771A
KR920013771A KR1019900022469A KR900022469A KR920013771A KR 920013771 A KR920013771 A KR 920013771A KR 1019900022469 A KR1019900022469 A KR 1019900022469A KR 900022469 A KR900022469 A KR 900022469A KR 920013771 A KR920013771 A KR 920013771A
Authority
KR
South Korea
Prior art keywords
thin film
film transistor
manufacturing thin
manufacturing
transistor
Prior art date
Application number
KR1019900022469A
Other languages
English (en)
Other versions
KR0177386B1 (ko
Inventor
박대영
Original Assignee
엘지반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지반도체주식회사 filed Critical 엘지반도체주식회사
Priority to KR1019900022469A priority Critical patent/KR0177386B1/ko
Publication of KR920013771A publication Critical patent/KR920013771A/ko
Application granted granted Critical
Publication of KR0177386B1 publication Critical patent/KR0177386B1/ko

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
    • H01L29/76—Unipolar devices, e.g. field effect transistors
    • H01L29/772—Field effect transistors

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Semiconductor Memories (AREA)
  • Thin Film Transistor (AREA)
KR1019900022469A 1990-12-29 1990-12-29 박막트랜지스터 제조방법 KR0177386B1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019900022469A KR0177386B1 (ko) 1990-12-29 1990-12-29 박막트랜지스터 제조방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019900022469A KR0177386B1 (ko) 1990-12-29 1990-12-29 박막트랜지스터 제조방법

Publications (2)

Publication Number Publication Date
KR920013771A true KR920013771A (ko) 1992-07-29
KR0177386B1 KR0177386B1 (ko) 1999-03-20

Family

ID=19308972

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019900022469A KR0177386B1 (ko) 1990-12-29 1990-12-29 박막트랜지스터 제조방법

Country Status (1)

Country Link
KR (1) KR0177386B1 (ko)

Also Published As

Publication number Publication date
KR0177386B1 (ko) 1999-03-20

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