KR920013771A - 박막트랜지스터 제조방법 - Google Patents
박막트랜지스터 제조방법Info
- Publication number
- KR920013771A KR920013771A KR1019900022469A KR900022469A KR920013771A KR 920013771 A KR920013771 A KR 920013771A KR 1019900022469 A KR1019900022469 A KR 1019900022469A KR 900022469 A KR900022469 A KR 900022469A KR 920013771 A KR920013771 A KR 920013771A
- Authority
- KR
- South Korea
- Prior art keywords
- thin film
- film transistor
- manufacturing thin
- manufacturing
- transistor
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000010409 thin film Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Semiconductor Memories (AREA)
- Thin Film Transistor (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019900022469A KR0177386B1 (ko) | 1990-12-29 | 1990-12-29 | 박막트랜지스터 제조방법 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019900022469A KR0177386B1 (ko) | 1990-12-29 | 1990-12-29 | 박막트랜지스터 제조방법 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR920013771A true KR920013771A (ko) | 1992-07-29 |
KR0177386B1 KR0177386B1 (ko) | 1999-03-20 |
Family
ID=19308972
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019900022469A KR0177386B1 (ko) | 1990-12-29 | 1990-12-29 | 박막트랜지스터 제조방법 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR0177386B1 (ko) |
-
1990
- 1990-12-29 KR KR1019900022469A patent/KR0177386B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR0177386B1 (ko) | 1999-03-20 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E701 | Decision to grant or registration of patent right | ||
GRNT | Written decision to grant | ||
FPAY | Annual fee payment |
Payment date: 20061026 Year of fee payment: 9 |
|
LAPS | Lapse due to unpaid annual fee |