KR920000678B1 - 기판의 회전 건조 장치 - Google Patents

기판의 회전 건조 장치 Download PDF

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Publication number
KR920000678B1
KR920000678B1 KR1019870004472A KR870004472A KR920000678B1 KR 920000678 B1 KR920000678 B1 KR 920000678B1 KR 1019870004472 A KR1019870004472 A KR 1019870004472A KR 870004472 A KR870004472 A KR 870004472A KR 920000678 B1 KR920000678 B1 KR 920000678B1
Authority
KR
South Korea
Prior art keywords
chamber
substrate
air
drive shaft
bearing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
KR1019870004472A
Other languages
English (en)
Korean (ko)
Other versions
KR870011662A (ko
Inventor
노리유키 하야시
에이이치로오 하야시
히사오 니시자와
Original Assignee
다이닛뽕 스쿠링세이소오 가부시키가이샤
이시다 도쿠지르오
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 다이닛뽕 스쿠링세이소오 가부시키가이샤, 이시다 도쿠지르오 filed Critical 다이닛뽕 스쿠링세이소오 가부시키가이샤
Publication of KR870011662A publication Critical patent/KR870011662A/ko
Application granted granted Critical
Publication of KR920000678B1 publication Critical patent/KR920000678B1/ko
Expired legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
    • H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F26—DRYING
    • F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
    • F26B5/00—Drying solid materials or objects by processes not involving the application of heat
    • F26B5/08—Drying solid materials or objects by processes not involving the application of heat by centrifugal treatment

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  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Molecular Biology (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Drying Of Solid Materials (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
KR1019870004472A 1986-05-09 1987-05-07 기판의 회전 건조 장치 Expired KR920000678B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP?61-70586(U) 1986-05-09
JP70586 1986-05-09
JP1986070586U JPH0729630Y2 (ja) 1986-05-09 1986-05-09 基板の回転乾燥装置

Publications (2)

Publication Number Publication Date
KR870011662A KR870011662A (ko) 1987-12-26
KR920000678B1 true KR920000678B1 (ko) 1992-01-20

Family

ID=13435810

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019870004472A Expired KR920000678B1 (ko) 1986-05-09 1987-05-07 기판의 회전 건조 장치

Country Status (3)

Country Link
US (1) US4735000A (enExample)
JP (1) JPH0729630Y2 (enExample)
KR (1) KR920000678B1 (enExample)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03238819A (ja) * 1990-02-15 1991-10-24 Seiichiro Sogo 半導体材料の乾燥方法および装置
KR100248564B1 (ko) * 1992-04-07 2000-03-15 다카시마 히로시 스핀 드라이어
TW472296B (en) * 1999-05-25 2002-01-11 Ebara Corp Substrate treating apparatus and method of operating the same
US6457478B1 (en) 1999-11-12 2002-10-01 Michael J. Danese Method for treating an object using ultra-violet light
US6272768B1 (en) 1999-11-12 2001-08-14 Michael J. Danese Apparatus for treating an object using ultra-violet light
CN110762974B (zh) * 2019-11-07 2021-02-09 杭州晨昊纺织整理有限公司 一种用于纺织加工的布料烘干装置
CN112460949A (zh) * 2020-11-25 2021-03-09 江门市美亚纺织材料有限公司 一种用于纺织助剂加工的烘干设备

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1143151B (de) * 1954-02-10 1963-01-31 Licentia Gmbh Haushaltwaescheschleuder
JPS59115967A (ja) * 1982-12-20 1984-07-04 三菱電機株式会社 回転形乾燥機
JPS6210439U (enExample) * 1985-07-03 1987-01-22
JPS629635A (ja) * 1985-07-08 1987-01-17 Oki Electric Ind Co Ltd 半導体ウエハの回転乾燥装置
JPS6263930U (enExample) * 1985-10-14 1987-04-21

Also Published As

Publication number Publication date
JPS62182539U (enExample) 1987-11-19
US4735000A (en) 1988-04-05
KR870011662A (ko) 1987-12-26
JPH0729630Y2 (ja) 1995-07-05

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