KR910013032U - Wafer transfer holder drive - Google Patents

Wafer transfer holder drive

Info

Publication number
KR910013032U
KR910013032U KR2019890019406U KR890019406U KR910013032U KR 910013032 U KR910013032 U KR 910013032U KR 2019890019406 U KR2019890019406 U KR 2019890019406U KR 890019406 U KR890019406 U KR 890019406U KR 910013032 U KR910013032 U KR 910013032U
Authority
KR
South Korea
Prior art keywords
wafer transfer
holder drive
transfer holder
drive
wafer
Prior art date
Application number
KR2019890019406U
Other languages
Korean (ko)
Other versions
KR960003371Y1 (en
Inventor
안만호
류도현
Original Assignee
금성일렉트론 주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 금성일렉트론 주식회사 filed Critical 금성일렉트론 주식회사
Priority to KR2019890019406U priority Critical patent/KR960003371Y1/en
Publication of KR910013032U publication Critical patent/KR910013032U/en
Application granted granted Critical
Publication of KR960003371Y1 publication Critical patent/KR960003371Y1/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
    • H01L21/67781—Batch transfer of wafers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67259—Position monitoring, e.g. misposition detection or presence detection

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
KR2019890019406U 1989-12-21 1989-12-21 Holder driving device of wafer transfer KR960003371Y1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019890019406U KR960003371Y1 (en) 1989-12-21 1989-12-21 Holder driving device of wafer transfer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019890019406U KR960003371Y1 (en) 1989-12-21 1989-12-21 Holder driving device of wafer transfer

Publications (2)

Publication Number Publication Date
KR910013032U true KR910013032U (en) 1991-07-30
KR960003371Y1 KR960003371Y1 (en) 1996-04-20

Family

ID=19293555

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019890019406U KR960003371Y1 (en) 1989-12-21 1989-12-21 Holder driving device of wafer transfer

Country Status (1)

Country Link
KR (1) KR960003371Y1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100269269B1 (en) * 1997-11-24 2000-10-16 김재욱 Holding equipment of semiconductor wafer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100269269B1 (en) * 1997-11-24 2000-10-16 김재욱 Holding equipment of semiconductor wafer

Also Published As

Publication number Publication date
KR960003371Y1 (en) 1996-04-20

Similar Documents

Publication Publication Date Title
DE69031170D1 (en) SEMICONDUCTOR MICRO DRIVE
IT1191533B (en) COIL CONVEYOR DEVICE
ES2021656B3 (en) CHUCK
DK0431274T3 (en) chuck
KR910013032U (en) Wafer transfer holder drive
KR910010999U (en) CHUCK
KR910001605U (en) Wafer holding device
KR900020319U (en) Brick transfer device
KR900021025U (en) Pickup transfer mechanism
KR900017789U (en) Non-contact wafer mount chuck
KR900018464U (en) Automatic workpiece transfer device
KR930016219U (en) Wafer holder
KR910004997U (en) Wafer holding device
KR880009587U (en) Robot hand exchange device
KR910013031U (en) Waferizer for wafer
KR920013731U (en) Wafer transfer device
KR910012333U (en) Substrate cleaning device
KR910009936U (en) Wafer Mount Chuck
KR950015662U (en) Wafer holder
FR2650739B1 (en) WAFER TABLE
KR940027614U (en) Double wafer holder
KR890016876U (en) Substrate holder coupling device
KR880015075U (en) Chuck
IT219039Z2 (en) TOOL HOLDER
DK63987D0 (en) RISTE HOLDER

Legal Events

Date Code Title Description
A201 Request for examination
E701 Decision to grant or registration of patent right
REGI Registration of establishment
FPAY Annual fee payment

Payment date: 20030318

Year of fee payment: 8

LAPS Lapse due to unpaid annual fee