KR910010654A - 운송장치 - Google Patents
운송장치 Download PDFInfo
- Publication number
- KR910010654A KR910010654A KR1019900017756A KR900017756A KR910010654A KR 910010654 A KR910010654 A KR 910010654A KR 1019900017756 A KR1019900017756 A KR 1019900017756A KR 900017756 A KR900017756 A KR 900017756A KR 910010654 A KR910010654 A KR 910010654A
- Authority
- KR
- South Korea
- Prior art keywords
- workpiece
- transport
- conveyors
- transport apparatus
- conveyor
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/6776—Continuous loading and unloading into and out of a processing chamber, e.g. transporting belts within processing chambers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
- H01L21/67173—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers in-line arrangement
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Control Of Conveyors (AREA)
- Branching, Merging, And Special Transfer Between Conveyors (AREA)
Abstract
내용 없음
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명의 1실시예의 구성을 도시하는 평면도.
Claims (2)
- 동일종류의 처리장치를 복수대가지고, 각 처리장치에 공급되는 피 가공체와 각 처리장치로부터 배출되는 피 가공체를 1열의 운송라인으로 공유시켜서 운동하는 운송장치에 있어서, 상기 1열의 운송라일을 복수의 콘베이어로 구성하고, 또한 각 콘베이어를 각각 개별적으로 제어 가능하게 구성하고, 다시 피 가공체를 검출하는 센서를 각 콘베이어에 대응시켜 설치한 것을 특징으로 하는 운송장치.
- 제1항에 있어서, 콘베이어는 각 처리장치에 대응하여 각각 2개 설치되어있는 것을 특징으로 하는 운송장치.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1292435A JP2668735B2 (ja) | 1989-11-13 | 1989-11-13 | 搬送装置 |
JP1-292435 | 1989-11-13 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR910010654A true KR910010654A (ko) | 1991-06-29 |
Family
ID=17781756
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019900017756A KR910010654A (ko) | 1989-11-13 | 1990-11-02 | 운송장치 |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP2668735B2 (ko) |
KR (1) | KR910010654A (ko) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3041809B2 (ja) * | 1992-05-19 | 2000-05-15 | 株式会社新川 | プッシャ手段 |
JP3101845B2 (ja) * | 1992-09-02 | 2000-10-23 | 株式会社新川 | 搬送方法及び搬送制御装置 |
CN104551394B (zh) * | 2013-10-22 | 2016-04-20 | 昆山杰士德精密工业有限公司 | 电池生产用全自动镭射焊接设备 |
CN109814435A (zh) * | 2018-12-21 | 2019-05-28 | 芜湖恒美电热器具有限公司 | Ptc成品组装尺寸防呆系统 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0628888B2 (ja) * | 1987-01-07 | 1994-04-20 | 積水化学工業株式会社 | 射出成形設備における製品搬出制御システム |
-
1989
- 1989-11-13 JP JP1292435A patent/JP2668735B2/ja not_active Expired - Fee Related
-
1990
- 1990-11-02 KR KR1019900017756A patent/KR910010654A/ko not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
JPH03158317A (ja) | 1991-07-08 |
JP2668735B2 (ja) | 1997-10-27 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E902 | Notification of reason for refusal | ||
E601 | Decision to refuse application |