KR910010631A - Manufacturing Method of Semiconductor Device - Google Patents
Manufacturing Method of Semiconductor Device Download PDFInfo
- Publication number
- KR910010631A KR910010631A KR1019890016609A KR890016609A KR910010631A KR 910010631 A KR910010631 A KR 910010631A KR 1019890016609 A KR1019890016609 A KR 1019890016609A KR 890016609 A KR890016609 A KR 890016609A KR 910010631 A KR910010631 A KR 910010631A
- Authority
- KR
- South Korea
- Prior art keywords
- temperature
- impurity
- semiconductor device
- manufacturing
- impurity penetration
- Prior art date
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- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Abstract
내용 없음No content
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.
제5도는 본 발명의 침투공정의 시퀸스를 나타낸 도면이다5 is a diagram showing a sequence of the penetration process of the present invention.
제6도는 종래의 침투공정후 생성된 결점을 나타낸 도면6 is a view showing the defects generated after the conventional infiltration process
제7도 내지 제12도는 침투공정후 AES 장치로 분석한 결과를 나타낸 도면7 to 12 are views showing the results analyzed by the AES device after the infiltration process
Claims (1)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019890016609A KR910010631A (en) | 1989-11-16 | 1989-11-16 | Manufacturing Method of Semiconductor Device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019890016609A KR910010631A (en) | 1989-11-16 | 1989-11-16 | Manufacturing Method of Semiconductor Device |
Publications (1)
Publication Number | Publication Date |
---|---|
KR910010631A true KR910010631A (en) | 1991-06-29 |
Family
ID=67660992
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019890016609A KR910010631A (en) | 1989-11-16 | 1989-11-16 | Manufacturing Method of Semiconductor Device |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR910010631A (en) |
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1989
- 1989-11-16 KR KR1019890016609A patent/KR910010631A/en not_active IP Right Cessation
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