KR910007737B1 - Apparatus of gainning the fault of hole of shadow mask - Google Patents

Abstract

The apparatus detects the fault by enhancing the edge information of shadow pinch holes. The apparatus includes a line light source (11), a condensing lenz (12) for condensing the light, a working pattern (14) having the pattern same as the mask, a line scan camera (15) for converting the light passed through the condensing lenz and the working pattern to the analog image signal, an A/D converter (16) for converting the analog image signal to the digital signal, and a memory (5) for storing the digital signal. When the pinch hole is larger or smaller than the normal hole, the amount of light passing through the shadow mask and the working pattern varies so that the pulse width and the magnitude of the line image signal transmitted from the line scan camera become larger or smaller than normal. case.

Description

Shadow Mask Honor Flaw Image Acquisition Device

1 is a block diagram of a conventional automatic shadow mask diameter inspection device.

Figure 2 is an exemplary configuration of the shadow mask pore defect image acquisition device of the present invention.

FIG. 3 is an explanatory diagram showing an operation relationship of the working pattern of FIG.

4 is a shadow mask pore defect image state diagram obtained according to the present invention.

* Explanation of symbols for main parts of the drawings

11: line light 12: focusing lens

13: shadow mask 14: walking pattern

15: line scan camera 16: analog / digital converter

The present invention relates to a shadow mask automatic automatic inspection device of the present invention, in particular, highlighting the device for the defect of the defect of the shadow mask (Enhancement), by minimizing the amount of image data to inspect the inspection of the defects of the shadow mask at high speed The present invention relates to a shadow mask mirror defect image acquisition device that can be performed.

As shown in FIG. 1, a conventional shadow mask diameter automatic inspection device has a line illumination (1) for illuminating a shadow mask (2) placed on a conveyor (C), and a line through the shadow mask (2). A line scan camera 3 for converting an image into an analog signal, an analog / digital converter 4 for converting an output signal of the line scan camera 3 into a digital signal, and an output to the analog / digital converter 4 A memory 5 for storing the digital video signal to be used, a digital image processor 6 for applying an inspection algorithm to the digital video signal stored in the memory 5, and an output signal of the digital image processor 6; Host computer 7 for final inspection and processing of shadow, shadow mask loader 8 and scanner 9 and shadow mask unloader 10 under the control of the host computer 7; Consists of Is to be explained is the operation process thereof.

The shadow mask 2 to be inspected is loaded into the scanner 9 by the shadow mask loader 8 under the control of the host computer 7, and is uniform at the bottom of the loaded shadow mask 2. When the line light 1 is illuminated, the line light 1 is applied to the line scan camera 3 through the diameter of the shadow mask 2. Therefore, at this time, the line scan camera 3 converts the line image through the shadow mask 2 into an analog image signal, which is converted into a digital image signal by the analog / digital converter 4 and then stored in a memory ( 5) is remembered. At this time, the digital processor 6 reads the digital video signal stored in the memory 5, performs a test on the digital video signal, and informs the host computer 7 of the digital video signal. Accordingly, the host computer 7 checks the current shadow mask. It is determined whether (2) is normal or abnormal.

However, in such a conventional apparatus, since the line light is directly reflected on the shadow mask, an accurate line image cannot be obtained from the shadow mask, and light passing through the void of the shadow mask causes diffuse reflection, so that the edge of the shadow mask is mirrored. There was a flaw in not being able to accurately perform the shadow test of the shadow mask because accurate information on Edge was not available.

In order to solve the above-mentioned drawbacks, the present invention has been made a shadow mask pore defect image acquisition device that can accurately obtain information on the edge of the shadow mask, it will be described in detail with reference to the accompanying drawings as follows. same.

2 is an exemplary view showing the configuration of a shadow mask defect defect image acquisition device according to an embodiment of the present invention. As shown therein, a line mask 11 for generating uniform line light and a shadow mask by converging the light of the line light 11 are shown. The focusing lens 12 applied to (13), the working pattern 14 having the same pore pattern as the mask 13, and the light through the focusing lens 12 and the working pattern 14 are converted into analog image signals. It consists of a line scan camera 15 for converting and an analog / digital converter 16 for converting an analog video signal output from the line scan camera 15 into a digital video signal. The analog / digital converter 16 The digital video signal to be output is applied to the memory 5 of FIG. The line light 11 is a fluorescent lamp driven by a high frequency fluorescent lamp driver, and the working pattern 14 is placed on an iron plate, which is a raw material of the shadow mask, and is used in an exposure process of forming a void of the shadow mask by irradiating ultraviolet rays. Pattern.

Referring to the effect of the present invention configured as described in detail as follows.

When line light is generated in the line light 11 by the high-frequency fluorescent lamp driver, the line light is focused on the focusing lens 12 and is reflected on the shadow mask 13. Therefore, when the walking pattern 14 is positioned correspondingly to the pore of the shadow mask 13, the line light focused by the focusing lens 12 passes between the pore of the shadow mask 13 and the walking pattern 14. Done. That is, as shown in FIG. 3, the light focused in the focusing lens 12 passes through the small pore diameter 13a of the shadow mask 13, and then the space between the large diameter 13b and the working pattern 14 thereof. In this way, the light through the shadow mask 13 and the working pattern 14 is converted by the line scan camera 15 to the line image signal. Therefore, when the pore diameter of the shadow mask 13 is normal, the line light through the shadow mask 13 and the working pattern 14 becomes constant, so that the line image signal output from the line scan camera 15 is shown in FIG. 4A. As shown in the drawing, the pitch of the shadow mask 13 is a periodic signal. However, when the pore size of the shadow mask 13 is larger than the normal case, the light passing through the shadow mask 13 and the working pattern 14 increases, and thus the line image signal output from the line scan camera 15 is increased. As shown in Fig. 4B, its pulse width and magnitude become large.

In addition, when the pore size of the shadow mask 13 is smaller than normal, the light passing through the shadow mask 13 and the working pattern 14 is reduced, and thus the line image signal output from the line scan camera 15 is reduced. As shown in Fig. 4C, its pulse width and magnitude become small.

Since the line video signal output from the line scan camera 15 is converted into a digital video signal by the analog / digital converter 16, it is easy to determine whether the pore size of the shadow mask 13 is normal from the digital video signal value. It becomes possible.

As described in detail above, only the information signal for the pore of the shadow mask of the present invention can be emphasized, so that the pore inspection of the shadow mask can be precisely performed, and the inspection accuracy can be prevented from falling due to the change in brightness of the illumination, and the minimum pore Since only the data is acquired, the processing time of the inspection algorithm can be reduced.

Claims (1)

The light generated by the line light 11 is detected by the line scan camera 15 by the shadow mask 13 and output as an analog video signal, and the analog video signal is converted into a digital video signal by the analog / digital converter 16. In a shadow mask image acquisition device for converting and acquiring an image according to the pore size of the shadow mask 13, a focusing lens for focusing line light generated by the line light 11 and passing the shadow mask 13 through the shadow mask 13. And a walking pattern 14 having the same pore pattern as that of the shadow mask 13 and positioned to correspond to the output side of the shadow mask 13. Acquisition device.

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