JPH03165534A - Defect inspecting device - Google Patents

Defect inspecting device

Info

Publication number
JPH03165534A
JPH03165534A JP30562089A JP30562089A JPH03165534A JP H03165534 A JPH03165534 A JP H03165534A JP 30562089 A JP30562089 A JP 30562089A JP 30562089 A JP30562089 A JP 30562089A JP H03165534 A JPH03165534 A JP H03165534A
Authority
JP
Japan
Prior art keywords
dark
inspected
light
image
comparator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP30562089A
Other languages
Japanese (ja)
Inventor
Takeshi Kinoshita
Original Assignee
Nec Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nec Corp filed Critical Nec Corp
Priority to JP30562089A priority Critical patent/JPH03165534A/en
Publication of JPH03165534A publication Critical patent/JPH03165534A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To make it possible to detect the fine thinning-down of a pattern and the like as well by a method wherein a comparison of a light field and a dark field is performed, the dark-field image part is removed from the light- field comparison part by being binarized.
CONSTITUTION: An image formed using dark-field illumination sources 5 and 6 is inspected using a dark-field comparator 14 by the instruction of a light and dark-field controller 9. At this time, a dark-field inspected region is retained as a binary image by a binary circuit 13. An image formed using light-field illumination sources 7 and 8 is inspected using a light-field comparator 12 by the instruction of the controller 9. An inspected part in a dark field is removed from the result of the comparator 12 by an XOR circuit 15 and an inspected result unitizing the respective characteristics of a light field and the dark, field is outputted from a result output device 16. Thereby, the accuracy of an inspection, in which a plane part can be inspected in the light field and a roughened part can be inspected in the dark field, is improved.
COPYRIGHT: (C)1991,JPO&Japio
JP30562089A 1989-11-24 1989-11-24 Defect inspecting device Pending JPH03165534A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP30562089A JPH03165534A (en) 1989-11-24 1989-11-24 Defect inspecting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP30562089A JPH03165534A (en) 1989-11-24 1989-11-24 Defect inspecting device

Publications (1)

Publication Number Publication Date
JPH03165534A true JPH03165534A (en) 1991-07-17

Family

ID=17947332

Family Applications (1)

Application Number Title Priority Date Filing Date
JP30562089A Pending JPH03165534A (en) 1989-11-24 1989-11-24 Defect inspecting device

Country Status (1)

Country Link
JP (1) JPH03165534A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0610916A3 (en) * 1993-02-09 1994-10-12 Cedars Sinai Medical Center Method and apparatus for providing preferentially segmented digital images.
JPH1090192A (en) * 1996-08-29 1998-04-10 Kla Instr Corp Optical inspection of specimen using multi-channel response from the specimen
US5822055A (en) * 1995-06-06 1998-10-13 Kla Instruments Corporation Optical inspection of a specimen using multi-channel responses from the specimen using bright and darkfield detection
US5917588A (en) * 1996-11-04 1999-06-29 Kla-Tencor Corporation Automated specimen inspection system for and method of distinguishing features or anomalies under either bright field or dark field illumination

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0610916A3 (en) * 1993-02-09 1994-10-12 Cedars Sinai Medical Center Method and apparatus for providing preferentially segmented digital images.
US5822055A (en) * 1995-06-06 1998-10-13 Kla Instruments Corporation Optical inspection of a specimen using multi-channel responses from the specimen using bright and darkfield detection
JPH1090192A (en) * 1996-08-29 1998-04-10 Kla Instr Corp Optical inspection of specimen using multi-channel response from the specimen
US5917588A (en) * 1996-11-04 1999-06-29 Kla-Tencor Corporation Automated specimen inspection system for and method of distinguishing features or anomalies under either bright field or dark field illumination

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