KR900008353A - 유량측정 방법 및 이 방법에 사용하는 유량계 및 이 유량계를 사용하는 액체용 유랑제어장치 - Google Patents

유량측정 방법 및 이 방법에 사용하는 유량계 및 이 유량계를 사용하는 액체용 유랑제어장치 Download PDF

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Publication number
KR900008353A
KR900008353A KR1019890004808A KR890004808A KR900008353A KR 900008353 A KR900008353 A KR 900008353A KR 1019890004808 A KR1019890004808 A KR 1019890004808A KR 890004808 A KR890004808 A KR 890004808A KR 900008353 A KR900008353 A KR 900008353A
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South Korea
Prior art keywords
temperature
temperature detecting
flow
tube
electronic cooling
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KR1019890004808A
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English (en)
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KR960003389B1 (ko
Inventor
교오이찌 이시까와
히로시 미히라
노리유끼 기무라
마사오 야마구찌
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호리바 마사오
가부시끼가이샤 에스텍
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7759—Responsive to change in rate of fluid flow

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Measuring Volume Flow (AREA)
  • Flow Control (AREA)

Abstract

내용 없음.

Description

유량측정 방법 및 이 방법에 사용하는 유량계 및 이 유량계를 사용한 액체용 유량제어장치
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 액체탱크에서 송출되는 액체 소오스의 흐름을 도시한 도면,
제2도는 액체용 유량제어장치의 주요부를 도시한 일부를 절단한 정면도,
제3도는 유량계의 분해사시도.

Claims (3)

  1. 유체가 흐르는 관의 일부를 전자냉각소자로 냉각함과 동시에, 이 냉각되는 관 표면의 온도에 의거하여 상기 유체의 유량을 측정하는 것을 특징으로 하는 유량측정방법.
  2. 유체가 흐르는 관의 일부를 전자냉각소자로 냉각하도록 구성함과 동시에 상기 관의 냉각부분에서도 상류측의 관 표면에 온도검출 제1소자를, 상기 전자 냉각소자의 표면에 온도검출 제2소자를, 상기전자냉각소자로 냉각되는 관표면에 온도검출 제3소자를 각각 설치하고, 상기 온도검출 제1소자의 검출온도와 온도검출제2소자의 검출온도와의 차가 항상 소정치로 되도록, 상기 전자냉각소자를 제어하면서, 상기 온도검출 제3소자의 검출온도와 상기 온도검출 제2소자의 검출온도와의 차에 의거하여 상기 관내를 흐르는 유체의 유량을 측정하도록한 것을 특징으로 하는 유량계.
  3. 액체탱크와, 이 액체탱크에서 액체를 송출하는 수단과, 상기 액체탱크에서의 공급유로중에 설치되는 유량계및 그 하류측의 밸브를 구비한 액체용 유량제어장치이고, 상기 유량계는 액체가 흐르는 관의 일부를 전자냉각소자로 냉각하도록 구성함과 동시에, 상기 관의 냉각 부분보다는 상류측의 관표면에 온도 검출 제1소자를, 상기 전자냉각소자의 표면에 온독출 제2소자를, 상기 전자냉각소자로 냉각되는 관표면에 온도검출 제3소자를 각각 설치하고, 상기 온도검출 제1소자의 검출온도와 온도 검출 제2소자의 검출온도와의 차가 항상 소정치로 되도록, 상기 전자냉각소자를 제어하면서, 상기 온도검출 제3소자의 검출온도와 상기 온도검출 제2소자의 검출온도와의 차에 의거하여, 상기 관대를 흐르는 액체의 유량을 측정하도록 구성하고 상기 유량계에서의 신호에 의해 상기 밸브의 개도를 조정하고 소정유량의 액체를 공급하도록 구성한것을 특징으로 하는 액체용 유량제어장치.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019890004808A 1988-11-22 1989-04-12 유량측정방법 및 이 방법에 사용하는 유량계 및 이 유량계를 사용한 액체용 유량제어장치 KR960003389B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP88-295261 1988-11-22
JP29526188A JP2789458B2 (ja) 1988-11-22 1988-11-22 液体気化のための流量制御装置
JP63-295261 1988-11-22

Publications (2)

Publication Number Publication Date
KR900008353A true KR900008353A (ko) 1990-06-04
KR960003389B1 KR960003389B1 (ko) 1996-03-09

Family

ID=17818302

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019890004808A KR960003389B1 (ko) 1988-11-22 1989-04-12 유량측정방법 및 이 방법에 사용하는 유량계 및 이 유량계를 사용한 액체용 유량제어장치

Country Status (5)

Country Link
US (2) US4947889A (ko)
EP (1) EP0370162B1 (ko)
JP (1) JP2789458B2 (ko)
KR (1) KR960003389B1 (ko)
DE (1) DE68923249T2 (ko)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102531171B1 (ko) 2022-08-27 2023-05-10 경도계전 주식회사 유량계 검사 시스템

Families Citing this family (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5359878A (en) * 1991-02-26 1994-11-01 Dxl International, Inc. Apparatus and method for in-line calibration verification of mass flow meters
US5203537A (en) * 1992-03-09 1993-04-20 Teledyne Industries, Inc. Piezoceramic valve actuator sandwich assembly and valve incorporating such an assembly
US5233868A (en) * 1992-04-13 1993-08-10 Coats Montgomery R Non-intrusive mass flow measuring apparatus and method
KR940011791B1 (ko) * 1992-04-15 1994-12-26 금성일렉트론주식회사 온도안정화 매스 플로우 컨트롤러 센서
US5303731A (en) * 1992-06-30 1994-04-19 Unit Instruments, Inc. Liquid flow controller
US5620524A (en) * 1995-02-27 1997-04-15 Fan; Chiko Apparatus for fluid delivery in chemical vapor deposition systems
US6503221B1 (en) * 1997-06-12 2003-01-07 Abbott Laboratories Temperature compensation system for regulating flow through tubing in a pump
NL1014797C2 (nl) * 2000-03-30 2001-10-02 Berkin Bv Massadebietmeter.
EP1251198A1 (de) * 2001-03-20 2002-10-23 PROTECHNA Herbst GmbH & Co. KG Textilpartikelabsaugvorrichtung für Textilmaschinen und Verfahren zum èberwachen derselben
JP4864280B2 (ja) * 2001-04-24 2012-02-01 ブルックス・インストルメント・エルエルシー 質量流量コントローラのシステムおよび方法
AU2003253991A1 (en) * 2002-07-19 2004-02-09 Celerity Group, Inc. Methods and apparatus for pressure compensation in a mass flow controller
DE10247312B3 (de) * 2002-10-10 2004-08-12 Siemens Ag Messvorrichtung und Verfahren zur Ermittlung einer Temperaturkompensationskurve für mindestens eine Messgröße eines Fluids, sowie dafür geeignete Kühlvorrichtung und Verwendung einer Kühlvorrichtung bei einer Messvorrichtung zur Ermittlung einer Temperaturkompensationskurve
US7216019B2 (en) * 2004-07-08 2007-05-08 Celerity, Inc. Method and system for a mass flow controller with reduced pressure sensitivity
IL171764A (en) * 2005-11-03 2011-02-28 G R T Dev Ltd Apparatus and method for measuring a fluid flow- rate within a narrow conduit
US8517990B2 (en) 2007-12-18 2013-08-27 Hospira, Inc. User interface improvements for medical devices
US8571798B2 (en) * 2009-03-03 2013-10-29 Baker Hughes Incorporated System and method for monitoring fluid flow through an electrical submersible pump
US8251091B2 (en) * 2009-09-17 2012-08-28 Hitachi Metals, Ltd. Temperature insensitive mass flow controller
AU2012299169B2 (en) 2011-08-19 2017-08-24 Icu Medical, Inc. Systems and methods for a graphical interface including a graphical representation of medical data
WO2013090709A1 (en) 2011-12-16 2013-06-20 Hospira, Inc. System for monitoring and delivering medication to a patient and method of using the same to minimize the risks associated with automated therapy
JP6306566B2 (ja) 2012-03-30 2018-04-04 アイシーユー・メディカル・インコーポレーテッド 注入システムのポンプ内の空気を検出するための空気検出システムおよび方法
CA3089257C (en) 2012-07-31 2023-07-25 Icu Medical, Inc. Patient care system for critical medications
US9454158B2 (en) 2013-03-15 2016-09-27 Bhushan Somani Real time diagnostics for flow controller systems and methods
US10046112B2 (en) 2013-05-24 2018-08-14 Icu Medical, Inc. Multi-sensor infusion system for detecting air or an occlusion in the infusion system
EP3003441B1 (en) 2013-05-29 2020-12-02 ICU Medical, Inc. Infusion system which utilizes one or more sensors and additional information to make an air determination regarding the infusion system
CA2913918C (en) 2013-05-29 2022-02-15 Hospira, Inc. Infusion system and method of use which prevents over-saturation of an analog-to-digital converter
AU2015222800B2 (en) 2014-02-28 2019-10-17 Icu Medical, Inc. Infusion system and method which utilizes dual wavelength optical air-in-line detection
AU2015266706B2 (en) 2014-05-29 2020-01-30 Icu Medical, Inc. Infusion system and pump with configurable closed loop delivery rate catch-up
US11344668B2 (en) 2014-12-19 2022-05-31 Icu Medical, Inc. Infusion system with concurrent TPN/insulin infusion
US10850024B2 (en) 2015-03-02 2020-12-01 Icu Medical, Inc. Infusion system, device, and method having advanced infusion features
EP3454922B1 (en) 2016-05-13 2022-04-06 ICU Medical, Inc. Infusion pump system with common line auto flush
US11324888B2 (en) 2016-06-10 2022-05-10 Icu Medical, Inc. Acoustic flow sensor for continuous medication flow measurements and feedback control of infusion
US10983537B2 (en) 2017-02-27 2021-04-20 Flow Devices And Systems Inc. Systems and methods for flow sensor back pressure adjustment for mass flow controller
JP6904231B2 (ja) * 2017-12-13 2021-07-14 東京エレクトロン株式会社 基板処理方法、記憶媒体及び原料ガス供給装置
US10089055B1 (en) 2017-12-27 2018-10-02 Icu Medical, Inc. Synchronized display of screen content on networked devices
US11278671B2 (en) 2019-12-04 2022-03-22 Icu Medical, Inc. Infusion pump with safety sequence keypad
EP4185260A1 (en) 2020-07-21 2023-05-31 ICU Medical, Inc. Fluid transfer devices and methods of use
US11135360B1 (en) 2020-12-07 2021-10-05 Icu Medical, Inc. Concurrent infusion with common line auto flush

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL83702C (ko) * 1946-05-21 1900-01-01
US3142170A (en) * 1960-12-01 1964-07-28 Honeywell Regulator Co Control apparatus
US3336804A (en) * 1964-03-09 1967-08-22 Heinz F Poppendiek Means and techniques useful in fluid flow determinations
DE1573028A1 (de) * 1966-10-10 1970-10-22 Licentia Gmbh Einrichtung zur Durchflussmengenvergleichspruefung,insbesondere von hohlen elektrischen Leitern einer elektrischen Maschine,und Durchflussmengenvergleichspruefung mittels der Einrichtung
GB1127568A (en) * 1967-06-01 1968-09-18 Ford Motor Co Flowmeters
US4016759A (en) * 1975-09-18 1977-04-12 Teledyne, Inc. Fluid flowmeter
US4199981A (en) * 1977-02-16 1980-04-29 Wen Young Flow control device for fluids flowing in a closed conduit
US4135396A (en) * 1978-04-24 1979-01-23 The Trane Company Temperature compensating fluid velocity sensing apparatus
DE2856289A1 (de) * 1978-12-27 1980-07-17 Babcock Bsh Ag Verfahren und vorrichtung zur thermischen massenstrommessung
US4354504A (en) * 1979-09-04 1982-10-19 Bro William J Thermal diffusion flow probe
US4384578A (en) * 1981-04-16 1983-05-24 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Bio-medical flow sensor
US4487213A (en) * 1982-09-09 1984-12-11 Omicron Technology Corporation Mass flow controller apparatus
DE3440526A1 (de) * 1984-11-06 1986-05-15 Walter 7036 Schönaich Bürkle Verfahren und einrichtung zum fuehlen von stroemungsgeschwindigkeiten und/oder durchfluessen
US4685331A (en) * 1985-04-10 1987-08-11 Innovus Thermal mass flowmeter and controller
US4679585A (en) * 1986-01-10 1987-07-14 Mks Instruments, Inc. Flowmeter-controlled valving
DE3606853A1 (de) * 1986-03-03 1987-09-10 Vdo Schindling Messsonde
DE3638138A1 (de) * 1986-11-08 1988-05-11 Bosch Gmbh Robert Vorrichtung zur bestimmung der masse eines stroemenden mediums
JPH0514505A (ja) * 1991-06-28 1993-01-22 Nippon Telegr & Teleph Corp <Ntt> 通話中着信付加装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102531171B1 (ko) 2022-08-27 2023-05-10 경도계전 주식회사 유량계 검사 시스템

Also Published As

Publication number Publication date
EP0370162A2 (en) 1990-05-30
EP0370162B1 (en) 1995-06-28
JPH02141620A (ja) 1990-05-31
EP0370162A3 (en) 1992-03-11
KR960003389B1 (ko) 1996-03-09
US5048332A (en) 1991-09-17
DE68923249T2 (de) 1996-02-08
DE68923249D1 (de) 1995-08-03
JP2789458B2 (ja) 1998-08-20
US4947889A (en) 1990-08-14

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