DE68923249D1 - Verfahren und Vorrichtung zum Messen und Steuern eines Flüssigkeitsdurchflusses. - Google Patents

Verfahren und Vorrichtung zum Messen und Steuern eines Flüssigkeitsdurchflusses.

Info

Publication number
DE68923249D1
DE68923249D1 DE68923249T DE68923249T DE68923249D1 DE 68923249 D1 DE68923249 D1 DE 68923249D1 DE 68923249 T DE68923249 T DE 68923249T DE 68923249 T DE68923249 T DE 68923249T DE 68923249 D1 DE68923249 D1 DE 68923249D1
Authority
DE
Germany
Prior art keywords
measuring
controlling
liquid flow
liquid
flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE68923249T
Other languages
English (en)
Other versions
DE68923249T2 (de
Inventor
Kouichi Ishikawa
Hiroshi Mihira
Noriyuki Kimura
Masao Yamaguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Stec KK
Original Assignee
Stec KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=17818302&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=DE68923249(D1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Stec KK filed Critical Stec KK
Publication of DE68923249D1 publication Critical patent/DE68923249D1/de
Application granted granted Critical
Publication of DE68923249T2 publication Critical patent/DE68923249T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/688—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow using a particular type of heating, cooling or sensing element
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/7722—Line condition change responsive valves
    • Y10T137/7758—Pilot or servo controlled
    • Y10T137/7759—Responsive to change in rate of fluid flow
DE1989623249 1988-11-22 1989-04-13 Verfahren und Vorrichtung zum Messen und Steuern eines Flüssigkeitsdurchflusses. Expired - Fee Related DE68923249T2 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP29526188A JP2789458B2 (ja) 1988-11-22 1988-11-22 液体気化のための流量制御装置

Publications (2)

Publication Number Publication Date
DE68923249D1 true DE68923249D1 (de) 1995-08-03
DE68923249T2 DE68923249T2 (de) 1996-02-08

Family

ID=17818302

Family Applications (1)

Application Number Title Priority Date Filing Date
DE1989623249 Expired - Fee Related DE68923249T2 (de) 1988-11-22 1989-04-13 Verfahren und Vorrichtung zum Messen und Steuern eines Flüssigkeitsdurchflusses.

Country Status (5)

Country Link
US (2) US4947889A (de)
EP (1) EP0370162B1 (de)
JP (1) JP2789458B2 (de)
KR (1) KR960003389B1 (de)
DE (1) DE68923249T2 (de)

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US5233868A (en) * 1992-04-13 1993-08-10 Coats Montgomery R Non-intrusive mass flow measuring apparatus and method
KR940011791B1 (ko) * 1992-04-15 1994-12-26 금성일렉트론주식회사 온도안정화 매스 플로우 컨트롤러 센서
US5303731A (en) * 1992-06-30 1994-04-19 Unit Instruments, Inc. Liquid flow controller
US5620524A (en) * 1995-02-27 1997-04-15 Fan; Chiko Apparatus for fluid delivery in chemical vapor deposition systems
US6503221B1 (en) 1997-06-12 2003-01-07 Abbott Laboratories Temperature compensation system for regulating flow through tubing in a pump
NL1014797C2 (nl) * 2000-03-30 2001-10-02 Berkin Bv Massadebietmeter.
EP1251198A1 (de) * 2001-03-20 2002-10-23 PROTECHNA Herbst GmbH & Co. KG Textilpartikelabsaugvorrichtung für Textilmaschinen und Verfahren zum èberwachen derselben
AU2002307547A1 (en) * 2001-04-24 2002-11-05 Unit Instruments, Inc. System and method for configuring and asapting a mass flow controller
EP1523701A2 (de) * 2002-07-19 2005-04-20 Celerity Group, Inc. Verfahren und vorrichtungen zur druckkompensation in einer massenströmungssteuerung
DE10247312B3 (de) * 2002-10-10 2004-08-12 Siemens Ag Messvorrichtung und Verfahren zur Ermittlung einer Temperaturkompensationskurve für mindestens eine Messgröße eines Fluids, sowie dafür geeignete Kühlvorrichtung und Verwendung einer Kühlvorrichtung bei einer Messvorrichtung zur Ermittlung einer Temperaturkompensationskurve
US7216019B2 (en) * 2004-07-08 2007-05-08 Celerity, Inc. Method and system for a mass flow controller with reduced pressure sensitivity
IL171764A (en) * 2005-11-03 2011-02-28 G R T Dev Ltd Apparatus and method for measuring a fluid flow- rate within a narrow conduit
US9026370B2 (en) 2007-12-18 2015-05-05 Hospira, Inc. User interface improvements for medical devices
US8571798B2 (en) * 2009-03-03 2013-10-29 Baker Hughes Incorporated System and method for monitoring fluid flow through an electrical submersible pump
US8251091B2 (en) * 2009-09-17 2012-08-28 Hitachi Metals, Ltd. Temperature insensitive mass flow controller
AU2012299169B2 (en) 2011-08-19 2017-08-24 Icu Medical, Inc. Systems and methods for a graphical interface including a graphical representation of medical data
WO2013090709A1 (en) 2011-12-16 2013-06-20 Hospira, Inc. System for monitoring and delivering medication to a patient and method of using the same to minimize the risks associated with automated therapy
WO2013148798A1 (en) 2012-03-30 2013-10-03 Hospira, Inc. Air detection system and method for detecting air in a pump of an infusion system
CA3089257C (en) 2012-07-31 2023-07-25 Icu Medical, Inc. Patient care system for critical medications
US9454158B2 (en) 2013-03-15 2016-09-27 Bhushan Somani Real time diagnostics for flow controller systems and methods
AU2014268355B2 (en) 2013-05-24 2018-06-14 Icu Medical, Inc. Multi-sensor infusion system for detecting air or an occlusion in the infusion system
ES2838450T3 (es) 2013-05-29 2021-07-02 Icu Medical Inc Sistema de infusión que utiliza uno o más sensores e información adicional para hacer una determinación de aire en relación con el sistema de infusión
AU2014274122A1 (en) 2013-05-29 2016-01-21 Icu Medical, Inc. Infusion system and method of use which prevents over-saturation of an analog-to-digital converter
US10342917B2 (en) 2014-02-28 2019-07-09 Icu Medical, Inc. Infusion system and method which utilizes dual wavelength optical air-in-line detection
JP2017517302A (ja) 2014-05-29 2017-06-29 ホスピーラ インコーポレイテッド 構成可能閉ループ送達速度キャッチアップを有する注入システムおよびポンプ
US11344668B2 (en) 2014-12-19 2022-05-31 Icu Medical, Inc. Infusion system with concurrent TPN/insulin infusion
US10850024B2 (en) 2015-03-02 2020-12-01 Icu Medical, Inc. Infusion system, device, and method having advanced infusion features
CA3023658C (en) 2016-05-13 2023-03-07 Icu Medical, Inc. Infusion pump system and method with common line auto flush
AU2017277804B2 (en) 2016-06-10 2022-05-26 Icu Medical, Inc. Acoustic flow sensor for continuous medication flow measurements and feedback control of infusion
US10983538B2 (en) 2017-02-27 2021-04-20 Flow Devices And Systems Inc. Systems and methods for flow sensor back pressure adjustment for mass flow controller
JP6904231B2 (ja) * 2017-12-13 2021-07-14 東京エレクトロン株式会社 基板処理方法、記憶媒体及び原料ガス供給装置
US10089055B1 (en) 2017-12-27 2018-10-02 Icu Medical, Inc. Synchronized display of screen content on networked devices
US11278671B2 (en) 2019-12-04 2022-03-22 Icu Medical, Inc. Infusion pump with safety sequence keypad
WO2022020184A1 (en) 2020-07-21 2022-01-27 Icu Medical, Inc. Fluid transfer devices and methods of use
US11135360B1 (en) 2020-12-07 2021-10-05 Icu Medical, Inc. Concurrent infusion with common line auto flush
KR102531171B1 (ko) 2022-08-27 2023-05-10 경도계전 주식회사 유량계 검사 시스템

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US4016759A (en) * 1975-09-18 1977-04-12 Teledyne, Inc. Fluid flowmeter
US4199981A (en) * 1977-02-16 1980-04-29 Wen Young Flow control device for fluids flowing in a closed conduit
US4135396A (en) * 1978-04-24 1979-01-23 The Trane Company Temperature compensating fluid velocity sensing apparatus
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US4354504A (en) * 1979-09-04 1982-10-19 Bro William J Thermal diffusion flow probe
US4384578A (en) * 1981-04-16 1983-05-24 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Bio-medical flow sensor
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DE3440526A1 (de) * 1984-11-06 1986-05-15 Walter 7036 Schönaich Bürkle Verfahren und einrichtung zum fuehlen von stroemungsgeschwindigkeiten und/oder durchfluessen
US4685331A (en) * 1985-04-10 1987-08-11 Innovus Thermal mass flowmeter and controller
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DE3606853A1 (de) * 1986-03-03 1987-09-10 Vdo Schindling Messsonde
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JPH0514505A (ja) * 1991-06-28 1993-01-22 Nippon Telegr & Teleph Corp <Ntt> 通話中着信付加装置

Also Published As

Publication number Publication date
EP0370162B1 (de) 1995-06-28
US4947889A (en) 1990-08-14
KR960003389B1 (ko) 1996-03-09
EP0370162A3 (de) 1992-03-11
JPH02141620A (ja) 1990-05-31
KR900008353A (ko) 1990-06-04
JP2789458B2 (ja) 1998-08-20
US5048332A (en) 1991-09-17
EP0370162A2 (de) 1990-05-30
DE68923249T2 (de) 1996-02-08

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8328 Change in the person/name/address of the agent

Free format text: PATENTANWAELTE MUELLER & HOFFMANN, 81667 MUENCHEN

8339 Ceased/non-payment of the annual fee