KR900005640B1 - 변위의 광학적 측정방법 및 측정장치 - Google Patents

변위의 광학적 측정방법 및 측정장치 Download PDF

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Publication number
KR900005640B1
KR900005640B1 KR1019860008627A KR860008627A KR900005640B1 KR 900005640 B1 KR900005640 B1 KR 900005640B1 KR 1019860008627 A KR1019860008627 A KR 1019860008627A KR 860008627 A KR860008627 A KR 860008627A KR 900005640 B1 KR900005640 B1 KR 900005640B1
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KR
South Korea
Prior art keywords
displacement
pulse
circuit
measurement object
output
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
KR1019860008627A
Other languages
English (en)
Korean (ko)
Other versions
KR870004292A (ko
Inventor
사다오 모리
도시오 아까쯔
쥬우이찌 미야자끼
Original Assignee
가부시기가이샤 히다찌 세이사꾸쇼
미다 가쓰시게
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 가부시기가이샤 히다찌 세이사꾸쇼, 미다 가쓰시게 filed Critical 가부시기가이샤 히다찌 세이사꾸쇼
Publication of KR870004292A publication Critical patent/KR870004292A/ko
Application granted granted Critical
Publication of KR900005640B1 publication Critical patent/KR900005640B1/ko
Expired legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
KR1019860008627A 1985-10-16 1986-10-15 변위의 광학적 측정방법 및 측정장치 Expired KR900005640B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2286616 1985-10-16
JP60228616A JPS6288902A (ja) 1985-10-16 1985-10-16 変位の光学的測定方法および測定装置
JP85-228616 1985-10-16

Publications (2)

Publication Number Publication Date
KR870004292A KR870004292A (ko) 1987-05-08
KR900005640B1 true KR900005640B1 (ko) 1990-08-01

Family

ID=16879138

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019860008627A Expired KR900005640B1 (ko) 1985-10-16 1986-10-15 변위의 광학적 측정방법 및 측정장치

Country Status (5)

Country Link
US (1) US4728194A (https=)
EP (1) EP0219127B1 (https=)
JP (1) JPS6288902A (https=)
KR (1) KR900005640B1 (https=)
DE (1) DE3679142D1 (https=)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69002503T2 (de) * 1989-03-29 1994-03-03 Canon Kk Kantendetektor.
US5304924A (en) * 1989-03-29 1994-04-19 Canon Kabushiki Kaisha Edge detector
JPH0340252A (ja) * 1989-04-19 1991-02-21 Olympus Optical Co Ltd 光磁気記録媒体の位相差測定装置
JP3531375B2 (ja) * 1996-09-03 2004-05-31 ソニー・プレシジョン・テクノロジー株式会社 変位量検出装置
US6973147B2 (en) * 2002-09-04 2005-12-06 Intel Corporation Techniques to adjust a signal sampling point
JP4055536B2 (ja) * 2002-09-30 2008-03-05 ソニー株式会社 表示装置およびその制御方法、並びに投写型表示装置
KR101112144B1 (ko) * 2009-12-30 2012-02-14 부산대학교 산학협력단 부분 반사를 이용한 간섭 시스템 및 측정 시스템
KR101112143B1 (ko) * 2011-12-21 2012-02-14 부산대학교 산학협력단 부분 반사를 이용한 측정 시스템

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7001770A (https=) * 1970-02-07 1971-08-10
US3847485A (en) * 1972-05-25 1974-11-12 Zygo Corp Optical noncontacting surface sensor for measuring distance and angle of a test surface
GB1472894A (en) * 1974-03-15 1977-05-11 Nat Res Dev Interferometric methods and apparatus for measuring distance to a surface
US4225240A (en) * 1978-06-05 1980-09-30 Balasubramanian N Method and system for determining interferometric optical path length difference
DE2851750B1 (de) * 1978-11-30 1980-03-06 Ibm Deutschland Verfahren und Vorrichtung zur Messung der Ebenheit der Rauhigkeit oder des Kruemmungsradius einer Messflaeche
JPS567006A (en) * 1979-06-22 1981-01-24 Ibm Method of extending measurement range of interference
FR2558598B1 (fr) * 1984-01-20 1986-06-20 Commissariat Energie Atomique Interferometre de vitesse a sensibilite continument variable

Also Published As

Publication number Publication date
EP0219127A3 (en) 1989-10-25
EP0219127B1 (en) 1991-05-08
US4728194A (en) 1988-03-01
JPS6288902A (ja) 1987-04-23
EP0219127A2 (en) 1987-04-22
DE3679142D1 (de) 1991-06-13
JPH0352881B2 (https=) 1991-08-13
KR870004292A (ko) 1987-05-08

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