KR900005560A - Electrode Formation Method of Thin Film Transistor - Google Patents
Electrode Formation Method of Thin Film Transistor Download PDFInfo
- Publication number
- KR900005560A KR900005560A KR1019880012855A KR880012855A KR900005560A KR 900005560 A KR900005560 A KR 900005560A KR 1019880012855 A KR1019880012855 A KR 1019880012855A KR 880012855 A KR880012855 A KR 880012855A KR 900005560 A KR900005560 A KR 900005560A
- Authority
- KR
- South Korea
- Prior art keywords
- thin film
- film transistor
- electrode
- drain
- source
- Prior art date
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- Thin Film Transistor (AREA)
Abstract
내용 없음No content
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.
제2도는 본 발명 테이퍼된 게이트전극을 사용한 박막트랜지스터에 대한 개요도.2 is a schematic diagram of a thin film transistor using the tapered gate electrode of the present invention.
제3도는 본 발명 게이트 전극의 전해에칭장치에 대한 개요도.3 is a schematic diagram of an electrolytic etching apparatus of a gate electrode of the present invention.
Claims (5)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019880012855A KR900005560A (en) | 1988-09-30 | 1988-09-30 | Electrode Formation Method of Thin Film Transistor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019880012855A KR900005560A (en) | 1988-09-30 | 1988-09-30 | Electrode Formation Method of Thin Film Transistor |
Publications (1)
Publication Number | Publication Date |
---|---|
KR900005560A true KR900005560A (en) | 1990-04-14 |
Family
ID=68158325
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019880012855A KR900005560A (en) | 1988-09-30 | 1988-09-30 | Electrode Formation Method of Thin Film Transistor |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR900005560A (en) |
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1988
- 1988-09-30 KR KR1019880012855A patent/KR900005560A/en not_active Application Discontinuation
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WITN | Withdrawal due to no request for examination |