KR900002670A - 초음파 세정(洗淨)장치 - Google Patents

초음파 세정(洗淨)장치 Download PDF

Info

Publication number
KR900002670A
KR900002670A KR1019890009632A KR890009632A KR900002670A KR 900002670 A KR900002670 A KR 900002670A KR 1019890009632 A KR1019890009632 A KR 1019890009632A KR 890009632 A KR890009632 A KR 890009632A KR 900002670 A KR900002670 A KR 900002670A
Authority
KR
South Korea
Prior art keywords
storage means
ultrasonic cleaning
substrate
ultrasonic
cleaning liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
KR1019890009632A
Other languages
English (en)
Korean (ko)
Inventor
스미오 미타니
세이조오 도지마
Original Assignee
이시다 도쿠지로오
다이닛뽕스쿠링세이소오가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 이시다 도쿠지로오, 다이닛뽕스쿠링세이소오가부시키가이샤 filed Critical 이시다 도쿠지로오
Publication of KR900002670A publication Critical patent/KR900002670A/ko
Priority to KR9206912U priority Critical patent/KR920004823Y1/ko
Withdrawn legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/22Secondary treatment of printed circuits
    • H05K3/26Cleaning or polishing of the conductive pattern

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
  • Manufacturing Of Printed Wiring (AREA)
KR1019890009632A 1988-07-15 1989-07-06 초음파 세정(洗淨)장치 Withdrawn KR900002670A (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR9206912U KR920004823Y1 (ko) 1988-07-15 1992-04-24 초음파세정(洗淨)장치

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP63-94405 1988-07-15
JP1988094405U JPH0215766U (enrdf_load_stackoverflow) 1988-07-15 1988-07-15

Related Child Applications (1)

Application Number Title Priority Date Filing Date
KR9206912U Division KR920004823Y1 (ko) 1988-07-15 1992-04-24 초음파세정(洗淨)장치

Publications (1)

Publication Number Publication Date
KR900002670A true KR900002670A (ko) 1990-02-28

Family

ID=31318928

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019890009632A Withdrawn KR900002670A (ko) 1988-07-15 1989-07-06 초음파 세정(洗淨)장치

Country Status (2)

Country Link
JP (1) JPH0215766U (enrdf_load_stackoverflow)
KR (1) KR900002670A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100864948B1 (ko) * 2007-02-01 2008-10-23 세메스 주식회사 기판 이송 장치

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4925328U (enrdf_load_stackoverflow) * 1972-06-02 1974-03-04
JPS60798A (ja) * 1982-09-30 1985-01-05 富士通株式会社 プリント基板の搬送位置決め装置
JPS6237839A (ja) * 1985-06-21 1987-02-18 アメリカン テレフオン アンド テレグラフ カムパニ− 回路非作動化装置を備えたプロテクタ
JPS62280109A (ja) * 1986-05-28 1987-12-05 Tokyo Kakoki Kk プリント基板のコンベア装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100864948B1 (ko) * 2007-02-01 2008-10-23 세메스 주식회사 기판 이송 장치

Also Published As

Publication number Publication date
JPH0215766U (enrdf_load_stackoverflow) 1990-01-31

Similar Documents

Publication Publication Date Title
EP0526245B1 (en) An automatic cleaning apparatus for wafers
KR920700787A (ko) 슬러지 침적물 제거용 가요성렌스 및 그의 구동시스템
RU94026903A (ru) Буй для использования при загрузке или выгрузке текучего материала
CA2089522A1 (en) Driving mechanism for a photographic processing apparatus
KR930701767A (ko) 사진 처리 장치
KR900002670A (ko) 초음파 세정(洗淨)장치
FR2474017A1 (fr) Epaississeur de boues, notamment de boues activees dans le traitement des eaux
NO972547D0 (no) Fremgangsmåte og apparatur for jevn spredning av gjenstander i en behandlingsopplösning
KR970003397A (ko) 기판처리장치
KR930702700A (ko) 사진 처리 장치
US1734967A (en) Mechanical removal of solids from clarification tanks, etc.
KR20120014388A (ko) 평판 물체를 수평 반송하기 위한 운반 시스템 및 이를 이용한 인라인 디핑 구축 방법
KR920004823Y1 (ko) 초음파세정(洗淨)장치
KR900019160A (ko) 반도체 웨이퍼 세정장치의 오우버플로우 탱크
RU95100380A (ru) Устройство для очистки отстойника от радиоактивных донных отложений
SU842039A1 (ru) Тонкослойный отстойник
JP3474728B2 (ja) 基板処理装置
ES8701543A1 (es) Un dispositivo de soporte para un fleje movil
US5461448A (en) Photographic processing apparatus
JP2539962B2 (ja) 流動体の均等供給装置
SU1123748A1 (ru) Устройство дл жидкостной обработки изделий типа лент
US5220934A (en) Automatic continuous processing apparatus
GB1111675A (en) A method of and plant for pickling strip material
SU1189517A1 (ru) Устройство дл очистки плоских изделий
SU1119746A1 (ru) Устройство дл очистки изделий

Legal Events

Date Code Title Description
PA0109 Patent application

Patent event code: PA01091R01D

Comment text: Patent Application

Patent event date: 19890706

A201 Request for examination
PA0201 Request for examination

Patent event code: PA02012R01D

Patent event date: 19890923

Comment text: Request for Examination of Application

Patent event code: PA02011R01I

Patent event date: 19890706

Comment text: Patent Application

PG1501 Laying open of application
E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event date: 19920227

Patent event code: PE09021S01D

PC1205 Withdrawal of application forming a basis of a converted application
WICV Withdrawal of application forming a basis of a converted application