KR890700303A - 다이나믹 전자방출기 - Google Patents

다이나믹 전자방출기

Info

Publication number
KR890700303A
KR890700303A KR1019880700816A KR880700816A KR890700303A KR 890700303 A KR890700303 A KR 890700303A KR 1019880700816 A KR1019880700816 A KR 1019880700816A KR 880700816 A KR880700816 A KR 880700816A KR 890700303 A KR890700303 A KR 890700303A
Authority
KR
South Korea
Prior art keywords
electron emitter
cathode
chamber
dynamic electron
receiving chamber
Prior art date
Application number
KR1019880700816A
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of KR890700303A publication Critical patent/KR890700303A/ko

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/077—Electron guns using discharge in gases or vapours as electron sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Amplifiers (AREA)
  • Bipolar Transistors (AREA)
  • Secondary Cells (AREA)
KR1019880700816A 1986-11-13 1988-07-13 다이나믹 전자방출기 KR890700303A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/930,245 US4739214A (en) 1986-11-13 1986-11-13 Dynamic electron emitter
PCT/US1987/002872 WO1988003742A1 (en) 1986-11-13 1987-11-05 Dynamic electron emitter

Publications (1)

Publication Number Publication Date
KR890700303A true KR890700303A (ko) 1989-03-11

Family

ID=25459090

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019880700816A KR890700303A (ko) 1986-11-13 1988-07-13 다이나믹 전자방출기

Country Status (11)

Country Link
US (1) US4739214A (ko)
EP (1) EP0289577B1 (ko)
JP (1) JPH01501353A (ko)
KR (1) KR890700303A (ko)
AT (1) ATE106176T1 (ko)
AU (1) AU589349B2 (ko)
CA (1) CA1279691C (ko)
DE (1) DE3789896D1 (ko)
IL (1) IL84447A (ko)
IN (1) IN168764B (ko)
WO (1) WO1988003742A1 (ko)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
YU46728B (sh) * 1986-10-23 1994-04-05 VUJO dr. MILJEVIĆ Jonsko-elektronski izvor sa šupljom anodom
GB8820359D0 (en) * 1988-08-26 1988-09-28 Atomic Energy Authority Uk Charged particle grid
US4985657A (en) * 1989-04-11 1991-01-15 Lk Technologies, Inc. High flux ion gun apparatus and method for enhancing ion flux therefrom
US5447763A (en) * 1990-08-17 1995-09-05 Ion Systems, Inc. Silicon ion emitter electrodes
US5365070A (en) * 1992-04-29 1994-11-15 The Regents Of The University Of California Negative ion beam injection apparatus with magnetic shield and electron removal means
US5374828A (en) * 1993-09-15 1994-12-20 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Electron reversal ionizer for detection of trace species using a spherical cathode
US5969470A (en) * 1996-11-08 1999-10-19 Veeco Instruments, Inc. Charged particle source
US5889404A (en) * 1997-08-29 1999-03-30 Hewlett-Packard Company Discharge ionization detector having efficient transfer of metastables for ionization of sample molecules
US6464891B1 (en) 1999-03-17 2002-10-15 Veeco Instruments, Inc. Method for repetitive ion beam processing with a carbon containing ion beam
US6238582B1 (en) 1999-03-30 2001-05-29 Veeco Instruments, Inc. Reactive ion beam etching method and a thin film head fabricated using the method
US7062017B1 (en) * 2000-08-15 2006-06-13 Varian Medical Syatems, Inc. Integral cathode
US7675252B2 (en) * 2005-05-23 2010-03-09 Schlumberger Technology Corporation Methods of constructing a betatron vacuum chamber and injector
US7924983B2 (en) * 2008-06-30 2011-04-12 Varian Medical Systems, Inc. Thermionic emitter designed to control electron beam current profile in two dimensions
WO2013012405A2 (en) * 2011-07-15 2013-01-24 Wayne State University Simultaneous ion sensing and gas sampling in combustion engine cylinders and other combustion systems

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1287262A (en) * 1968-09-05 1972-08-31 Atomic Energy Authority Uk Improvements in or relating to non-thermionic glow discharge devices
JPS6011417B2 (ja) * 1979-10-23 1985-03-26 株式会社東芝 ホロ−カソ−ド放電装置
FR2492587A1 (fr) * 1980-10-20 1982-04-23 V Elektrotekhnichesky Canon electronique a decharge dans un gaz avec cathode froide
US4481062A (en) * 1982-09-02 1984-11-06 Kaufman Harold R Electron bombardment ion sources
US4602161A (en) * 1985-03-04 1986-07-22 The United States Of America As Represented By The United States Department Of Energy Negative ion source with low temperature transverse divergence optical system
US4707637A (en) * 1986-03-24 1987-11-17 Hughes Aircraft Company Plasma-anode electron gun

Also Published As

Publication number Publication date
EP0289577B1 (en) 1994-05-25
IN168764B (ko) 1991-06-01
AU8270787A (en) 1988-06-01
IL84447A (en) 1991-06-10
ATE106176T1 (de) 1994-06-15
CA1279691C (en) 1991-01-29
DE3789896D1 (de) 1994-06-30
IL84447A0 (en) 1988-04-29
WO1988003742A1 (en) 1988-05-19
EP0289577A4 (en) 1991-04-24
EP0289577A1 (en) 1988-11-09
JPH01501353A (ja) 1989-05-11
AU589349B2 (en) 1989-10-05
US4739214A (en) 1988-04-19

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Legal Events

Date Code Title Description
WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid