KR890005530A - 프로우브 장치에 의한 전기특성 검사방법 - Google Patents

프로우브 장치에 의한 전기특성 검사방법

Info

Publication number
KR890005530A
KR890005530A KR1019880010828A KR880010828A KR890005530A KR 890005530 A KR890005530 A KR 890005530A KR 1019880010828 A KR1019880010828 A KR 1019880010828A KR 880010828 A KR880010828 A KR 880010828A KR 890005530 A KR890005530 A KR 890005530A
Authority
KR
South Korea
Prior art keywords
inspection method
probe device
electric property
property inspection
probe
Prior art date
Application number
KR1019880010828A
Other languages
English (en)
Other versions
KR960006869B1 (ko
Inventor
슈우지 아키야마
Original Assignee
도오교오 에레구토론 가부시끼가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 도오교오 에레구토론 가부시끼가이샤 filed Critical 도오교오 에레구토론 가부시끼가이샤
Publication of KR890005530A publication Critical patent/KR890005530A/ko
Application granted granted Critical
Publication of KR960006869B1 publication Critical patent/KR960006869B1/ko

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/265—Contactless testing
    • G01R31/2656—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Electromagnetism (AREA)
  • Toxicology (AREA)
  • General Physics & Mathematics (AREA)
  • Liquid Crystal (AREA)
KR1019880010828A 1987-09-02 1988-08-25 프로우브 장치에 의한 전기특성 검사방법 KR960006869B1 (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP62-219639 1987-09-02
JP21963987 1987-09-02

Publications (2)

Publication Number Publication Date
KR890005530A true KR890005530A (ko) 1989-05-15
KR960006869B1 KR960006869B1 (ko) 1996-05-23

Family

ID=16738679

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019880010828A KR960006869B1 (ko) 1987-09-02 1988-08-25 프로우브 장치에 의한 전기특성 검사방법

Country Status (2)

Country Link
US (1) US4899105A (ko)
KR (1) KR960006869B1 (ko)

Families Citing this family (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0833433B2 (ja) * 1987-11-30 1996-03-29 東京エレクトロン株式会社 プローブ装置
US5179345A (en) * 1989-12-13 1993-01-12 International Business Machines Corporation Method and apparatus for analog testing
JPH0417347A (ja) * 1990-05-10 1992-01-22 Tokyo Electron Ltd プローブ装置
US5285150A (en) * 1990-11-26 1994-02-08 Photon Dynamics, Inc. Method and apparatus for testing LCD panel array
US5081687A (en) 1990-11-30 1992-01-14 Photon Dynamics, Inc. Method and apparatus for testing LCD panel array prior to shorting bar removal
US5113134A (en) * 1991-02-28 1992-05-12 Thomson, S.A. Integrated test circuit for display devices such as LCD's
US5235272A (en) * 1991-06-17 1993-08-10 Photon Dynamics, Inc. Method and apparatus for automatically inspecting and repairing an active matrix LCD panel
US5175504A (en) * 1991-06-17 1992-12-29 Photon Dynamics, Inc. Method and apparatus for automatically inspecting and repairing a simple matrix circuit panel
US5432461A (en) * 1991-06-28 1995-07-11 Photon Dynamics, Inc. Method of testing active matrix liquid crystal display substrates
US5459409A (en) * 1991-09-10 1995-10-17 Photon Dynamics, Inc. Testing device for liquid crystal display base plate
US5504438A (en) * 1991-09-10 1996-04-02 Photon Dynamics, Inc. Testing method for imaging defects in a liquid crystal display substrate
US5543729A (en) * 1991-09-10 1996-08-06 Photon Dynamics, Inc. Testing apparatus and connector for liquid crystal display substrates
US5444385A (en) * 1991-09-10 1995-08-22 Photon Dynamics, Inc. Testing apparatus for liquid crystal display substrates
US5465052A (en) * 1991-09-10 1995-11-07 Photon Dynamics, Inc. Method of testing liquid crystal display substrates
US5764209A (en) * 1992-03-16 1998-06-09 Photon Dynamics, Inc. Flat panel display inspection system
US5550482A (en) * 1993-07-20 1996-08-27 Tokyo Electron Kabushiki Kaisha Probe device
US5838022A (en) * 1995-04-25 1998-11-17 Mitsubishi Denki Kabushiki Kaisha Evaluating the lifetime and reliability of a TFT in a stress test using gate voltage and temperature measurements
JP3444693B2 (ja) * 1995-04-25 2003-09-08 三菱電機株式会社 Ｔｆｔの信頼性評価方法
JP3107039B2 (ja) * 1998-03-20 2000-11-06 日本電気株式会社 面光源プローバ装置及び検査方法
US6486927B1 (en) * 1999-11-19 2002-11-26 De & T Co., Ltd. Liquid crystal display test system
US20020135395A1 (en) * 2001-02-08 2002-09-26 Pete Smith System and method for testing a display device
DE10227332A1 (de) * 2002-06-19 2004-01-15 Akt Electron Beam Technology Gmbh Ansteuervorrichtung mit verbesserten Testeneigenschaften
US6833717B1 (en) * 2004-02-12 2004-12-21 Applied Materials, Inc. Electron beam test system with integrated substrate transfer module
US7319335B2 (en) * 2004-02-12 2008-01-15 Applied Materials, Inc. Configurable prober for TFT LCD array testing
US20060038554A1 (en) * 2004-02-12 2006-02-23 Applied Materials, Inc. Electron beam test system stage
US7355418B2 (en) * 2004-02-12 2008-04-08 Applied Materials, Inc. Configurable prober for TFT LCD array test
JP4241421B2 (ja) * 2004-02-17 2009-03-18 株式会社島津製作所 液晶基板検査装置
US7075323B2 (en) * 2004-07-29 2006-07-11 Applied Materials, Inc. Large substrate test system
US7256606B2 (en) * 2004-08-03 2007-08-14 Applied Materials, Inc. Method for testing pixels for LCD TFT displays
US7535238B2 (en) * 2005-04-29 2009-05-19 Applied Materials, Inc. In-line electron beam test system
US20060273815A1 (en) * 2005-06-06 2006-12-07 Applied Materials, Inc. Substrate support with integrated prober drive
KR100960474B1 (ko) * 2005-06-20 2010-05-28 엘지디스플레이 주식회사 액정패널의 외관검사장치
KR101147120B1 (ko) * 2005-08-30 2012-05-25 엘지디스플레이 주식회사 Ｌｃｄ 검사 장비 및 ｌｃｄ 검사 방법
KR100960465B1 (ko) * 2005-12-29 2010-05-28 엘지디스플레이 주식회사 액정패널 검사장치
DE102006023968B4 (de) 2005-12-29 2009-12-10 Lg Display Co., Ltd. Inspektionsvorrichtung für Flüssigkristallanzeigepaneel
CN102353890B (zh) * 2006-03-14 2014-09-24 应用材料公司 减小多个柱状电子束测试系统中的串扰的方法
US7602199B2 (en) * 2006-05-31 2009-10-13 Applied Materials, Inc. Mini-prober for TFT-LCD testing
US7786742B2 (en) * 2006-05-31 2010-08-31 Applied Materials, Inc. Prober for electronic device testing on large area substrates
US20080251019A1 (en) * 2007-04-12 2008-10-16 Sriram Krishnaswami System and method for transferring a substrate into and out of a reduced volume chamber accommodating multiple substrates

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4309657A (en) * 1980-01-09 1982-01-05 Burroughs Corporation Apparatus for analyzing semiconductor memories
US4393348A (en) * 1981-01-26 1983-07-12 Rca Corporation Method and apparatus for determining minority carrier diffusion length in semiconductors
US4712063A (en) * 1984-05-29 1987-12-08 The United States Of America As Represented By The United States Department Of Energy Method and apparatus for measuring areas of photoelectric cells and photoelectric cell performance parameters
US4656419A (en) * 1984-09-20 1987-04-07 Hughes Aircraft Company Simplified solar cell material tester
US4728174A (en) * 1986-11-06 1988-03-01 Hughes Aircraft Company Electron beam addressed liquid crystal light valve
US4715687A (en) * 1986-12-23 1987-12-29 International Business Machines Corporation Color variation in a passively illuminated display using fluorescent light sources

Also Published As

Publication number Publication date
KR960006869B1 (ko) 1996-05-23
US4899105A (en) 1990-02-06

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E701 Decision to grant or registration of patent right
GRNT Written decision to grant
LAPS Lapse due to unpaid annual fee