KR880004140A - 결정성장방법 - Google Patents
결정성장방법 Download PDFInfo
- Publication number
- KR880004140A KR880004140A KR870010392A KR870010392A KR880004140A KR 880004140 A KR880004140 A KR 880004140A KR 870010392 A KR870010392 A KR 870010392A KR 870010392 A KR870010392 A KR 870010392A KR 880004140 A KR880004140 A KR 880004140A
- Authority
- KR
- South Korea
- Prior art keywords
- magnetic field
- solution
- crystal growth
- growth method
- container
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/20—Controlling or regulating
- C30B15/22—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/30—Mechanisms for rotating or moving either the melt or the crystal
- C30B15/305—Stirring of the melt
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
- Y10S117/917—Magnetic
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
내용 없음
Description
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본원 발명 방법의 설명을 위한 결정성장 장치의 구성도.
제2도는 본원 발명 방법을 실시하는 자장 발생수단의 전원부의 일례의 블록도.
제3도는 전류맥동율에 대한 결정결합밀도의 측정곡선도.
Claims (1)
- 결정성장 원료용액을 수용하는 용기와, 이 용기의 주위에 배설된 가열수단과, 상기 용액에 소정 방향의 자장(磁場)을 인가하는 전자석에 의한 자장발생수단과, 상기 용액에서 결정을 성장시키는 수단을 설치하고, 상기 자장발생수단에 맥동율이 5%이하의 직류 전류를 공급하여 소정 방향 자장을 인가시키면서, 상기 용액에서 결정성장을 행하는 것을 특징으로 하는 결정성장방법.※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP86-227027 | 1986-09-25 | ||
JP227027 | 1986-09-25 | ||
JP61227027A JPS6385087A (ja) | 1986-09-25 | 1986-09-25 | 結晶成長方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR880004140A true KR880004140A (ko) | 1988-06-01 |
KR970007427B1 KR970007427B1 (ko) | 1997-05-08 |
Family
ID=16854367
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019870010392A KR970007427B1 (ko) | 1986-09-25 | 1987-09-19 | 결정성장방법 |
Country Status (5)
Country | Link |
---|---|
US (1) | US4849065A (ko) |
JP (1) | JPS6385087A (ko) |
KR (1) | KR970007427B1 (ko) |
DE (1) | DE3732250C2 (ko) |
IT (1) | IT1211796B (ko) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5196085A (en) * | 1990-12-28 | 1993-03-23 | Massachusetts Institute Of Technology | Active magnetic flow control in Czochralski systems |
JP2623390B2 (ja) * | 1991-03-22 | 1997-06-25 | 信越半導体株式会社 | シリコン単結晶棒の成長方法 |
JP2567539B2 (ja) * | 1992-01-30 | 1996-12-25 | 信越半導体株式会社 | Fz法シリコン単結晶棒の成長方法及び装置 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3317819A (en) * | 1963-10-03 | 1967-05-02 | Earle C Brodie | Electronic hum and ripple filter |
US3550030A (en) * | 1968-11-29 | 1970-12-22 | Abex Corp | Transient regulation of direct current electrical power supplies |
US3551780A (en) * | 1968-12-05 | 1970-12-29 | Lambda Electronics Corp | Electronic ripple filter |
US3710148A (en) * | 1970-08-31 | 1973-01-09 | Hitachi Ltd | Ripple eliminating circuit |
US3859590A (en) * | 1973-07-30 | 1975-01-07 | Ibm | Waveform averaging rc circuit |
GB2059932B (en) * | 1979-09-20 | 1983-10-12 | Sony Corp | Solidification processes |
US4393441A (en) * | 1981-07-17 | 1983-07-12 | Enge Harald A | High voltage power supply |
JPS5850951A (ja) * | 1981-09-22 | 1983-03-25 | セイコーエプソン株式会社 | 歯列矯正用ブラケツト |
JPS6027682A (ja) * | 1983-07-26 | 1985-02-12 | Toshiba Corp | 単結晶引上装置 |
US4565671A (en) * | 1983-08-05 | 1986-01-21 | Kabushiki Kaisha Toshiba | Single crystal manufacturing apparatus |
JPS6051690A (ja) * | 1983-08-31 | 1985-03-23 | Toshiba Corp | 単結晶の製造装置 |
JPS60180990A (ja) * | 1984-02-24 | 1985-09-14 | Sumitomo Metal Ind Ltd | 結晶成長方法 |
JPS60155595A (ja) * | 1984-08-06 | 1985-08-15 | Sony Corp | 結晶の成長方法 |
-
1986
- 1986-09-25 JP JP61227027A patent/JPS6385087A/ja active Granted
-
1987
- 1987-09-19 KR KR1019870010392A patent/KR970007427B1/ko not_active IP Right Cessation
- 1987-09-23 IT IT8748412A patent/IT1211796B/it active
- 1987-09-24 DE DE3732250A patent/DE3732250C2/de not_active Expired - Lifetime
- 1987-09-25 US US07/100,969 patent/US4849065A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE3732250C2 (de) | 1997-08-07 |
KR970007427B1 (ko) | 1997-05-08 |
JPS6385087A (ja) | 1988-04-15 |
JPH0559875B2 (ko) | 1993-09-01 |
US4849065A (en) | 1989-07-18 |
IT1211796B (it) | 1989-11-03 |
DE3732250A1 (de) | 1988-03-31 |
IT8748412A0 (it) | 1987-09-23 |
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