JPS5274578A - Liquid phase crystal growth apparatus - Google Patents
Liquid phase crystal growth apparatusInfo
- Publication number
- JPS5274578A JPS5274578A JP50150593A JP15059375A JPS5274578A JP S5274578 A JPS5274578 A JP S5274578A JP 50150593 A JP50150593 A JP 50150593A JP 15059375 A JP15059375 A JP 15059375A JP S5274578 A JPS5274578 A JP S5274578A
- Authority
- JP
- Japan
- Prior art keywords
- crystal growth
- liquid phase
- growth apparatus
- phase crystal
- boat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Abstract
PURPOSE:To grow the crystal in uniform thickness, by giving the temperature gradient to the axis direction of the vertical type cylindrical boat and taking off the influenc of temperture gradient to the radium axis of the above boat, at the time of using the vertical boat type crystal growth furnace, having the plural solution vessel.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50150593A JPS5274578A (en) | 1975-12-19 | 1975-12-19 | Liquid phase crystal growth apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50150593A JPS5274578A (en) | 1975-12-19 | 1975-12-19 | Liquid phase crystal growth apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5274578A true JPS5274578A (en) | 1977-06-22 |
JPS5318467B2 JPS5318467B2 (en) | 1978-06-15 |
Family
ID=15500262
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50150593A Granted JPS5274578A (en) | 1975-12-19 | 1975-12-19 | Liquid phase crystal growth apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5274578A (en) |
-
1975
- 1975-12-19 JP JP50150593A patent/JPS5274578A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5318467B2 (en) | 1978-06-15 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |