JPS5274578A - Liquid phase crystal growth apparatus - Google Patents

Liquid phase crystal growth apparatus

Info

Publication number
JPS5274578A
JPS5274578A JP50150593A JP15059375A JPS5274578A JP S5274578 A JPS5274578 A JP S5274578A JP 50150593 A JP50150593 A JP 50150593A JP 15059375 A JP15059375 A JP 15059375A JP S5274578 A JPS5274578 A JP S5274578A
Authority
JP
Japan
Prior art keywords
crystal growth
liquid phase
growth apparatus
phase crystal
boat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP50150593A
Other languages
Japanese (ja)
Other versions
JPS5318467B2 (en
Inventor
Haruki Kurihara
Motoyuki Yamamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP50150593A priority Critical patent/JPS5274578A/en
Publication of JPS5274578A publication Critical patent/JPS5274578A/en
Publication of JPS5318467B2 publication Critical patent/JPS5318467B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Abstract

PURPOSE:To grow the crystal in uniform thickness, by giving the temperature gradient to the axis direction of the vertical type cylindrical boat and taking off the influenc of temperture gradient to the radium axis of the above boat, at the time of using the vertical boat type crystal growth furnace, having the plural solution vessel.
JP50150593A 1975-12-19 1975-12-19 Liquid phase crystal growth apparatus Granted JPS5274578A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50150593A JPS5274578A (en) 1975-12-19 1975-12-19 Liquid phase crystal growth apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50150593A JPS5274578A (en) 1975-12-19 1975-12-19 Liquid phase crystal growth apparatus

Publications (2)

Publication Number Publication Date
JPS5274578A true JPS5274578A (en) 1977-06-22
JPS5318467B2 JPS5318467B2 (en) 1978-06-15

Family

ID=15500262

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50150593A Granted JPS5274578A (en) 1975-12-19 1975-12-19 Liquid phase crystal growth apparatus

Country Status (1)

Country Link
JP (1) JPS5274578A (en)

Also Published As

Publication number Publication date
JPS5318467B2 (en) 1978-06-15

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Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees