KR880002247A - Manufacturing method of thin film EL display device - Google Patents

Manufacturing method of thin film EL display device Download PDF

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Publication number
KR880002247A
KR880002247A KR1019860005770A KR860005770A KR880002247A KR 880002247 A KR880002247 A KR 880002247A KR 1019860005770 A KR1019860005770 A KR 1019860005770A KR 860005770 A KR860005770 A KR 860005770A KR 880002247 A KR880002247 A KR 880002247A
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KR
South Korea
Prior art keywords
layer
insulating layer
manufacturing
transparent electrode
display device
Prior art date
Application number
KR1019860005770A
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Korean (ko)
Inventor
류재화
Original Assignee
구자학
주식회사 금성사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 구자학, 주식회사 금성사 filed Critical 구자학
Priority to KR1019860005770A priority Critical patent/KR880002247A/en
Publication of KR880002247A publication Critical patent/KR880002247A/en

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Abstract

내용 없음No content

Description

박막 EL 표시 장치의 제조방법Manufacturing method of thin film EL display device

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.

제1도는 본 발명 방법에 의한 박막 EL 표시장치의 구조를 나타낸 단면도.1 is a cross-sectional view showing the structure of a thin film EL display device according to the method of the present invention.

제2도는 제1도의 A부분 확대단면도.2 is an enlarged cross-sectional view of portion A of FIG.

제3도는 가는 종래 박막 EL 표시장치의 단면도.3 is a cross-sectional view of a thin conventional thin film EL display device.

나는 제3도 가의 B부분의 확대단면도.I am an enlarged sectional view of part B of the third road.

Claims (1)

유리기판(1)위에 투명전극(2)을 소정패턴으로 광식각법으로 에칭 형성하고 그위에 1차절연층(3)을 3000Å정도로 스파터링하여 형성하며, 그위에 망간을 도핑한 황화아연으로된 형광층(4)을 6000Å진공 증착한후 그 위에 2차절연층(5)을 형성한 다음 그위에 투명전극(2)에 직교되는 방향으로 알루미늄으로 배면전극(6)을 형성하는 박막 EL표시 장치의 제조방법에 있어서, 형광층(4)위에 Y₂O₃로 1000Å 이하의 보조절연층(5-1)을 형성하고 그 위에 2차보조절연층(5-2)을 Bata2O6로서 2000Å두께로 스파터링법으로 형성한 다음 상기 투명전극(2)의 패턴으로 다시 Bata2O6의 절연막을 형성하고, 그 위에 알루미늄이나 Al-Ni로 배면금속전극층(6)을 형성하여 된 박막 EL 표시장치의 제조방법.The transparent electrode 2 was etched on the glass substrate 1 in a predetermined pattern by photolithography, and the primary insulating layer 3 was sputtered at about 3000 mW thereon, and the fluorescent sulfide made of zinc sulfide doped with manganese thereon. After vacuum deposition of the layer 4, the secondary insulating layer 5 is formed thereon, and the back electrode 6 is formed of aluminum in a direction orthogonal to the transparent electrode 2 thereon. In the manufacturing method, an auxiliary insulating layer (5-1) of 1000 Å or less is formed on the fluorescent layer (4) with Y2O3 or less, and the secondary auxiliary insulating layer (5-2) is sputtered to a thickness of 2000 로서 as Bata 2 O 6 thereon And forming an insulating film of Bata 2 O 6 again with a pattern of the transparent electrode 2, and forming a back metal electrode layer 6 with aluminum or Al-Ni thereon. . ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019860005770A 1986-07-16 1986-07-16 Manufacturing method of thin film EL display device KR880002247A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019860005770A KR880002247A (en) 1986-07-16 1986-07-16 Manufacturing method of thin film EL display device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019860005770A KR880002247A (en) 1986-07-16 1986-07-16 Manufacturing method of thin film EL display device

Publications (1)

Publication Number Publication Date
KR880002247A true KR880002247A (en) 1988-04-30

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Application Number Title Priority Date Filing Date
KR1019860005770A KR880002247A (en) 1986-07-16 1986-07-16 Manufacturing method of thin film EL display device

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KR (1) KR880002247A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20040013503A (en) * 2002-08-07 2004-02-14 주식회사 지에이코리아테크 Electroluminescence device with high luminescence

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20040013503A (en) * 2002-08-07 2004-02-14 주식회사 지에이코리아테크 Electroluminescence device with high luminescence

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