KR930014748A - Field emission display with improved cathode and method of manufacturing the same - Google Patents

Field emission display with improved cathode and method of manufacturing the same Download PDF

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Publication number
KR930014748A
KR930014748A KR1019910025228A KR910025228A KR930014748A KR 930014748 A KR930014748 A KR 930014748A KR 1019910025228 A KR1019910025228 A KR 1019910025228A KR 910025228 A KR910025228 A KR 910025228A KR 930014748 A KR930014748 A KR 930014748A
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KR
South Korea
Prior art keywords
cathode
field emission
emission display
layer
photoresist
Prior art date
Application number
KR1019910025228A
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Korean (ko)
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KR940005883B1 (en
Inventor
이강옥
Original Assignee
김정배
삼성전관 주식회사
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Application filed by 김정배, 삼성전관 주식회사 filed Critical 김정배
Priority to KR1019910025228A priority Critical patent/KR940005883B1/en
Publication of KR930014748A publication Critical patent/KR930014748A/en
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Publication of KR940005883B1 publication Critical patent/KR940005883B1/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J31/00—Cathode ray tubes; Electron beam tubes
    • H01J31/08—Cathode ray tubes; Electron beam tubes having a screen on or from which an image or pattern is formed, picked up, converted, or stored
    • H01J31/10—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes
    • H01J31/12—Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes with luminescent screen

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  • Cold Cathode And The Manufacture (AREA)

Abstract

내용 없음No content

Description

개선된 음극을 갖는 필드에미션디스플레이와 그 제조방법Field emission display with improved cathode and method of manufacturing the same

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음As this is a public information case, the full text was not included.

제 1 도는 본 발명에 관련된 필드에미션디스플레이의 구조를 도시하는 단면도.1 is a cross-sectional view showing the structure of a field emission display according to the present invention.

제 2 도는 본 발명에 관련된 필드에미션디스플레이의 제조공정도.2 is a manufacturing process diagram of a field emission display according to the present invention.

제 3 도는 종래의 필드에미션디스플레이에 적용된 캐소우드의 구조를 도시하는 단면도.3 is a cross-sectional view showing the structure of a cathode applied to a conventional field emission display.

제 4 도는 제 3 도 캐소우드의 제조방법을 설명하는 공정도.4 is a process diagram illustrating a manufacturing method of FIG. 3 cathode.

* 도면의 주요부분에 대한 부호의 설명* Explanation of symbols for main parts of the drawings

2 : 하측글라스 4 : 형광체2: lower glass 4: phosphor

5 : 도전막 7 : 절연층5: conductive film 7: insulating layer

8 : 게이트전극층 11 : 포토레지스트층8 gate electrode layer 11 photoresist layer

60 : 원통상음극 61 : 오목홈60: cylindrical cathode 61: concave groove

62 : 첨예부 M : 마스크62: Sharpener M: Mask

P : 소정반경P: predetermined radius

Claims (2)

애노오드전극을 보유하는 상측글라스와 캐소오드전극을 보유하는 하측글라스를 상호 중첩시킨 구성으로 된 필드에미션디스플레이에 있어서, 상기 하측글라스(2)의 상면에 적층된 도전막(5)의 상면에서 상기 상측글라스(2)의 형광체(4)에 대향하는 위치로 배치되는 음극이 실질적으로 원통상음극(60)이고 그 상면에 오목홈(61)이 형성되어 외주 가장자리 전체가 전자방출이 가능한 첨예부(62)로 되어 있음을 특징으로 하는 개선된 음극을 갖는 필드에미션 디스플레이.In a field emission display having a structure in which an upper glass having an anode electrode and a lower glass having a cathode electrode are superimposed on each other, in the upper surface of the conductive film 5 laminated on the upper surface of the lower glass 2 The cathode disposed at the position opposite to the phosphor 4 of the upper glass 2 is substantially a cylindrical cathode 60, and a concave groove 61 is formed on the upper surface thereof so that the entire outer circumferential edge thereof can emit electrons. Field emission display having an improved cathode, characterized in that (62). 애노오드전극을 보유하는 상측글라스와 캐소오드전극을 보유하는 하측글라스를 상호 중첩시킨 구성으로 된 필드에미션디스플레이에 있어서, 하측글라스(2)상에 도전막(5)을 적층하고, 그 위로 절연층(7)을 적층한 다음, 이 절연층(7)의 상면에 포토레지스트층(11)을 도포하고 마스크(M)를 개재하여 소정부위를 노광 식각하고, 다시 절연층(7)에서 포토레지스트층(11)이 제거된 부분을 실리카에칭법으로 식각하여 음극이 배치될 수 있는 공간이 형성되게 한 다음, 상기 절연층(7)의 상면에 피복된 포토레지스트층(11)을 제거하고 여기에 게이트전극층(8)을 증착 형성하고, 상기 절연층(7)에 형성된 공간으로 포토레지스트층(11)을 동일두께로 도포하여 소정반경(P)에 해당되는 범위를 에칭 제거한 후, 음극(60)을 증착하고 이어서 상기 포토레지스트(11)을 제거하고, 음극(60)의 상면을 에칭하여 오목홈(61)이 형성되게 함을 특징으로 하는 개선된 음극을 갖는 필드에미션디스플레이제조방법.In a field emission display having a structure in which an upper glass having an anode electrode and a lower glass having a cathode electrode are superimposed on each other, a conductive film 5 is laminated on the lower glass 2 and insulated thereover. After laminating the layer 7, the photoresist layer 11 is applied on the upper surface of the insulating layer 7, and a predetermined portion is exposed and etched through the mask M, and the photoresist is again formed on the insulating layer 7. The portion from which the layer 11 is removed is etched by silica etching to form a space where a cathode can be disposed, and then the photoresist layer 11 coated on the upper surface of the insulating layer 7 is removed and After depositing and forming the gate electrode layer 8, the photoresist layer 11 is applied to the space formed in the insulating layer 7 to the same thickness, and the etching range of the predetermined radius P is etched away, and then the cathode 60 is removed. Is deposited and then the photoresist 11 is removed, A method for manufacturing a field emission display having an improved cathode, characterized in that the top surface of the cathode (60) is etched to form a recess (61). ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019910025228A 1991-12-30 1991-12-30 Field emission display device having improved cathode KR940005883B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1019910025228A KR940005883B1 (en) 1991-12-30 1991-12-30 Field emission display device having improved cathode

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1019910025228A KR940005883B1 (en) 1991-12-30 1991-12-30 Field emission display device having improved cathode

Publications (2)

Publication Number Publication Date
KR930014748A true KR930014748A (en) 1993-07-23
KR940005883B1 KR940005883B1 (en) 1994-06-24

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ID=19326747

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019910025228A KR940005883B1 (en) 1991-12-30 1991-12-30 Field emission display device having improved cathode

Country Status (1)

Country Link
KR (1) KR940005883B1 (en)

Also Published As

Publication number Publication date
KR940005883B1 (en) 1994-06-24

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