KR870011453A - 열식 유량계 - Google Patents

열식 유량계 Download PDF

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Publication number
KR870011453A
KR870011453A KR870005288A KR870005288A KR870011453A KR 870011453 A KR870011453 A KR 870011453A KR 870005288 A KR870005288 A KR 870005288A KR 870005288 A KR870005288 A KR 870005288A KR 870011453 A KR870011453 A KR 870011453A
Authority
KR
South Korea
Prior art keywords
pair
flow meter
thermal flow
support protrusions
conduit
Prior art date
Application number
KR870005288A
Other languages
English (en)
Other versions
KR940000140B1 (ko
Inventor
기요하루 쓰지무라
오사무 아께베
기요시 사또오
Original Assignee
호리바 마사오
가부시끼가이샤 에스텍
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 호리바 마사오, 가부시끼가이샤 에스텍 filed Critical 호리바 마사오
Publication of KR870011453A publication Critical patent/KR870011453A/ko
Application granted granted Critical
Publication of KR940000140B1 publication Critical patent/KR940000140B1/ko

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct

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  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Volume Flow (AREA)

Abstract

내용 없음

Description

열식 유량계
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도 내지 제3도는 본 발명의 1실시예를 표시하며,
제1도는 한편의 블록체를 떼어낸 상태의 사시도,
제3도는 센서 코일의 감아설치한 상태를 표시한 단면도,
제5도는 종래기술을 설명하기 위한 단면도.

Claims (4)

  1. 내부에 유체가 흐르는 도관의 외부 둘레면에 한쌍의 센서코일을 감아설치한 열식유량계에 있어서, 열전도성의 재질로 구성된 2개의 블록체에 의하여 센서 케이스를 형성하여 상기 블록체의 적어도 한 쪽의 내면에, 상기 센서 코일의 양끝에 근접하여 한쌍의 지지돌기체를 상기 블록체와 일체적으로 형성하여, 상기 도관을 상기 지지돌기체에 의하여 지지하도록한 것을 특징으로 하는 열식 유량계.
  2. 제1항에 있어서, 한쌍의 지지돌기체가 서로 교락부를 통하여 결합되어 있는 것을 특징으로 하는 열식 유량계.
  3. 제1항에 있어서, 센서 코일이 한쌍의 지지돌기체간에 있어서 도관에 타층구조에 감아 설치된 것을 특징으로 하는 열식 유량계.
  4. 제1항에 있어서, 복수의 도전부를 가지는 리이드대를 블록체내에 설치, 상기 도전부를 통하여 센서 코일의 외부의 리이드선에 접속하도록 한 것을 특징으로 하는 열식 유량계.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019870005288A 1986-05-27 1987-05-27 열식 유량계 KR940000140B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP61121877A JPH0676897B2 (ja) 1986-05-27 1986-05-27 熱式流量計
JP61-121877 1986-05-27
JP121877 1986-05-27

Publications (2)

Publication Number Publication Date
KR870011453A true KR870011453A (ko) 1987-12-23
KR940000140B1 KR940000140B1 (ko) 1994-01-07

Family

ID=14822133

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1019870005288A KR940000140B1 (ko) 1986-05-27 1987-05-27 열식 유량계

Country Status (3)

Country Link
US (1) US4815280A (ko)
JP (1) JPH0676897B2 (ko)
KR (1) KR940000140B1 (ko)

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WO1992020006A2 (en) * 1991-04-26 1992-11-12 Unit Instruments, Inc. Thermal mass flow sensor
JP2643665B2 (ja) * 1991-06-13 1997-08-20 日本エム・ケー・エス 株式会社 流量センサ
DE4219551C2 (de) * 1991-06-13 1996-04-18 Mks Japan Inc Massenströmungssensor
US5792952A (en) * 1996-05-23 1998-08-11 Varian Associates, Inc. Fluid thermal mass flow sensor
DE19719010C2 (de) * 1996-05-24 2003-04-30 Ifm Electronic Gmbh Wärmeübergangskontroll- und/oder -meßgerät
US5992463A (en) 1996-10-30 1999-11-30 Unit Instruments, Inc. Gas panel
US6244293B1 (en) 1997-07-15 2001-06-12 Faramarz Azima Fluid mass flow controller device and method
US6125695A (en) * 1997-10-13 2000-10-03 Teledyne Brown Engineering, Inc. Method and apparatus for measuring a fluid
AU1098899A (en) * 1997-10-17 1999-05-10 Faramarz Frank Azima Mass flow controller and related methods
US6062077A (en) * 1997-10-17 2000-05-16 Azima; Faramarz Techniques for making and using a sensing assembly for a mass flow controller
US6411192B1 (en) * 1998-12-28 2002-06-25 Lansense, Llc Method and apparatus for sensing and measuring plural physical properties, including temperature
JP2003523507A (ja) 2000-02-14 2003-08-05 ユニット・インストゥルメンツ・インコーポレーテッド 抵抗値を平衡させる方法および装置
NL1014797C2 (nl) * 2000-03-30 2001-10-02 Berkin Bv Massadebietmeter.
KR20050047079A (ko) * 2002-07-19 2005-05-19 셀레리티 그룹 아이엔씨 공용 기준 레그를 갖는 가변 저항기 센서
KR100735753B1 (ko) 2005-10-04 2007-07-06 삼성전자주식회사 공유된 비트라인을 갖는 플래쉬 메모리 소자 및 그의제조방법
NL1032007C2 (nl) * 2006-06-14 2007-12-17 Berkin Bv Stromingssensor van het thermische type.
JP4805091B2 (ja) * 2006-10-24 2011-11-02 株式会社堀場エステック 熱式質量流量センサ及びマスフローコントローラ
US7469583B2 (en) * 2007-02-21 2008-12-30 Mks Japan, Inc. Flow sensor
US8307854B1 (en) 2009-05-14 2012-11-13 Vistadeltek, Inc. Fluid delivery substrates for building removable standard fluid delivery sticks
KR101779849B1 (ko) * 2009-06-10 2017-10-10 비스타델텍, 엘엘씨 극 유량 및/또는 고온 유체 전달 기판
US20110232588A1 (en) * 2010-03-26 2011-09-29 Msp Corporation Integrated system for vapor generation and thin film deposition
US10274353B2 (en) * 2017-03-22 2019-04-30 A. O. Smith Corporation Flow sensor with hot film anemometer
WO2018180387A1 (ja) * 2017-03-30 2018-10-04 株式会社フジキン 質量流量センサ、その質量流量センサを備えるマスフローメータ及びその質量流量センサを備えるマスフローコントローラ
US11262226B2 (en) 2020-02-17 2022-03-01 GWU Design Hybrid mass flow sensor including a thermal and coriolis principle measurement arrangements
NL2026167B1 (en) 2020-07-30 2022-04-08 Berkin Bv Thermal-type flow sensor with a thermally conductive frame element in the form of a printed circuit board (PCB)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2594618A (en) * 1945-08-11 1952-04-29 Atomic Energy Commission Thermal flowmeter
BE475239A (ko) * 1946-05-21 1900-01-01
GB1352175A (en) * 1971-06-09 1974-05-08 Perkin Elmer Ltd Electrical flowmeters
JPS5988622A (ja) * 1982-11-12 1984-05-22 Ohkura Electric Co Ltd 熱式質量流量計
US4548075A (en) * 1984-02-02 1985-10-22 Dresser Industries, Inc. Fast responsive flowmeter transducer
JP3065841B2 (ja) * 1993-03-09 2000-07-17 株式会社日立製作所 鉄鋼材の熱間圧延設備
JPH06262220A (ja) * 1993-03-12 1994-09-20 Sumitomo Metal Ind Ltd 熱間継目無管製造用マンドレルバー

Also Published As

Publication number Publication date
KR940000140B1 (ko) 1994-01-07
US4815280A (en) 1989-03-28
JPS62278411A (ja) 1987-12-03
JPH0676897B2 (ja) 1994-09-28

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