KR870008184A - 액중 이물류의 계측시스템 - Google Patents

액중 이물류의 계측시스템 Download PDF

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Publication number
KR870008184A
KR870008184A KR870001282A KR870001282A KR870008184A KR 870008184 A KR870008184 A KR 870008184A KR 870001282 A KR870001282 A KR 870001282A KR 870001282 A KR870001282 A KR 870001282A KR 870008184 A KR870008184 A KR 870008184A
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South Korea
Prior art keywords
vacuum
degassing
test liquid
foreign matters
vacuum degassing
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KR870001282A
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English (en)
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KR900001575B1 (ko
Inventor
마사요시 에자와
시게루 와카나
아키라 미스미
요시후미 토미타
유타카 히라츠카
Original Assignee
미따 가쯔시게
가부시기가이샤 히다찌세이사구쇼
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Priority claimed from JP61030813A external-priority patent/JPS62190440A/ja
Priority claimed from JP61030812A external-priority patent/JPS62190439A/ja
Priority claimed from JP61030811A external-priority patent/JPH0760148B2/ja
Application filed by 미따 가쯔시게, 가부시기가이샤 히다찌세이사구쇼 filed Critical 미따 가쯔시게
Publication of KR870008184A publication Critical patent/KR870008184A/ko
Application granted granted Critical
Publication of KR900001575B1 publication Critical patent/KR900001575B1/ko

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/06—Investigating concentration of particle suspensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N2015/0042—Investigating dispersion of solids
    • G01N2015/0053—Investigating dispersion of solids in liquids, e.g. trouble
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/03—Cuvette constructions
    • G01N21/05—Flow-through cuvettes
    • G01N2021/054—Bubble trap; Debubbling
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/85—Investigating moving fluids or granular solids

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  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Dispersion Chemistry (AREA)
  • Acoustics & Sound (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)

Abstract

내용 없음

Description

액중 이물류의 계측시스템
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음

Claims (9)

  1. 입자직경 및 수량 등이 다른 각종 이물류를 함유하는 피검액과 상기 입자직경 및 수량등의 미리 알고 있는 양을 함유하는 고정용 표준액을 제조하는 샘플링 수단과, 상기 피검액과 교정용 표준액속에 함유하는 혼합기체를 탈기하는 진공탈수기수단과, 상기 탈기된 양액속에 함유하는 이물을 검지하는 이물계측 수단을 구비한 것을 특징으로 하는 액중 이물류의 계측시스템.
  2. 제 1 항에 있어서,
    상기 각 진공탈기 수단은 유기막진공탈기장치, 진공스프레이탈기장치 또는 진공챔버와 진공디바이스가 결합된 장치중 하나로 이루어진 것을 특징으로 하는 액중 이물류의 계측시스템.
  3. 제 2 항에 있어서,
    상기 각 진공탈기수단은 20-1000ml/분의 유속으로 송액되는 피검액속의 혼합가스 1-100ppm을 탈기하는 것을 특징으로 하는 액중 이물류의 계측시스템..
  4. 입자직경 및 수량 등이 다른 각종 이물류를 함유하는 피검액과 상기 입자직경 및 수량 등의 이미 알고 있는 양을 함유하는 고정용 표준액을 제조하는 샘플링 수단과, 상기 피검액내에 함유된 이물류를 계측하는 이물계측수단과, 상기 피검액내에 함유된 무기이온을 계측하는 무기이온계측수단과, 상기 이물계측수단의 센서부 앞단에 각각 배설된 진공탈기수단을 구비한 것을 특징으로 하는 액중 이물류의 계측시스템.
  5. 제 4 항에 있어서,
    상기 각 진공탈기수단은 유기막진공탈기수단, 진공스프레이탈기장치 또는 진공챔버와 진공디바이스가 결합된 장치중 하나로 이루어진 것을 특징으로 하는 액중 이물류의 계측시스템.
  6. 제 5 항에 있어서,
    상기 각 진공탈기수단은 20-1000ml/분의 유속으로 송액되는 피검액속의 혼합가스 1-100ppm을 탈기하는 것을 특징으로 하는 액중 이물류의 계측시스템.
  7. 입자직경 및 수량등이 다른 각종 이물류를 함유하는 피검액과 상기 입자직경수량 등의 이미 알고 있는 양을 함유하는 고정용 표준용액을 제조하는 샘플링수단과 상기 피검액내에 함유된 이물류를 검지하는 이물계측수단과, 상기 피검액내에 함유된 무기이온을 계측하는 무기이온계측수단과, 상기 피검액내의 피검처리체로부터 이물류의 분리를 촉진하는 초음파 발생장치와, 상기 계측수단의 센서부 앞단에 각각 배설된 진공탈기수단을 구비한 것을 특징으로 하는 액중 이물류의 계측시스템.
  8. 제 7 항에 있어서,
    상기 각 진공탈기수단은 유기막진공탈기장치, 진공스프레이탈기장치 또는 진공챔버와 진공디바이스가 결합된 장치중 하나로 이류어진 것을 특징으로 하는 액중이물류의 계측시스템.
  9. 제 8 항에 있어서,
    상기 각 진공탈기 수단은 20-1000ml/분의 유속으로 송액되는 피검액속의 혼합가스 1-100ppm을 탈기하는 것을 특징으로 하는 액중 이물류의 계측시스템.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019870001282A 1986-02-17 1987-02-17 액중 이물류의 계측방법 KR900001575B1 (ko)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP30811 1986-02-17
JP61030813A JPS62190440A (ja) 1986-02-17 1986-02-17 液中異物および無機イオンの計測システム
JP30812 1986-02-17
JP61030812A JPS62190439A (ja) 1986-02-17 1986-02-17 液中異物および無機イオンの計測システム
JP30813 1986-02-17
JP61030811A JPH0760148B2 (ja) 1986-02-17 1986-02-17 電子部品の洗浄効果評価方法

Publications (2)

Publication Number Publication Date
KR870008184A true KR870008184A (ko) 1987-09-24
KR900001575B1 KR900001575B1 (ko) 1990-03-15

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US (1) US4779451A (ko)
KR (1) KR900001575B1 (ko)

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US6076392A (en) * 1997-08-18 2000-06-20 Metasensors, Inc. Method and apparatus for real time gas analysis
US6393895B1 (en) 1997-10-08 2002-05-28 Symyx Technologies, Inc. Method and apparatus for characterizing materials by using a mechanical resonator
US6494079B1 (en) 2001-03-07 2002-12-17 Symyx Technologies, Inc. Method and apparatus for characterizing materials by using a mechanical resonator
JPH11316185A (ja) * 1998-02-18 1999-11-16 Horiba Ltd 液中微粒子測定システム
US6864092B1 (en) 1998-08-13 2005-03-08 Symyx Technologies, Inc. Parallel reactor with internal sensing and method of using same
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US4779451A (en) 1988-10-25
KR900001575B1 (ko) 1990-03-15

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