KR830006463A - Surface treatment method of metal by glow discharge - Google Patents

Surface treatment method of metal by glow discharge Download PDF

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Publication number
KR830006463A
KR830006463A KR1019810002591A KR810002591A KR830006463A KR 830006463 A KR830006463 A KR 830006463A KR 1019810002591 A KR1019810002591 A KR 1019810002591A KR 810002591 A KR810002591 A KR 810002591A KR 830006463 A KR830006463 A KR 830006463A
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KR
South Korea
Prior art keywords
surface treatment
glow discharge
metal
discharge according
metals
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Application number
KR1019810002591A
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Korean (ko)
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KR890001031B1 (en
Inventor
가즈요시 데라가도
나오다쓰 아사히
시즈까 야마구찌
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미다 가쓰시게
가부시기가이샤 히다찌세이사꾸쇼
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Publication of KR830006463A publication Critical patent/KR830006463A/en
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Publication of KR890001031B1 publication Critical patent/KR890001031B1/en

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    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/06—Surface hardening
    • C21D1/09—Surface hardening by direct application of electrical or wave energy; by particle radiation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
    • C—CHEMISTRY; METALLURGY
    • C21—METALLURGY OF IRON
    • C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00—General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/06—Surface hardening

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)

Abstract

내용 없음No content

Description

글로우방전에 의한 금속의 표면 처리방법Surface treatment method of metal by glow discharge

본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음Since this is an open matter, no full text was included.

제1도는 본원 발명의 이온 표면처리법을 실시하는데 사용된 장치의 구성도.1 is a block diagram of an apparatus used to implement the ion surface treatment method of the present invention.

제2도는 피처리물질의 일례를 나타낸 단면도.2 is a cross-sectional view showing an example of a substance to be processed.

제3도는 본원 발명의 처리의 일례를 나타내는 공정도.3 is a process chart showing an example of the treatment of the present invention.

제4도는 본원 발명의 처리법에 의하여 처리된 침탄층의 단면의 탄소농도 및 경도를 나타낸 도표.Figure 4 is a chart showing the carbon concentration and hardness of the cross section of the carburized layer treated by the treatment method of the present invention.

* 도면의 주요부분에 대한 부호의 설명* Explanation of symbols for main parts of the drawings

1 : 노체(爐體) 2 : 피처리물1: furnace body 2: object to be processed

3 :직류전원 4 : 양극단자3: DC power supply 4: Positive terminal

5 : 음극단자 6 : 처리용 가스봄베5: cathode terminal 6: gas cylinder for treatment

7 : 가스도입구 8 :가스배출구7: gas inlet 8: gas outlet

9 : 진공배기장치 10 : 진공 계단자9: vacuum exhaust device 10: vacuum staircase

11 : 광고온계 12 : 제어반11: advertising thermometer 12: control panel

20 : 보조전극20: auxiliary electrode

Claims (6)

도면에 표시하고 본문에 상술한 바와 같이, 감압 분위기중에서 피처리물을 음극으로 하고, 상기 피처리물의 소정부분에 보조전극을 배설하여, 상기 음극과 보조전극 사이에 글로우방전을 발생시켜 피처리물의 표면처리를 행하는 방법에 있어서, 상기 피처리물에 처리물질을 침투시켜 합금화 시키는 단계(step)와, 합금화된 처리물질을 피처리물의 내부로 확산시키는 단계를 포함하는 것을 특징으로 하는 글로우방전에 의한 금속의 표면처리 방법.As shown in the figure and described above in the main text, the object to be treated is a negative electrode in a reduced pressure atmosphere, and an auxiliary electrode is disposed in a predetermined portion of the object, and a glow discharge is generated between the negative electrode and the auxiliary electrode to produce a target object. A method of performing a surface treatment, comprising: injecting a material into an object to be treated and alloying the same, and diffusing the alloyed material into the object. Method of surface treatment of metals. 감압 분위기중의 압력을 변화시켜, 각각 합금화 시키는 단계와 확산시키는 단계를 얻는 것을 특징으로 하는 특허청구의 범위 1기재의 글로우방전에 의한 금속의 표면처리 방법.A method for surface treatment of metals by glow discharge according to claim 1, characterized by varying the pressure in a reduced pressure atmosphere to obtain alloying and diffusing. 압력을 0.1∼10토르(Torr)의 범위내에서 변화시키는 것을 특징으로 하는 특허청구의 범위 2기재의 글로우방전에 의한 금속의 표면처리 방법.A method for surface treatment of metals by glow discharge according to claim 2, characterized in that the pressure is changed within the range of 0.1 to 10 Torr. 압력 변화를 반복하여, 합금화의 단계를 교대로 반복하는 것을 특징으로 하는 특허청구의 범위 3기재의 글로우방전에 의한 금속의 표면처리 방법.Method for surface treatment of metal by glow discharge according to claim 3, characterized in that the pressure change is repeated, and the step of alloying is repeated alternately. 감압 분위기는 질소 및 탄화수소의 그루우프 최소한 1종과, 수소, 아르곤 및 헬륨 가스의 그루우프 최소한 1종으로 이루어지는 것을 특징으로 하는 특허청구의 범위 1,2,3 또는 4기재의 글로우방전에 의한 금속의 표면처리 방법.The reduced pressure atmosphere comprises at least one group of nitrogen and hydrocarbon groupings and at least one group of hydrogen, argon and helium gases. Surface treatment method. 보조전극을 피처리물의 소정부분에 0.5∼500mm의 거리로 근접하여 배치되는 것을 특징으로 하는 특허청구의 범위 1,2,3 또는 4기재의 글로우방전에 의한 금속의 표면처리 방법.A method for surface treatment of metal by glow discharge according to claims 1,2,3 or 4, characterized in that the auxiliary electrode is disposed close to a predetermined portion of the workpiece at a distance of 0.5 to 500 mm. ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.※ Note: The disclosure is based on the initial application.
KR1019810002591A 1980-07-23 1981-07-16 Metal surface treatment method by glow discharge KR890001031B1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP80-99,879 1980-07-23
JP9987980A JPS5726159A (en) 1980-07-23 1980-07-23 Ion surface treatment
US99,879 1980-07-23

Publications (2)

Publication Number Publication Date
KR830006463A true KR830006463A (en) 1983-09-24
KR890001031B1 KR890001031B1 (en) 1989-04-20

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KR1019810002591A KR890001031B1 (en) 1980-07-23 1981-07-16 Metal surface treatment method by glow discharge

Country Status (2)

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JP (1) JPS5726159A (en)
KR (1) KR890001031B1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2630133B1 (en) * 1988-04-18 1993-09-24 Siderurgie Fse Inst Rech PROCESS FOR IMPROVING THE CORROSION RESISTANCE OF METAL MATERIALS

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5323836A (en) * 1976-08-19 1978-03-04 Kawasaki Heavy Ind Ltd Ionitriding
JPS5544541A (en) * 1978-09-22 1980-03-28 Mitsubishi Electric Corp Partially hardening method by electric discharge

Also Published As

Publication number Publication date
JPS5726159A (en) 1982-02-12
KR890001031B1 (en) 1989-04-20
JPS6231065B2 (en) 1987-07-06

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