KR20260048534A - 반도체 장치 및 반도체 장치의 제작 방법 - Google Patents
반도체 장치 및 반도체 장치의 제작 방법Info
- Publication number
- KR20260048534A KR20260048534A KR1020267000719A KR20267000719A KR20260048534A KR 20260048534 A KR20260048534 A KR 20260048534A KR 1020267000719 A KR1020267000719 A KR 1020267000719A KR 20267000719 A KR20267000719 A KR 20267000719A KR 20260048534 A KR20260048534 A KR 20260048534A
- Authority
- KR
- South Korea
- Prior art keywords
- insulating layer
- layer
- conductive layer
- opening
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B12/00—Dynamic random access memory [DRAM] devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/70—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates the floating gate being an electrode shared by two or more components
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/67—Thin-film transistors [TFT]
- H10D30/674—Thin-film transistors [TFT] characterised by the active materials
- H10D30/6755—Oxide semiconductors, e.g. zinc oxide, copper aluminium oxide or cadmium stannate
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/80—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs
- H10D84/82—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs of only field-effect components
- H10D84/83—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs of only field-effect components of only insulated-gate FETs [IGFET]
Landscapes
- Semiconductor Memories (AREA)
- Thin Film Transistor (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JPJP-P-2023-130413 | 2023-08-09 | ||
| JP2023130413 | 2023-08-09 | ||
| PCT/IB2024/057484 WO2025032444A1 (ja) | 2023-08-09 | 2024-08-02 | 半導体装置、及び半導体装置の作製方法 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR20260048534A true KR20260048534A (ko) | 2026-04-10 |
Family
ID=94534010
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020267000719A Pending KR20260048534A (ko) | 2023-08-09 | 2024-08-02 | 반도체 장치 및 반도체 장치의 제작 방법 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPWO2025032444A1 (https=) |
| KR (1) | KR20260048534A (https=) |
| CN (1) | CN121464732A (https=) |
| WO (1) | WO2025032444A1 (https=) |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI685113B (zh) * | 2015-02-11 | 2020-02-11 | 日商半導體能源研究所股份有限公司 | 半導體裝置及其製造方法 |
| JP2017168764A (ja) * | 2016-03-18 | 2017-09-21 | 株式会社ジャパンディスプレイ | 半導体装置 |
| JP2022049605A (ja) * | 2020-09-16 | 2022-03-29 | キオクシア株式会社 | 半導体装置及び半導体記憶装置 |
-
2024
- 2024-08-02 JP JP2025538905A patent/JPWO2025032444A1/ja active Pending
- 2024-08-02 KR KR1020267000719A patent/KR20260048534A/ko active Pending
- 2024-08-02 WO PCT/IB2024/057484 patent/WO2025032444A1/ja active Pending
- 2024-08-02 CN CN202480045695.7A patent/CN121464732A/zh active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| JPWO2025032444A1 (https=) | 2025-02-13 |
| WO2025032444A1 (ja) | 2025-02-13 |
| CN121464732A (zh) | 2026-02-03 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PA0105 | International application |
St.27 status event code: A-0-1-A10-A15-nap-PA0105 |
|
| PG1501 | Laying open of application |
St.27 status event code: A-1-1-Q10-Q12-nap-PG1501 |
|
| Q12 | Application published |
Free format text: ST27 STATUS EVENT CODE: A-1-1-Q10-Q12-NAP-PG1501 (AS PROVIDED BY THE NATIONAL OFFICE) |